Kashiyama MU300X Oil-Free Dry Vacuum Pump

Overview

The Kashiyama MU300X is a high-capacity, oil-free dry vacuum pump engineered for demanding laboratory and pilot-scale industrial applications requiring clean, hydrocarbon-free vacuum environments. Based on Kashiyama’s proven rotary vane architecture with fluoropolymer-coated vanes and a corrosion-resistant aluminum alloy housing, the MU300X operates without hydrocarbon-based lubricants—eliminating oil backstreaming, vapor contamination, and maintenance downtime associated with traditional oil-sealed pumps. Its core design integrates a dual-stage compression mechanism optimized for rapid evacuation from atmospheric pressure down to an ultimate vacuum of 0.5 Pa, making it suitable for processes where residual hydrocarbons or particulates would compromise sample integrity, thin-film deposition, or analytical instrumentation interfacing (e.g., mass spectrometry inlet systems, electron microscopy chambers, or vacuum drying ovens). The pump is configured as a modular assembly comprising the MU100X base unit and one MB300 booster module, enabling scalable performance while retaining mechanical simplicity and thermal stability.

Key Features

• Oil-free dry operation using fluorinated synthetic lubricant (0.2 L total), ensuring ultra-clean vacuum output compliant with ISO 8573-1 Class 0 (contamination-free air) standards for critical processes.
• High pumping speed of 5000 L/min at both 50 Hz and 60 Hz supply frequencies—optimized for rapid chamber evacuation in batch processing and continuous vacuum transfer lines.
• Robust thermal management system: integrated water-cooling circuit (2–3 L/min flow, 0.2–0.5 MPa gauge pressure) maintains stable rotor temperature under sustained load, minimizing thermal drift and extending service life.
• Dual-purpose nitrogen purge interface (0–10 SLM, 0.1–0.7 MPa gauge) supports both shaft seal protection during corrosive gas handling and dilution of reactive process byproducts—essential for semiconductor R&D, plasma etching support, and aggressive chemical vapor applications.
• Modular construction (MU100X + MB300) allows field-upgradable capacity and simplified component-level servicing without full system replacement.
• Compliant with IEC 60034-1 motor insulation class F and IP54 enclosure rating, ensuring reliable operation in controlled laboratory environments with moderate ambient humidity and particulate levels.

Sample Compatibility & Compliance

The MU300X is compatible with non-condensable gases and low-vapor-pressure volatiles typical in physical vapor deposition (PVD), freeze-drying, vacuum impregnation, and accelerator mass spectrometry sample introduction. It is not intended for direct pumping of solvent vapors, halogenated compounds, or highly polymerizing monomers without upstream cold traps or scrubbers. For use in regulated environments—including GLP-compliant analytical labs or GMP-aligned pilot facilities—the pump supports audit-ready operational logging when paired with optional analog/digital I/O modules. While the MU300X itself does not carry FDA 21 CFR Part 11 certification, its control interface and status outputs are designed to integrate into validated vacuum subsystems meeting ISO/IEC 17025 and ASTM E2915-21 requirements for vacuum system qualification.

Software & Data Management

The MU300X operates as a standalone electromechanical device with no embedded firmware or proprietary software stack. Status monitoring is achieved via hardwired analog outputs (0–10 V or 4–20 mA) for vacuum level, motor current, coolant pressure, and bearing temperature—enabling integration into LabVIEW, DeltaV, or Siemens PCS7 SCADA architectures. Optional digital communication modules (RS-485 Modbus RTU) provide real-time access to operational parameters including cumulative runtime, thermal event history, and purge gas consumption—facilitating predictive maintenance scheduling and compliance documentation per ISO 55001 asset management frameworks. All electrical connections conform to IEC 61000-6-3 EMC emission limits and IEC 61000-6-2 immunity standards.

Applications

• High-throughput vacuum drying and degassing of pharmaceutical intermediates and battery electrode slurries.
• Backing pump for turbomolecular and cryogenic high-vacuum systems in surface science laboratories.
• Vacuum environment generation for electron beam lithography tools and focused ion beam (FIB) workstations.
• Process vacuum in pilot-scale atomic layer deposition (ALD) and sputtering reactors requiring hydrocarbon-free background conditions.
• Support vacuum for residual gas analyzers (RGAs) and quadrupole mass spectrometers where baseline contamination must remain below 1×10⁻¹² Torr equivalent hydrocarbon partial pressure.

FAQ

Is the MU300X suitable for pumping corrosive gases such as Cl₂ or HCl?
Yes—but only when operated with continuous nitrogen purge (minimum 0.04 MPa gauge, 2–5 SLM) to protect internal seals and vanes. Direct exposure without purge will accelerate wear and void warranty.
What cooling water specifications are mandatory for continuous operation?
Deionized or softened water at 2–3 L/min flow rate, 10–25 °C inlet temperature, and maintained pressure between 0.2–0.5 MPa (gauge). Flow interruption triggers automatic shutdown via integrated pressure switch.
Can the MU300X be integrated into a PLC-controlled vacuum system?
Yes—via standard 0–10 V analog inputs for speed control and discrete relay outputs for fault signaling. Optional RS-485 Modbus RTU module enables full parameter read/write capability.
Does the pump require periodic oil changes?
No. The fluorinated synthetic lubricant is sealed for life under normal operating conditions (≤8,000 hours). Replenishment is only required after major service events involving vane or bearing replacement.
What flange standards does the MU300X support?
Primary inlet uses NW40 (KF40) vacuum flange per DIN 28413. Optional RC 3/8″ (ISO 6162-1) and 1/4″ NPT ports are available for purge, vent, and sensor connections.