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| Brand | Quantum Scale |
|---|---|
| Origin | Jiangsu, China |
| Manufacturer Type | Authorized Distributor |
| Product Category | Domestic |
| Model | NanoTech 10 AFM |
| Instrument Type | Materials-Focused AFM |
| SPM Architecture | Modular & Multi-Functional |
| Closed-Loop Positioning Noise | XY = 0.2 nm, Z = 0.05 nm |
| Sample Dimensions | 25 mm × 10 mm |
| XY Scanner Travel Range | 12 mm × 12 mm |
| Brand | Quantum Scale |
|---|---|
| Origin | Jiangsu, China |
| Manufacturer Type | Authorized Distributor |
| Product Category | Domestic |
| Model | Nano Tech 20 AFM |
| Instrument Type | Industrial-Grade |
| SPM Architecture | Modular & Multi-Functional |
| Positioning Noise | XY: 0.2 nm, Z: 0.05 nm |
| Sample Size Compatibility | Up to 300 mm (12-inch) wafers, downward-compatible |
| XY Stage Travel | 200 mm × 200 mm (customizable) |
| Z Scan Range | 10 µm |
| Imaging Modes | Contact, Tapping, Force Spectroscopy, Phase Imaging |
| Optional Upgrades | EFM, MFM, KPFM, PFM, Lateral Force Imaging |
| Optical Microscope | 6.3 MP color CMOS, 7.5×–50× zoom, 34 mm working distance, 1.5 µm optical resolution at 50×, coaxial LED illumination, parfocal design |
| Scan Speed | 0.1–20 Hz |
| Feedback Bandwidth | 500 kHz (dual-channel lock-in), 18-bit amplitude/phase resolution |
| Data Acquisition | 16-bit, 100 kHz multi-channel sampling |
| Environmental Options | Vacuum mode (7.3 Pa base pressure), inert gas enclosure (N₂/Ar), H₂O/O₂ monitoring, temperature-controlled stage (−100 °C to +150 °C, ±0.3 °C stability), active air-sound shielding, pneumatic vibration isolation platform |
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