Kanomax 3950 Ultra-Compact Airborne Particle Counter

Overview

The Kanomax 3950 Ultra-Compact Airborne Particle Counter is an OEM-optimized optical particle counter engineered for embedded integration into semiconductor process tools, miniaturized cleanroom monitoring systems, and high-precision environmental control units. Based on the principle of single-particle light scattering (SPLS), the instrument detects airborne particulates by illuminating aerosol samples with a stable laser source and quantifying scattered light intensity above calibrated photodetector thresholds. Its dual-channel detection architecture simultaneously resolves particles ≥0.1 µm and ≥0.3 µm—enabling real-time discrimination of ultrafine contamination critical in Class 1–Class 10 clean environments. With a nominal volumetric flow rate of 2.83 L/min (0.1 CFM), the 3950 complies with ISO 21501-4 and JIS B9921 for calibration traceability, measurement uncertainty, and counting efficiency validation. Its compact footprint (150 × 163 × 228 mm) and 3.4 kg mass allow direct mechanical mounting within tool enclosures or laminar flow hoods where space and thermal budget are constrained.

Key Features

• Ultra-compact form factor optimized for OEM integration—designed to replace legacy panel-mounted or benchtop counters in space-limited applications
• Dual-sensitivity optical detection system with calibrated response to 0.1 µm and 0.3 µm polystyrene latex (PSL) reference particles
• High-fidelity 4.3-inch full-color TFT touchscreen interface supporting intuitive operation without external PC dependency
• Onboard data logging capacity for up to 10,000 measurement records in industry-standard CSV format
• Multi-protocol digital connectivity: isolated RS-485 (9600–38400 baud), 10/100 Mbps Ethernet, and dual-role USB (Host for printers/USB storage; Device for PC configuration and firmware updates)
• Six operational modes: Single, Repeat, Continuous, Calculate (differential/accumulated counts), ISO Cleanroom Classification, and GB/T 16292 compliance testing
• Internal vacuum pump with flow stability maintained across variable backpressure conditions typical in ducted or manifolded sampling configurations

Sample Compatibility & Compliance

The Kanomax 3950 is validated for continuous monitoring of non-hazardous, non-corrosive ambient air and filtered process gases in controlled environments. It is not intended for use with explosive, toxic, or high-humidity (>85% RH) or condensing airstreams. Calibration and performance verification adhere strictly to ISO 21501-4:2018 (Determination of particle size distribution—Single particle light scattering airborne particle counters) and JIS B9921:2010 (Cleanroom—Airborne particle counters). Counting efficiency meets specified tolerances: 50 ± 20% at the 0.1 µm threshold and 100 ± 10% at 1.5×–2× the minimum detectable size (i.e., 0.15–0.2 µm PSL). Size resolution remains ≤15% relative to 0.3 µm PSL, satisfying metrological requirements for Grade A/B cleanroom qualification under EU GMP Annex 1 and ISO 14644-1. The device supports audit-ready operation when paired with compliant data management software meeting FDA 21 CFR Part 11 electronic record and signature requirements.

Software & Data Management

Data acquisition and visualization are supported via Kanomax’s proprietary PC-based software suite (compatible with Windows 10/11), which enables remote configuration, real-time streaming, historical trend analysis, and automated report generation in PDF or Excel formats. All logged measurements include timestamp, location ID (up to 99 user-defined zones), sampling duration, flow rate confirmation, and mode selection—ensuring full traceability for GLP/GMP audits. Raw CSV files retain native resolution and metadata fields required for third-party statistical process control (SPC) platforms. Firmware updates are delivered via signed USB media or over Ethernet using secure HTTP(S) protocols. Audit trail functionality—including operator login, parameter changes, and data export events—is configurable and exportable in tamper-evident log files.

Applications

• Embedded particle sensing in semiconductor lithography steppers, etch tools, and wafer inspection stations
• In-line monitoring of HEPA/ULPA filter integrity and airflow uniformity in isolators and RABS systems
• Real-time classification of micro-environments in pharmaceutical filling lines per ISO 14644-1:2015
• Validation and routine surveillance of gloveboxes, biosafety cabinets, and laminar flow workstations
• Research-grade aerosol characterization in nanomaterial synthesis labs and clean fabrication pilot lines
• Mobile contamination mapping using handheld or cart-mounted deployments with GPS-synced location tagging

FAQ

What particle sizes does the Kanomax 3950 measure?
It provides simultaneous, independent counts for particles ≥0.1 µm and ≥0.3 µm using calibrated optical thresholds.
Is the instrument suitable for continuous unattended operation?
Yes—its internal pump, thermal management design, and non-volatile memory support 24/7 monitoring with programmable cycle intervals from 6 seconds to 99 minutes 59 seconds.
Does it meet international cleanroom certification standards?
Yes—it complies with ISO 21501-4 and JIS B9921, and its performance parameters satisfy data requirements for ISO 14644-1 Class 1–10 certification when deployed per ISO 14644-2 test protocols.
Can measurement data be exported for regulatory submission?
Yes—CSV exports include all raw and derived metrics with timestamps and location identifiers, and optional software modules provide 21 CFR Part 11-compliant electronic signatures and audit trails.
What is the maximum particle concentration it can accurately resolve?
The upper limit is 10⁷ particles per cubic meter, with coincidence error correction applied per ISO 21501-4 Annex C guidelines.
How is calibration maintained in field use?
Field verification is performed using NIST-traceable PSL aerosols; full recalibration is recommended annually or after 2,000 operating hours, per Kanomax’s service bulletin KMC-3950-REV2.