Kashiyama
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| Brand | Kashiyama |
|---|---|
| Origin | Japan |
| Pump Type | Oil-Free Diaphragm Vacuum Pump |
| Model Series | MU (MUP600E / MUP1200E / MUP1800E / MUH3000) |
| Ultimate Pressure | 0.5 Pa |
| Maximum Pumping Speed | 10,000–50,000 L/min (depending on model) |
| Power Supply | 3-Phase AC 200–220 V, 50/60 Hz |
| Motor Power | 0.8–1.6 kW |
| Cooling Requirement | 2 L/min water or optional N₂ purge (0–60 L/min) |
| Dimensions (L×W×H) | 695×285×655 mm (MUP600E) to 910×420×900 mm (MUP1800E/MUH3000) |
| Brand | Kashiyama |
|---|---|
| Origin | Japan |
| Pump Type | Dry, Two-Stage Roots |
| Ultimate Vacuum | 3.0 Pa (MU100P/H model) |
| Pumping Speed | 1,660 L/min |
| Motor Power | 0.7 kW |
| Dimensions (L×W×H) | 630 × 350 × 360 mm |
| Weight | 70 kg |
| Electrical Supply | 3-Phase AC 200–220 V, 50/60 Hz |
| Compliance | CE-marked per EU Machinery Directive 2006/42/EC and Low Voltage Directive 2014/35/EU |
| Cooling | Air-cooled |
| Sealing | Metal-sealed rotors, no lubrication required |
| Brand | Kashiyama |
|---|---|
| Origin | Japan |
| Pump Type | Dry, Oil-Free Roots Vacuum Pump |
| Model Series | MU-X (MU100X, MU180X, MU300X, MU600X, MU1218X, MU20N18X) |
| Ultimate Vacuum | 1.5 Pa (MU100X) to 0.5 Pa (MU180X and above) |
| Pumping Speed | 1,660 – 30,000 L/min |
| Motor Power | 0.35 – 1.0 kW |
| Dimensions (L×W×H) | 450×230×275 mm (MU100X) to 1000×450×950 mm (MU20N18X) |
| Weight | 60 – 410 kg |
| Supply Voltage | 3-Phase AC 200–220 V, 50/60 Hz |
| Compliance | CE-marked, RoHS-compliant, designed for ISO Class 1–5 cleanroom integration |
| Cooling | Air-cooled |
| Drive | Direct-coupled synchronous motor |
| Sealing | Metal-sealed rotor housing, no lubricants in vacuum path |
| Brand | Kashiyama |
|---|---|
| Origin | Japan |
| Pump Type | Dry Scroll Vacuum Pump |
| Model | MU100X / MU100XN |
| Ultimate Pressure | 1.5 Pa |
| Pumping Speed (50/60 Hz) | 1660 L/min |
| Inlet Flange | NW50 |
| Exhaust Flange | NW25 |
| Motor Power | 2.2 kW |
| Cooling Water Requirement | 1.5–3.0 L/min at 0.2–0.5 MPa (gauge), 10–25 °C |
| Nitrogen Purge | Optional (5 SLM @ 0.05 MPa g) for corrosive gas service |
| Approx. Weight | 60 kg |
| Electrical Supply | 3-phase, 3.8 kVA, 2.0–10.8 A operating current |
| Control Interface | DB-25 connector (Japan Aviation Electronics PF-N series) |
| Lubricant | Fluorinated oil (0.1 L) |
| Brand | Kashiyama |
|---|---|
| Origin | Japan |
| Model | MU1200X |
| Pump Type | Oil-Free Scroll |
| Ultimate Vacuum Pressure | 0.5 Pa |
| Pumping Speed | 0–45 SLM (Standard Liters per Minute) |
| Inlet Flange | NW100 |
| Outlet Flange | NW40 |
| Motor Power | 4.4 kW |
| Cooling Water Requirement | 2–3 L/min at 0.2–0.5 MPa (gauge) |
| Operating Temperature Range | 10–25 °C |
| Electrical Supply | 3-phase, 200–220 V, 50/60 Hz |
| Approx. Weight | 165 kg |
| Lubricant | Fluorinated Oil (0.1 + 0.25 L) |
| Brand | Kashiyama |
|---|---|
| Origin | Japan |
| Model | MU180X / MU180XN |
| Pump Type | Dry Scroll Vacuum Pump |
| Ultimate Pressure | 1.5 Pa |
| Pumping Speed (50/60 Hz) | 3000 L/min |
| Inlet Flange | NW160 |
| Exhaust Flange | NW40 |
| Motor Power | 2.2 kW |
| Weight | 95 kg |
| Cooling Water Requirement | 2–3 L/min at 0.2–0.5 MPa (gauge), 10–25 °C |
| Nitrogen Purge Supply | 0.04–0.07 MPa (gauge), 5 SLM @ 0.05 MPa (gauge) |
| Electrical Supply | 3-phase, 200–220 V, 50/60 Hz, ±10% tolerance |
| Apparent Power | 4.5 kVA |
| Operating Current | 2.0–13.0 A |
| Lubricant | Fluorinated Oil, 0.1 L |
| Brand | Kashiyama |
|---|---|
| Origin | Japan |
| Model | MU300X |
| Pump Type | Oil-Free Dry Rotary Vane Pump |
| Ultimate Vacuum Pressure | 0.5 Pa |
| Pumping Speed (50/60 Hz) | 5000 L/min |
| Inlet Flange | NW40 (KF40) |
| Motor Power | 4.4 kW |
| Weight | 100 kg |
| Cooling Water Requirement | 2–3 L/min at 0.2–0.5 MPa (gauge) |
| Nitrogen Purge Supply | 0–10 SLM (0.1–0.7 MPa gauge) |
| Electrical Supply | 3-Phase, 200–220 V, 50/60 Hz |
| Apparent Power | 6.8 kVA |
| Operating Current | 6–15 A |
| Ambient Temperature Range | 10–25 °C |
| Lubricant | Fluorinated Oil (0.2 L total) |
| Brand | Kashiyama |
|---|---|
| Origin | Japan |
| Model | MU600X |
| Pump Type | Dry Scroll Vacuum Pump |
| Ultimate Vacuum Pressure | 0.5 Pa |
| Pumping Speed | 0–10 SLM (Standard Liters per Minute) |
| Inlet Flange | NW80 |
| Outlet Flange | NW40 |
| Motor Power | 0.5 kW |
| Motor Supply | 3-Phase, 200–220 V, 50/60 Hz |
| Cooling Water Requirement | 2–3 L/min at 0.2–0.5 MPa (gauge) |
| Nitrogen Purge Flow | 0–10 SLM (optional, for corrosive gas handling) |
| Dimensions (W×D×H) | 500 × 500 × 600 mm |
| Weight | 120 kg |
| Lubricant | Fluorinated Oil (0.1 + 0.1 L) |
| Operating Ambient Temperature | 10–25 °C |
| Electrical Capacity | 8.9 kVA |
| Rated Current | 6–18 A |
| Acceleration Time | ~10 s |
| Deceleration Time | ~5 s |
| Inlet Connection | RC 3/8″ (with coupler) |
| Exhaust Tubing | 1/4″ |
| Maximum Inlet Pressure | Atmospheric |
| Gas Compatibility | Non-corrosive gases (N₂ purge required for aggressive or condensable vapors) |
| Brand | Kashiyama |
|---|---|
| Origin | Japan |
| Model | NeoDry 100E |
| Pump Type | Oil-Free Dry Rotary Vane Vacuum Pump |
| Ultimate Vacuum (without gas ballast) | 2 Pa |
| Maximum Pumping Speed | 1670 L/min |
| Inlet Flange | NW40 |
| Exhaust Flange | NW25 |
| Motor Power | 1.1 kW (3-phase, AC 200–240 V, 50/60 Hz) |
| Gas Ballast | Optional |
| Max Water Vapor Handling Capacity (with gas ballast) | 600 g/h |
| Noise Level | ≤58 dB(A) |
| Vibration | ≤8 μm p-p |
| Dimensions (L×W×H) | 576×320×365 mm |
| Weight | 93 kg |
| Cooling Method | Air-Cooled |
| Maintenance Interval | Up to 3 Years (under clean operating conditions) |
| Brand | Kashiyama |
|---|---|
| Origin | Japan |
| Pump Type | Oil-Free Diaphragm Vacuum Pump |
| Model | NeoDry-15G |
| Maximum Pumping Speed | 250 L/min |
| Ultimate Pressure (Gas Ballast Closed) | 1.0 Pa |
| Motor Power at Ultimate Pressure | 0.34 kW |
| Noise Level | ≤45 dB(A) |
| Vibration | ≤8 µm p-p |
| Inlet Port | NW25 |
| Max Allowable Water Vapor Load | 275 g/h |
| Dimensions (W×D×H) | 385 × 210 × 219 mm |
| Weight | 22 kg |
| Power Supply | Single-phase AC 100–240 V, 50/60 Hz |
| Communication Interface | RS485 |
| Speed Control | Yes |
| IEC Power Connector | Yes |
| Brand | Kashiyama |
|---|---|
| Origin | Japan |
| Pump Type | Dry Diaphragm Vacuum Pump |
| Model | NeoDry-30G |
| Maximum Pumping Speed | 500 L/min |
| Ultimate Pressure (Gas Ballast Closed) | 1.0 Pa |
| Motor Power | 0.34 kW |
| Noise Level | ≤45 dB(A) |
| Vibration | ≤8 µm p-p |
| Inlet Port | NW40 |
| Dimensions (W×D×H) | 410×210×219 mm |
| Weight | 24 kg |
| Max Allowable Water Vapor Load | 275 g/h |
| Power Supply | Single-phase AC 100–240 V, 50/60 Hz |
| Communication Interface | RS485 |
| Gas Ballast Option | Available (N₂-compatible version also offered) |
| Compliance | IEC 61000-6-3 (EMC), IEC 61000-6-2 (Immunity), RoHS-compliant |
| Brand | Kashiyama |
|---|---|
| Origin | Japan |
| Pump Type | Oil-Free Diaphragm Pump |
| Model | NeoDry-36G |
| Ultimate Vacuum Pressure | 0.7 Pa (with gas ballast valve closed) |
| Maximum Flow Rate | 600 L/min |
| Motor Power | 0.55 kW |
| Dimensions (W×D×H) | 475 × 298 × 260 mm |
| Weight | 51 kg |
| Noise Level | ≤50 dB(A) |
| Vibration | ≤8 µm p-p |
| Inlet Port | NW40 |
| Power Supply | Single-phase AC 100–240 V, 50/60 Hz |
| Communication Interface | RS485 |
| Max Allowable Water Vapor Load | 350 g/h |
| Brand | Kashiyama |
|---|---|
| Origin | Japan |
| Pump Type | Oil-Free Diaphragm Vacuum Pump |
| Model | NeoDry-7G |
| Maximum Pumping Speed | 110 L/min |
| Ultimate Pressure (Gas Ballast Closed) | 5.0 Pa |
| Noise Level | ≤45 dB(A) |
| Vibration | ≤8 μm p-p |
| Inlet Port | NW25 |
| Power Supply | Single-Phase AC 100–240 V, 50/60 Hz |
| Motor Power at Ultimate Pressure | 0.28 kW |
| Max Allowable Water Vapor Load | 135 g/h |
| External Dimensions (W×D×H) | 360 × 196 × 196 mm |
| Weight | 19 kg |
| Communication Interface | RS485 |
| Power Input Connector | IEC 60320 C14 |
| Brand | Kashiyama |
|---|---|
| Origin | Japan |
| Pump Type | Rotary Vane Vacuum Pump |
| Cooling Method | Air-Cooled |
| Ultimate Pressure | ≤1.0 Pa |
| Maximum Pumping Speed | 250 L/min |
| Motor Power | 0.4 kW |
| Inlet/Outlet Flange | NW40 / NW25 |
| Gas Ballast | Optional (N₂-compatible) |
| Max. Water Vapor Handling Capacity | 250 g/h (with gas ballast fully open) |
| Noise Level | ≤62 dB(A) |
| Weight | 56 kg |
| Electrical Supply | Single-phase 100–115 V or 200–240 V |
| Maintenance Interval | Up to 3 years (when pumping dry air or nitrogen only) |
| Brand | Kashiyama |
|---|---|
| Origin | Japan |
| Model | NeoDry300E |
| Pump Type | Oil-Free Dry Scroll Vacuum Pump |
| Ultimate Vacuum (without gas ballast) | 0.3 Pa |
| Maximum Pumping Speed | 5,000 L/min |
| Gas Ballast | Standard |
| Max Water Vapor Handling Capacity (with gas ballast) | 600 g/h |
| Noise Level | ≤72 dB(A) |
| Vibration | ≤8 μm p-p |
| Motor Power | Not specified |
| Cooling Method | Air-Cooled |
| Inlet Flange | NW50 |
| Outlet Flange | NW25 |
| Dimensions (L×W×H) | 574×304×575 mm |
| Weight | 125 kg |
| Power Supply | 3-phase AC 200–240 V, 50/60 Hz |
| Brand | Kashiyama |
|---|---|
| Origin | Japan |
| Pump Type | Rotary Vane Vacuum Pump |
| Product Type | Oil-Free Dry Vacuum Pump |
| Pumping Speed | 30 m³/h (500 L/min) |
| Ultimate Pressure | ≤1 Pa |
| External Dimensions | 475 × 210 × 275 mm |
| Weight | 25 kg |
| Motor Power | 0.4 kW |
| Inlet Port | NW40 |
| Exhaust Port | NW25 |
| Gas Ballast | Optional (N₂-compatible) |
| Max. Water Vapor Handling Capacity | 250 g/h (with gas ballast fully open) |
| Noise Level | ≤62 dB(A) |
| Electrical Supply | Single-phase 100–115 V or 200–240 V / Three-phase 200–240 V, 50/60 Hz |
| Brand | Kashiyama |
|---|---|
| Origin | Japan |
| Model | Neodry36C / Neodry36E |
| Pump Type | Rotary Vane Vacuum Pump |
| Product Type | Oil-Free Dry Vacuum Pump |
| Pumping Speed | 36 m³/h (600 L/min) |
| Ultimate Pressure | ≤1 Pa |
| External Dimensions | 475 × 298 × 275 mm |
| Weight | 54 kg (Neodry36C) / 58 kg (Neodry36E) |
| Motor Power | 0.75 kW |
| Inlet Port | NW40 |
| Exhaust Port | NW25 |
| Gas Ballast | Optional (N₂-compatible) |
| Max. Water Vapor Handling Capacity | 350 g/h (with gas ballast fully open) |
| Noise Level | ≤62 dB(A) |
| Cooling Method | Forced Air-Cooling |
| Maintenance Interval | Up to 3 years (when pumping dry air or nitrogen only) |
| Brand | Kashiyama |
|---|---|
| Origin | Japan |
| Model | Neodry7E |
| Pump Type | Dry Running Roots Vacuum Pump |
| Oil-Free Operation | Yes |
| Ultimate Pressure | ≤1.0 Pa |
| Pumping Speed (at 50 Hz) | 110 L/min |
| Motor Power | 0.4 kW |
| Cooling Method | Air-Cooled |
| Gas Ballast | Optional (N₂-compatible) |
| Max. Water Vapor Handling Capacity (with Gas Ballast fully open) | 120 g/h |
| Noise Level | ≤57 dB(A) |
| Dimensions (W×H×L) | 210 × 250 × 385 mm |
| Weight | 19 kg |
| Inlet/Outlet Flange | NW25 |
| Electrical Supply | Single-phase 100–240 V or Three-phase 200–240 V, 50/60 Hz |
| Compliance | Designed for ISO 8573-1 Class 0 (oil-free air), compatible with semiconductor-grade cleanroom environments |
| Brand | Kashiyama |
|---|---|
| Origin | Japan |
| Pump Type | Oil-Free Diaphragm Vacuum Pump |
| Models | SDX600 / SDT600 / SDX1200 / SDT1200 / SDX1800 / SDT1800 / SDH3000 / SDH6000 |
| Ultimate Pressure | 0.3–0.5 Pa (N₂) |
| Maximum Pumping Speed | 10,000–100,000 L/min |
| Motor Power | 1.5–3.7 kW |
| Cooling Water Flow Rate | 3.0–4.0 L/min |
| N₂ Purge Flow | 0–80 SLM |
| External Dimensions (W×D×H) | 695×285×820 mm to 1050×515×950 mm |
| Compliance | CE, ISO 9001-certified manufacturing |
| Brand | Kashiyama |
|---|---|
| Origin | Japan |
| Pump Type | Oil-Free Dry Rotary Screw Vacuum Pump |
| Model Series | SDE-TX |
| Maximum Pumping Speed | 1,500–45,000 L/min (varies by model) |
| Ultimate Pressure | 0.5–1.3 Pa |
| Motor Power | Variable (model-dependent, 3-phase AC 200–480 V, 50/60 Hz) |
| External Dimensions (W×H×D) | 370×501×690 mm to 500×960×1020 mm |
| Weight | Not specified |
| Compliance | Designed for industrial and laboratory vacuum applications requiring corrosion resistance and particle-free operation |
| Note | N₂ purging not integrated |
| Brand | Kashiyama |
|---|---|
| Origin | Japan |
| Pump Type | Dry Scroll Vacuum Pump |
| Motor Power | 1.3–2.8 kW |
| Ultimate Pressure | 0.5–1.3 Pa |
| Maximum Pumping Speed | 1,500–45,000 L/min |
| Dimensions (W×H×L) | 370×557×690 mm to 500×960×1020 mm |
| Weight | Not specified |
| Compliance | CE-marked per EU Machinery Directive 2006/42/EC and Electromagnetic Compatibility Directive 2014/30/EU |
| Cooling | Air-cooled |
| Drive | Direct-coupled three-phase induction motor |
| Enclosure Rating | IP54 |
| Brand | Kashiyama |
|---|---|
| Origin | Japan |
| Model | SDE1203TX |
| Pump Type | Dry Scroll Vacuum Pump |
| Ultimate Vacuum Pressure | 0.5 Pa |
| Pumping Speed (50/60 Hz) | 20,000 L/min |
| Inlet Flange | NW100 |
| Outlet Flange | NW40 |
| Cooling Water Pressure Range | 0.3–0.5 MPa (gauge) |
| Cooling Water Flow Rate | 4–8 L/min |
| Cooling Water Temperature | 10–25 °C |
| Nitrogen Purge Pressure (for sealing/dilution) | 0.1–0.7 MPa (gauge), recommended 0.05–0.10 MPa (gauge) |
| Nitrogen Flow Rate | 0–60 L/min (continuous, application-dependent) |
| Electrical Supply | 3-phase, 200–220 V, 50/60 Hz |
| Voltage Tolerance | ±10% |
| Apparent Power | 11.0 kVA |
| Control Interface | DB-25PF-N connector (Japan Aviation Electronics) + HK4/O-004-M Tyco terminal block |
| Lubricant | Fluorinated oil (DP: 0.7 L, MB: 0.6 L) |
| Approx. Weight | 310 kg |
| External Dimensions (W×H×D) | 400 × 905 × 900 mm |
| Brand | Kashiyama |
|---|---|
| Origin | Japan |
| Type | Oil-Free Dry Rotary Vane Vacuum Pump |
| Model | SDE1220 |
| Ultimate Pressure | 0.5 Pa |
| Pumping Speed | 1200 m³/h (20,000 L/min) |
| Motor Power | 3.7 kW (Rated Capacity: 7.7 kVA) |
| Inlet Flange | NW50 |
| Outlet Flange | NW25 |
| Cooling Water Flow Rate | 4–8 L/min |
| Water Inlet Temperature | 10–25 °C |
| Nitrogen Purge Pressure Range | 0.1–0.7 MPa (gauge) |
| Nitrogen Flow Rate | 0–80 SLM |
| Dimensions (W×H×D) | 400 × 780 × 930 mm |
| Net Weight | 300 kg |
| Gross Weight | 340 kg |
| Supply Voltage | 3-phase, 200–220 V, 50/60 Hz |
| Max Allowable Voltage Fluctuation | ±10% |
| Cooling Water Pressure Differential (In–Out) | ≥0.2 MPa |
| Max Cooling Water Supply Pressure | 0.5 MPa (gauge) |
| Heat Dissipation | ~1800 kJ/h |
| Acceleration Time | 35 s |
| Free-Run Deceleration | Enabled |
| Max Inlet Pressure | Atmospheric |
| Max Backpressure (gauge) | ≤3 kPa |
| Operating Time Limit at 3–30 kPa Inlet Pressure | ≤30 min |
| Lubricant | Fluorinated Oil, 1.2 L |
| Brand | Kashiyama |
|---|---|
| Origin | Japan |
| Pump Type | Oil-Free Screw Vacuum Pump System |
| Model | SDE1220-011 |
| Ultimate Pressure | 0.5 Pa |
| Inlet Flange | VG 100 |
| Exhaust Flange | NW 40 |
| Power Supply | 3-Phase AC 200–220 V, 50/60 Hz |
| Total Electrical Load | 16.0 kVA |
| Cooling Water Flow | 4–8 L/min (10–25 °C) |
| N₂ Purge Rate | 0–80 SLM |
| Compressed Air Supply | 0.3–0.5 MPa (gauge), Rc 3/8" self-sealing coupling |
| Operating Ambient Temperature | 0–40 °C |
| Compliance | CE-marked, JIS B 8341-1 compliant |
| Enclosure | IP54-rated cabinet |
| Brand | Kashiyama |
|---|---|
| Origin | Japan |
| Model | SDE20N12TX |
| Pump Type | Dry Scroll Vacuum Pump |
| Ultimate Pressure | 0.5 Pa |
| Maximum Inlet Pressure | Atmospheric |
| Pumping Speed (50/60 Hz) | 30,000 L/min |
| Flange Inlet | NW160 |
| Flange Outlet | NW40 |
| Cooling Water Requirement | 4–8 L/min at 0.3–0.5 MPa (gauge), 10–25 °C |
| Nitrogen Purge Supply | 0.1–0.7 MPa (gauge), recommended 0.05–0.10 MPa for sealing/dilution |
| Electrical Supply | 3-phase, 200–220 V, 50/60 Hz, ±10% tolerance |
| Power Consumption | 14.5 kVA |
| Motor Protection | IP54 |
| Approx. Weight | 440 kg |
| Lubricant | Fluorinated Oil (DP: 0.7 L, MB: 0.6 L) |
| Brand | Kashiyama |
|---|---|
| Origin | Japan |
| Model | SDE30N20 |
| Pump Type | Oil-Free Dry Rotary Vane Pump |
| Ultimate Vacuum Pressure | 0.5 Pa |
| Inlet Flange | NW160 |
| Outlet Flange | NW40 |
| Pumping Speed (50/60 Hz) | 50,000 L/min |
| Cooling Water Requirement | 4–8 L/min at 10–25 °C, ΔP ≥ 0.3 MPa, Max Pressure 0.5 MPa (gauge) |
| Nitrogen Purge Supply | 0–80 L/min (0.1–0.7 MPa gauge), Recommended Purge Pressure: 0.1–0.2 MPa |
| Electrical Supply | 3-Phase, 200–220 V, 50/60 Hz, ±10% tolerance |
| Input Power Rating | 16.0 kVA |
| Motor Protection | IP54 |
| Approximate Weight | 440 kg |
| Lubricant | Fluorinated Synthetic Oil (DP: 0.7 L, MB: 0.6 L) |
| Brand | Kashiyama |
|---|---|
| Origin | Japan |
| Model | SDE60N20 |
| Pump Type | Oil-Free Dry Rotary Vane Pump |
| Ultimate Pressure | 0.5 Pa |
| Inlet Flange | NW200 |
| Outlet Flange | NW40 |
| Pumping Speed (50/60 Hz) | 100,000 L/min |
| Cooling Water Pressure Range | 0.3–0.5 MPa (gauge) |
| Cooling Water Flow Rate | 4–8 L/min |
| Cooling Water Temperature | 10–25 °C |
| Nitrogen Purge Requirement | 0.1 MPa, 0 L/min (for corrosive gas service) |
| Electrical Supply | 3-Phase |
| Motor Power | Not specified |
| Approx. Weight | 760 kg |
| Control Interface | DB-25 (Japan Aviation Electronics), Han® 100A Module (HARTING) |
| Lubricant | Fluorinated Oil (DP: 0.7 L, MB: 0.6 L) |
| Brand | Kashiyama |
|---|---|
| Origin | Japan |
| Pump Type | Oil-Free Dry Rotary Vane Vacuum Pump |
| Model | SDE90X / SDE120TX |
| Ultimate Pressure | 1.3 Pa |
| Pumping Speed (50/60 Hz) | 1300 L/min (SDE90X) / 1500 L/min (SDE120TX) |
| Inlet/Outlet Flange | NW40 (SDE90X), NW50 (SDE120TX) |
| Cooling Water Requirement | 3–8 L/min (SDE90X), 4–8 L/min (SDE120TX) |
| Nitrogen Purge Supply | 0.1–0.7 MPa (gauge), Recommended Regulated Pressure: 0.05–0.10 MPa (gauge), Flow Rate: 0–80 L/min |
| Ambient Operating Temperature | 10–25 °C |
| Electrical Supply | 3-Phase, 200–220 V, 50/60 Hz, ±10% tolerance |
| Input Power Rating | 6.5 kVA |
| Motor Protection | CE-certified DDK connector (CE05-2A22-22PD-D) |
| Control Interface | DB-25PF-N (Japan Aviation Electronics) |
| Lubricant | Fluorinated Synthetic Oil (0.7 L) |
| Approx. Weight | 160 kg (SDE90X), 151 kg (SDE120TX) |
| Brand | Kashiyama |
|---|---|
| Origin | Japan |
| Type | Oil-Free Dry Scroll Vacuum Pump |
| Model | SDL12E50 |
| Pumping Speed | 1500 m³/h (25,000 L/min) |
| Ultimate Pressure | 0.5 Pa |
| Motor Power | 17.7 kVA |
| Inlet Flange | MF160 |
| Outlet Flange | NW50 |
| Dimensions (W×H×D) | 400 × 780 × 930 mm |
| Weight | 400 kg (gross weight 800 kg) |
| Cooling Water Flow | 6–8 L/min at 0.2 MPa minimum pressure differential |
| Nitrogen Purge Supply | 0.1–0.7 MPa, 0–50 SLM |
| Electrical Supply | 3-phase, 200–220 V, 50/60 Hz, ±10% tolerance, 75 A operating current, ~100 mA leakage current |
| Brand | Kashiyama |
|---|---|
| Origin | Japan |
| Pump Type | Oil-Free Dry Screw + Mechanical Booster |
| Ultimate Pressure | 0.8 Pa |
| Inlet Flange | MF160 |
| Exhaust Flange | NW50 |
| Motor Power | 11.2 kW (17.7 kVA) |
| Cooling Water Flow | 6–8 L/min @ 5–25 °C |
| Nitrogen Purge | 0–50 SLM @ 0.1–0.7 MPa |
| Electrical Supply | 3-Phase AC 200–220 V, 50/60 Hz |
| Weight | Not specified |
| Dimensions | Not specified |