INFICON SKY CDG025D and CDG025D-S Capacitance Manometer Vacuum Gauge
| Origin | Switzerland |
|---|---|
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | CDG025D, CDG025D-S |
| Pricing | Upon Request |
Overview
The INFICON SKY CDG025D and CDG025D-S are high-accuracy, temperature-compensated capacitance manometers designed for stable, repeatable absolute pressure measurement in demanding industrial vacuum environments. Operating on the fundamental principle of capacitive displacement sensing, these gauges measure pressure by detecting minute deflections of a metallized ceramic diaphragm—serving as one plate of a precision capacitor—under applied differential pressure. The resulting capacitance change is converted into a calibrated analog or digital output via advanced embedded digital electronics. Engineered for semiconductor process tools—including etch, CVD, PVD, and ALD chambers—the CDG025D series delivers fast stabilization after power-on (<30 seconds to full accuracy) and rapid recovery following atmospheric exposure (typically <60 seconds), minimizing process downtime. Its all-ceramic, ultra-pure Al₂O₃ sensor element exhibits exceptional resistance to chemical attack from aggressive process gases (e.g., Cl₂, NF₃, WF₆, O₂ plasmas), ensuring long-term zero stability over millions of pressure cycles.
Key Features
- Full-scale range: 0.1 to 1000 Torr (13.3 Pa to 133.3 kPa), optimized for low-to-medium vacuum process control
- Integrated digital electronics with real-time temperature compensation across –10 °C to +50 °C ambient operating range
- One-touch zero calibration function—performed without venting the system or interrupting process flow
- Patented sensor shielding technology minimizes deposition contamination on the diaphragm surface during reactive processes
- Rugged mechanical housing with enhanced EMC immunity per IEC 61326-1 (industrial environment)
- Wide-input power supply: 18–30 VDC, compatible with standard industrial PLC power rails
- Optional dual programmable setpoints for local alarm or interlock signaling (CDG025D-S variant)
- Optional RS-232 serial interface supporting ASCII command protocol for integration into SCADA or MES systems
Sample Compatibility & Compliance
The CDG025D is compatible with clean dry air, nitrogen, argon, oxygen, helium, and common semiconductor process gases—including corrosive species encountered in plasma-enhanced thin-film deposition. Its ceramic sensor meets ASTM E2497-22 requirements for capacitance manometer performance verification. The device conforms to ISO 9001-certified manufacturing practices and supports GLP/GMP traceability through factory calibration documentation (NIST-traceable certificate available upon request). While not intrinsically safe, it is suitable for use in Class 1, Division 2 hazardous locations when installed per NEC Article 500 guidelines. No user recalibration is required under normal operation; periodic verification per ISO/IEC 17025-accredited procedures is recommended every 12 months for critical applications.
Software & Data Management
No proprietary software is bundled; however, the RS-232 option enables direct communication using standard terminal emulators or custom LabVIEW/Python scripts. ASCII-based commands allow remote reading of pressure value (in Torr or mbar), status flags (e.g., “OK”, “OVLD”, “TEMP”), and configuration of setpoint thresholds. All digital functions—including zero offset storage and temperature coefficient adjustment—are retained in non-volatile memory. Audit trails for calibration events and firmware updates can be logged externally via host system timestamps. For FDA-regulated environments, the gauge supports 21 CFR Part 11 compliance when integrated with validated data acquisition platforms that enforce electronic signatures and change control.
Applications
- Semiconductor fabrication: Real-time chamber pressure monitoring during plasma etch, sputtering, and atomic layer deposition sequences
- Flat-panel display manufacturing: Precise control of vacuum levels in large-area PVD and CVD reactors
- Research & development vacuum systems: High-stability reference measurement for leak detection, outgassing studies, and pump characterization
- Industrial vacuum furnaces and coating systems: Closed-loop feedback for pressure-regulated thermal processing
- Calibration laboratories: Transfer standard for secondary vacuum gauge verification in the 0.1–1000 Torr range
FAQ
What is the typical zero drift specification over 12 months?
Long-term zero stability is ≤ ±0.05 % FS/year under constant temperature conditions, verified per manufacturer’s accelerated aging protocol.
Can the CDG025D be mounted in any orientation?
Yes—its ceramic diaphragm design eliminates orientation-dependent gravity effects; mounting flexibility supports vertical, horizontal, or inverted installation.
Is the RS-232 interface optically isolated?
No; isolation must be implemented externally via signal conditioners if galvanic separation from ground loops is required.
Does the CDG025D-S support analog output in addition to setpoints?
Yes—both models provide a standard 0–10 VDC analog output proportional to pressure; the “S” suffix denotes added setpoint relay functionality only.
How often should the sensor be cleaned?
Under typical semiconductor process conditions, no routine cleaning is necessary due to the patented shield; visual inspection every 6 months is advised for high-deposition-rate tools.
