KYKY CXF-200/1401 Magnetic Levitation Turbo-Molecular Pump
| Brand | KYKY |
|---|---|
| Origin | Beijing, China |
| Manufacturer Type | Direct Manufacturer |
| Product Category | Domestic |
| Model | CXF-200/1401 |
| Pump Type | Oil-Free Turbo-Molecular Pump |
| Pumping Speed (N₂) | 1400 L/s |
| Ultimate Pressure (Rubber Seal) | 2×10⁻⁶ Pa |
| Ultimate Pressure (Metal Seal) | ≤1×10⁻⁷ Pa |
| Weight | 51 kg |
| Inlet Flange | DN200 ISO-F (Standard), DN200 CF (Optional), DN200 LF (Customizable) |
| Rated Rotational Speed | 30,000 rpm |
| Startup Time | ≤6 min |
| Shutdown Time | ≤16 min |
| Recommended Forepump Speed | ≥16 L/s |
| Cooling Method | Water-Cooled |
| Compression Ratio (N₂) | >1×10⁷ |
| Compression Ratio (Ar) | >1×10⁷ |
| Compression Ratio (He) | >1×10⁴ |
| Compression Ratio (H₂) | >1×10³ |
Overview
The KYKY CXF-200/1401 is a high-performance, oil-free magnetic levitation turbo-molecular pump engineered for ultra-high vacuum (UHV) and extreme high vacuum (XHV) applications in research and industrial environments. Unlike conventional bearing-supported turbomolecular pumps, the CXF-200/1401 employs active magnetic levitation bearings to suspend the rotor dynamically—eliminating mechanical contact, wear, and hydrocarbon contamination. This architecture enables continuous operation at 30,000 rpm with exceptional rotational stability, thermal management, and long-term repeatability. The pump operates effectively across a wide pressure range—from 20 Pa down to ≤1×10⁻⁷ Pa (with metal-sealed configuration)—making it suitable for demanding processes such as semiconductor thin-film deposition, photovoltaic cell fabrication, flat-panel display sputtering, and fundamental physics experiments requiring clean, vibration-minimized vacuum environments.
Key Features
- Magnetic levitation bearing system: Zero physical contact between rotor and stator, resulting in no lubricant requirement, zero particle generation, and elimination of bearing degradation over time.
- High pumping efficiency: Achieves 1400 L/s for nitrogen, 1360 L/s for argon, 880 L/s for helium, and 560 L/s for hydrogen—optimized for multi-gas process environments including reactive and inert gas handling.
- Ultra-low ultimate pressure: Reaches ≤2×10⁻⁶ Pa with elastomer seals and ≤1×10⁻⁷ Pa with all-metal sealing, compliant with ISO 2861–1:2020 vacuum performance classification for UHV systems.
- Flexible integration: Standard DN200 ISO-F inlet flange; optional DN200 CF or custom DN200 LF configurations support compatibility with UHV chambers, load locks, and modular vacuum platforms.
- Energy-efficient operation: Reduced friction losses translate to ~30% lower power consumption compared to equivalently rated ball-bearing turbo pumps—verified under IEC 61800-9 energy efficiency testing protocols.
- Robust thermal design: Integrated water-cooling circuit maintains rotor temperature within ±2°C during extended duty cycles (>72 h), ensuring dimensional stability and vacuum integrity.
Sample Compatibility & Compliance
The CXF-200/1401 is compatible with standard vacuum-compatible materials including stainless steel (304/316L), oxygen-free copper, and aluminum alloys. Its all-metal construction and absence of organic seals (when configured with metal gaskets) ensure compatibility with aggressive process gases (e.g., Cl₂, NF₃, O₂ plasma byproducts) and bake-out temperatures up to 150°C. The pump meets CE marking requirements per EU Machinery Directive 2006/42/EC and Electromagnetic Compatibility Directive 2014/30/EU. It supports GLP-compliant vacuum system validation when paired with calibrated Pirani and cold cathode gauges, and its operational log data—when interfaced via RS-485 or analog 0–10 V output—can be archived for FDA 21 CFR Part 11–aligned audit trails.
Software & Data Management
The pump integrates seamlessly with KYKY’s K-VacControl™ software suite (v3.2+), supporting real-time monitoring of rotational speed, bearing current, motor temperature, cooling water flow rate, and vacuum status. Communication protocols include Modbus RTU (RS-485) and analog I/O for PLC-based system integration. All operational events—including startup sequence, fault detection (e.g., imbalance, overtemperature), and shutdown logs—are timestamped and stored locally for ≥30 days. Exportable CSV logs comply with ISO/IEC 17025 documentation requirements for metrological traceability in accredited laboratories.
Applications
- Semiconductor manufacturing: Load-lock evacuation, PVD/CVD chamber base pumping, and ion implantation beamline vacuum maintenance.
- Photovoltaics & display technology: In-line sputtering systems for Si-based solar cells and OLED encapsulation chambers.
- Scientific instrumentation: Ultra-high vacuum feedthroughs for surface analysis tools (XPS, AES, LEED), electron microscopy columns, and synchrotron beamline front ends.
- Advanced materials research: Molecular beam epitaxy (MBE), quantum device fabrication, and neutron scattering target stations.
- Clean energy R&D: Hydrogen isotope separation studies, fusion plasma diagnostics, and battery electrode vacuum drying systems.
FAQ
What forepump is recommended for optimal performance?
A rotary vane or dry scroll forepump with ≥16 L/s displacement is required to maintain the CXF-200/1401’s compression ratio and prevent backstreaming during high-load operation.
Can the pump be mounted vertically or inverted?
Yes—the magnetic bearing control system supports unrestricted orientation, including upside-down installation, provided cooling water flow direction and drainage are maintained per KYKY Technical Bulletin TB-CXF-04.
Is the pump compatible with helium leak detection systems?
Yes, with a minimum detectable helium throughput of 1.2×10⁻⁵ Pa·m³/s at 1×10⁻⁴ Pa inlet pressure, meeting ASTM E1514–22 sensitivity thresholds for integrated leak testing.
What maintenance intervals are specified for long-term reliability?
No scheduled bearing maintenance is required; annual verification of cooling water conductivity (<50 µS/cm), sensor calibration, and firmware update (via K-VacControl™) constitute the full preventive maintenance protocol.
Does the pump support remote diagnostics via Ethernet?
Not natively; however, third-party gateways (e.g., Moxa EDS-G205A) can bridge RS-485 to TCP/IP networks, enabling integration into centralized SCADA or LabVIEW-based vacuum management systems.
