Micro-Hand Manipulator Axis Pro
| Origin | Japan |
|---|---|
| Manufacturer Type | Distributor |
| Origin Category | Imported |
| Model | Axis Pro |
| Pricing | Upon Request |
Overview
The Micro-Hand Manipulator Axis Pro is a precision-engineered micro-handling system designed for non-contact or minimally invasive manipulation of micron-scale specimens in controlled optical and vacuum environments. Built upon a high-stiffness piezoelectric actuation platform with sub-micron positional resolution, the device operates on closed-loop motion control principles to ensure repeatability and traceable displacement across X-Y-Z axes. Its integration into optical laboratory setups—particularly inverted microscopes, SEM-EDS workstations, and laser micromanipulation rigs—enables real-time visual feedback during delicate mechanical interventions. Unlike conventional macro-scale robotic arms, the Axis Pro is optimized for tasks requiring spatial fidelity below 5 µm, making it indispensable in semiconductor metrology, failure analysis of MEMS devices, and micro-inclusion isolation from geological or synthetic matrix materials.
Key Features
- Sub-micron positioning accuracy (≤0.3 µm typical step resolution) via integrated capacitive position sensors and digital feedback control
- Modular end-effector interface supporting interchangeable tools: tungsten carbide micro-probes, diamond-coated cutting tips, quartz-fiber force sensors, and calibrated micro-spatulas
- Optical compatibility: fully transparent in visible and near-UV spectral ranges; minimal stray light generation and no magnetic interference
- Real-time imaging synchronization: native trigger output for synchronized capture with high-speed CMOS cameras (up to 100 fps) and time-lapse recording modules
- Vibration-damped base mount compatible with optical tables (M6 threaded holes, ISO 20 mounting standard)
- Low-outgassing construction (aluminum alloy chassis with PTFE-insulated wiring) certified for use in Class 100 cleanrooms and UHV-compatible auxiliary chambers (≤1×10⁻⁶ mbar base pressure)
Sample Compatibility & Compliance
The Axis Pro accommodates rigid and semi-rigid samples ranging from 1 µm to 500 µm in lateral dimension, including silicon wafers, ceramic substrates, polymer thin films, and mineralogical sections. It supports both dry and inert-gas (N₂/Ar) ambient operation, and optional environmental enclosures permit humidity-controlled handling of hygroscopic specimens. The system conforms to IEC 61000-6-2 (electromagnetic immunity) and IEC 61000-6-4 (emission standards), and its mechanical design adheres to ISO 14971:2019 for risk management in laboratory equipment. While not classified as medical device hardware, its operational protocols align with GLP documentation requirements for sample integrity tracking and operator intervention logging.
Software & Data Management
Control is executed via the proprietary AxisControl Suite v3.2, a Windows-based application offering scriptable motion sequences, coordinate mapping relative to microscope stage coordinates, and timestamped event logging. All manipulator actions—including tool engagement force thresholds, dwell times, and image capture triggers—are recorded in ASCII-formatted .csv logs compliant with FDA 21 CFR Part 11 audit trail specifications (user authentication, electronic signatures, and immutable log archiving). Export options include TIFF metadata embedding (via EXIF/XMP schema) and direct linkage to LabArchives ELN platforms through RESTful API endpoints. Firmware updates are digitally signed and verified prior to installation to maintain system integrity.
Applications
- Extraction and relocation of fluid inclusions from quartz or feldspar thin sections for subsequent Raman or LA-ICP-MS analysis
- Targeted cross-sectioning of solder joints or Cu-interconnects in failure analysis workflows (JEDEC JESD22-A108 compliant sample prep)
- In situ mechanical testing of freestanding nanowires under optical microscopy observation
- Positioning of calibration standards (e.g., NIST-traceable grating rulers) within interferometric alignment procedures
- Micro-dissection of photoresist patterns for CD-SEM correlation studies in lithography process development
FAQ
Is the Axis Pro compatible with third-party microscope stages?
Yes—it supports standard kinematic mounting interfaces (SM1, C-mount, and M27×0.75) and provides configurable coordinate transformation matrices for seamless registration with motorized stages from Prior, Ludl, or Märzhäuser.
Can it operate inside a scanning electron microscope chamber?
With optional UHV-rated version (Axis Pro-UHV), yes—certified for bake-out at 120 °C and compatible with differential pumping configurations up to 10⁻⁴ Pa operating pressure.
What is the maximum applied force during micro-cutting operations?
Force feedback is limited to ≤150 µN in standard configuration; higher-force variants (up to 2 mN) are available under custom engineering order with recalibrated load-cell integration.
Does the system support automated pattern-based manipulation?
Yes—through Python API bindings (axispro-sdk), users can define geometric paths, conditional logic based on image analysis inputs, and integrate with OpenCV or MATLAB vision pipelines.
Is training and technical documentation provided?
Comprehensive bilingual (English/Japanese) user manuals, SOP templates for ISO/IEC 17025 labs, and remote setup assistance are included with every unit shipment.
