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| Brand | KYKY |
|---|---|
| Origin | Beijing, China |
| Manufacturer Type | Direct Manufacturer |
| Product Type | Oil-Free Turbomolecular Vacuum Pump |
| Pumping Speed (N₂) | 25 L/s |
| Ultimate Pressure | 1×10⁻⁴ Pa |
| Inlet Flange | ISO-KF DN40 |
| Outlet Flange | ISO-KF DN16 |
| Maximum Continuous Forepressure (N₂) | 500 Pa |
| Max Instantaneous Forepressure (N₂) | 1000 Pa |
| Compression Ratio (N₂) | ≥1×10⁶ |
| Rated Rotational Speed | 36,000 rpm |
| Startup Time | ≤3 min |
| Cooling Method | Air-Cooled |
| Power Supply | DC 24 V or AC 220 V |
| Max Power Consumption | 70 W |
| Weight | 3 kg |
| Compatible Controller Models | TD-25, TCP-100, TC-100 |
| Recommended Forepump Speed | 0.5–1 L/s |
| Brand | KYKY |
|---|---|
| Origin | Beijing, China |
| Manufacturer Type | Direct Manufacturer |
| Region Classification | Domestic (China) |
| Model | FF-200/1300 |
| Instrument Category | Turbomolecular Pump |
| Product Type | Oil-Free Vacuum Pump |
| Pumping Speed (N₂) | 1300 L/s |
| Pumping Speed (He) | 1000 L/s |
| Pumping Speed (H₂) | 480 L/s |
| Pumping Speed (Ar) | 1250 L/s |
| Ultimate Pressure (CF Flange) | 6×10⁻⁷ Pa |
| Ultimate Pressure (ISO-K Flange) | 6×10⁻⁶ Pa |
| External Dimensions | Ø246 × 428.5 mm |
| Weight | 29 kg (LF configuration), 31 kg (CF configuration) |
| Motor Power | ≤500 W |
| Brand | KYKY |
|---|---|
| Origin | Beijing, China |
| Manufacturer | KYKY (Original Equipment Manufacturer) |
| Type | Oil-Free Turbo-Molecular Pump |
| Pumping Speed (N₂) | 3200 L/s |
| Ultimate Pressure | 5×10⁻⁷ Pa |
| External Dimensions (W×D×H) | 358×337×417 mm |
| Weight | 75 kg |
| Motor Power | 65 W |
| Inlet Flange | DN320 ISO-F (standard), optional ISO-K and ISO-CF |
| Rated Rotational Speed | 21,000 rpm |
| Startup Time | ≤12 min |
| Shutdown Time | ≤26 min |
| Cooling Method | Water Cooling |
| Recommended Forepump Speed | ≥30 L/s |
| Compression Ratio (N₂) | >1×10⁸ |
| Compliance | Designed for ISO 2861-1:2021 (vacuum pump performance testing), compatible with UHV systems per ISO 10110-7 and ASTM E576-22 (ultra-high vacuum practice) |
| Brand | KYKY |
|---|---|
| Origin | Beijing, China |
| Manufacturer Type | Direct Manufacturer |
| Country of Origin | China |
| Model | SBC-2 |
| Vacuum System | Mechanical Pump + Turbo Molecular Pump |
| Ultimate Vacuum | ≤2 × 10⁻³ Pa |
| Sputtering Voltage | 3 kV |
| Sample Stage Motion | Planar Rotation + Tilt Rotation |
| Carbon Evaporation Target Diameter | Φ38 mm |
| Sample Holder Diameter | Φ40 mm |
| Bell Jar Dimensions | Φ250 mm × H340 mm |
| Evaporation Glass Dome | Φ88 mm × H140 mm |
| Sputtering Glass Dome | Φ88 mm × H57 mm |
| Brand | KYKY |
|---|---|
| Origin | Beijing, China |
| Manufacturer Type | Direct Manufacturer |
| Instrument Type | Floor-standing SEM |
| Electron Gun Type | Schottky Thermal Field Emission |
| SEM Class | Entry-level Field Emission SEM |
| Secondary Electron Resolution | 1.5 nm @ 15 kV |
| Accelerating Voltage Range | 0.2–30 kV |
| Backscattered Electron Resolution | 3 nm @ 30 kV |
| Brand | KYKY |
|---|---|
| Origin | Beijing, China |
| Manufacturer Type | Direct Manufacturer |
| Instrument Type | Molecular Pump |
| Product Type | Oil-Free Vacuum Pump |
| Pumping Speed (N₂) | 700 L/s |
| Pumping Speed (He) | 580 L/s |
| Pumping Speed (H₂) | 260 L/s |
| Pumping Speed (Ar) | 680 L/s |
| Ultimate Pressure (CF Flange) | 6×10⁻⁸ Pa |
| Ultimate Pressure (ISO-K Flange) | 6×10⁻⁷ Pa |
| External Dimensions | Ø193 × 374.5 mm |
| Weight (LF Configuration) | 19 kg |
| Weight (CF Configuration) | 20.5 kg |
| Motor Power | ≤500 W |
| Rated Rotational Speed | 36,000 rpm |
| Startup Time | ≤7 min |
| Cooling Method | Water Cooling |
| Minimum Coolant Flow Rate | ≥1 L/min |
| Maximum Coolant Temperature | ≤25 °C |
| Input Voltage | DC24 V / AC220 V |
| Compression Ratio (N₂) | 1×10⁹ |
| Compression Ratio (He) | 1×10⁷ |
| Compression Ratio (H₂) | 1×10⁶ |
| Compression Ratio (Ar) | 1×10⁹ |
| Max. Continuous Inlet Pressure (Pre-stage) | 300 Pa |
| Max. Transient Inlet Pressure (Pre-stage) | 550 Pa |
| Max. Gas Load (N₂) | 1400 sccm |
| Max. Gas Load (He) | 1000 sccm |
| Max. Gas Load (H₂) | 800 sccm |
| Max. Gas Load (Ar) | 550 sccm |
| Recommended Forepump Speed | 4–8 L/s |
| Inlet Flange | DN160 CF / DN160 ISO-K |
| Outlet Flange | DN40 ISO-KF |
| Compatible Controllers | FD-II, FD-IIB, TCDP-II, TD-II |
| Brand | KYKY |
|---|---|
| Origin | Beijing, China |
| Manufacturer | KYKY (Producer) |
| Type | Oil-Free Turbo-Molecular Vacuum Pump |
| Pumping Speed (N₂) | 2000 L/s |
| Pumping Speed (He) | 1600 L/s |
| Pumping Speed (H₂) | 740 L/s |
| Pumping Speed (Ar) | 1900 L/s |
| Compression Ratio (N₂) | 1×10⁸ |
| Compression Ratio (Ar) | 1×10⁹ |
| Ultimate Pressure (CF Flange) | 6×10⁻⁷ Pa |
| Ultimate Pressure (ISO-KF Flange) | 6×10⁻⁶ Pa |
| Max. Continuous Inlet Pressure (Foreline) | 200 Pa |
| Max. Transient Forepressure (N₂) | 650 Pa |
| Max. Gas Load (N₂) | 3200 sccm |
| Rated Rotational Speed | 24,000 rpm |
| Startup Time | ≤9 min |
| Cooling | Water-Cooled (Flow ≥1 L/min, Inlet Temp ≤25 °C) |
| Power Supply | DC24 V / AC220 V |
| Max. Power Consumption | ≤750 W |
| Inlet Flange | DN250 CF / DN250 ISO-KF |
| Outlet Flange | DN50 ISO-KF |
| Dimensions (Ø×L) | 246×428.5 mm |
| Weight (CF Configuration) | 35 kg |
| Compatible Controllers | FD-II, FD-IIB, TCDP-II, TD-II |
| Recommended Backing Pump Capacity | ≥15 L/s |
| Origin | Beijing, China |
|---|---|
| Manufacturer Type | Authorized Distributor |
| Origin Category | Domestic (PRC) |
| Model | ZQJ-230D |
| Price Range | USD 7,000 – 14,000 |
| Minimum Detectable Leak Rate | <5×10⁻¹¹ Pa·m³/s |
| Leak Measurement Range | 5×10⁻¹¹ – 9.8×10⁻⁵ Pa·m³/s |
| Maximum Inlet Pressure at Test Port | 20 Pa |
| Response Time | ≤3 s |
| Pump-Down Start-up Time | <8 min |
| Power Supply | 220 VAC ±10%, 50 Hz, 16 A |
| Operating Ambient Temperature | 5–35 °C, Relative Humidity ≤80% |
| Dimensions (L×W×H) | 540×600×950 mm |
| Weight | 82 kg |
| Brand | KYKY |
|---|---|
| Origin | Beijing, China |
| Manufacturer Type | Original Equipment Manufacturer (OEM) |
| Model | ZQJ-2300 |
| Price Range | USD 14,000 – 42,500 |
| Minimum Detectable Leak Rate | 2.0×10⁻¹¹ Pa·m³/s |
| Measurement Range | 1×10⁻¹¹ – 1×10⁻⁵ Pa·m³/s |
| Maximum Test Pressure | 1000 Pa |
| Response Time | ≤2 s |
| Pump-down/Startup Time | <7 min |
| Power Supply | 220 VAC ±10%, 50 Hz, 5 A |
| Operating Environment | 5–45 °C, RH <80% |
| Dimensions (L×W×H) | 500×354×397 mm |
| Weight | 39.5 kg |
| Brand | KYKY |
|---|---|
| Origin | Beijing, China |
| Manufacturer Type | Original Equipment Manufacturer (OEM) |
| Model | ZQJ-3200 |
| Detection Sensitivity (Vacuum Mode) | 5×10⁻¹¹ Pa·m³/s |
| Measurement Range | 5×10⁻¹³ – 1×10¹ Pa·m³/s |
| Maximum Inlet Pressure (Leak Test Mode) | 2500 Pa |
| Large-Leak Mode Operating Pressure | up to 10,000 Pa |
| Helium Pumping Speed (Large-Leak Mode) | 2.5 L/s |
| Response Time | ≤1 s |
| Warm-up Time | <3 min |
| Power Supply | 220 VAC ±10%, 50 Hz, 8 A |
| Operating Environment | 5–45 °C, RH <80% |
| Dimensions (Desktop) | 541×422×379 mm |
| Dimensions (Trolley-Mounted) | 730.8×528×935 mm |
| Weight (Desktop) | 55 kg |
| Weight (Trolley-Mounted) | 108.5 kg |
| Filament | Dual Yttria-Coated Tungsten Filaments |
| Data Storage | Integrated SD Card |
| Interface Options | Digital I/O, Profibus, Ethernet |
| Brand | KYKY |
|---|---|
| Origin | Beijing, China |
| Manufacturer Type | Direct Manufacturer |
| Product Category | Domestic |
| Model | FF-100/110 |
| Pump Type | Oil-Free Molecular Pump |
| Pumping Speed (N₂) | 110 L/s |
| Pumping Speed (He) | 100 L/s |
| Pumping Speed (H₂) | 50 L/s |
| Pumping Speed (Ar) | 100 L/s |
| Ultimate Pressure (CF Flange) | 6×10⁻⁷ Pa |
| Ultimate Pressure (ISO-K Flange) | 6×10⁻⁶ Pa |
| External Dimensions | Ø148 × 277 mm |
| Weight | 8 kg |
| Motor Power | ≤300 W |
| Inlet Flange | DN100 CF / DN100 ISO-K |
| Outlet Flange | DN25 ISO-KF |
| Compression Ratio (N₂) | 1×10⁸ |
| Compression Ratio (He/H₂) | 1×10² |
| Compression Ratio (Ar) | 1×10⁸ |
| Max. Continuous Forepressure | 200 Pa |
| Max. Transient Forepressure (N₂) | 300 Pa |
| Max. Gas Load (N₂) | 300 sccm |
| Rated Rotational Speed | 42,300 rpm |
| Startup Time | ≤3 min |
| Cooling | Air or Water (air cooling viable at ambient 5–32 °C) |
| Min. Coolant Flow Rate | ≥1 L/min |
| Max. Coolant Temperature | ≤25 °C |
| Input Voltage | 220 VAC ±10% |
| Compatible Controller | FD-110A |
| Recommended Forepump Speed | 2 L/s |
| Brand | KYKY |
|---|---|
| Origin | Beijing, China |
| Manufacturer Type | Original Equipment Manufacturer (OEM) |
| Instrument Type | Floor-Model SEM |
| Electron Gun | Thermal Field-Emission (TFE) |
| SEM Class | High-Resolution Field-Emission SEM |
| Secondary Electron (SE) Resolution | 0.9 nm @ 30 kV |
| Magnification Range | 1×–3,000,000× (optical: 1×–100×) |
| Accelerating Voltage | 0.2–30 kV |
| Brand | KYKY |
|---|---|
| Origin | Beijing, China |
| Manufacturer Type | Direct Manufacturer |
| Country of Origin | China |
| Model | FF-63/80 |
| Pump Type | Turbo Molecular Pump |
| Oil-Free Operation | Yes |
| Pumping Speed (N₂) | 62 L/s |
| Ultimate Pressure | 5×10⁻⁷ Pa |
| External Dimensions | Not Specified |
| Weight | 3.5 kg (CF flange configuration) |
| Motor Power | ≤90 W |
| Rated Speed | 72,000 RPM |
| Inlet Flange | DN63 CF / DN63 ISO-K |
| Outlet Flange | DN16 ISO-KF |
| Compression Ratio (N₂) | 1×10⁸ |
| Max Continuous Forepressure | 200 Pa |
| Max Transient Forepressure (N₂) | 650 Pa |
| Max Gas Load (N₂) | 35 sccm |
| Startup Time | ≤2 min |
| Cooling | Air or Water (Water Flow Rate: ≥1 L/min, Temp ≤25 °C) |
| Input Power | DC 24 V or AC 220 V |
| Compatible Controllers | TD-80, TCP-100, TC-100 |
| Recommended Backing Pump Speed | 0.5–2 L/s |
| Brand | KYKY |
|---|---|
| Origin | Beijing, China |
| Manufacturer Type | Direct Manufacturer |
| Product Category | Domestic |
| Model | CXF-2300 |
| Instrument Type | Oil-Free Turbo Molecular Pump |
| Pumping Speed (N₂) | 2300 L/s |
| Ultimate Pressure (Rubber Seal) | 2×10⁻⁷ Pa |
| Ultimate Pressure (Metal Seal) | ≤1×10⁻⁸ Pa |
| Weight | 58 kg |
| Cooling Method | Water-Cooled |
| Rated Rotational Speed | 27,000 rpm |
| Startup Time | ≤8 min |
| Shutdown Time | ≤25 min |
| Recommended Forepump Speed | ≥22 L/s |
| Inlet Flange Options | ISO-K, ISO-F (Standard), ISO-CF (Optional), ISO-LF (Customizable) |
| Compression Ratio (N₂/Ar) | >1×10⁷ |
| Compression Ratio (He) | >1×10⁴ |
| Compression Ratio (H₂) | >1×10³ |
| Operating Pressure Range | 20 Pa – 1×10⁻⁷ Pa |
| Brand | KYKY |
|---|---|
| Origin | Beijing, China |
| Manufacturer Type | Original Equipment Manufacturer (OEM) |
| Regional Classification | Domestic (China-made) |
| Model | ZQJ-2000 |
| Price Range | USD 14,000 – 42,000 |
| Minimum Detectable Leak Rate | <2×10⁻¹¹ Pa·m³/s |
| Leak Measurement Range | 2×10⁻¹¹ – 1×10⁻⁵ Pa·m³/s |
| Maximum Inlet Pressure | 1000 Pa |
| Response Time | ≤2 s |
| Pump-down Time | <8 min |
| Power Supply | 220 V AC ±10%, 50 Hz, 16 A |
| Operating Temperature | 5–45 °C |
| Relative Humidity | ≤80% RH |
| Dimensions (L×W×H) | 645×450×950 mm |
| Weight | 80 kg |
| Communication Interfaces | RS232, External I/O, Parallel Printer Port |
| Brand | KYKY |
|---|---|
| Origin | Beijing, China |
| Manufacturer Type | Direct Manufacturer |
| Product Category | Domestic |
| Model | CXF-200/1401 |
| Pump Type | Oil-Free Turbo-Molecular Pump |
| Pumping Speed (N₂) | 1400 L/s |
| Ultimate Pressure (Rubber Seal) | 2×10⁻⁶ Pa |
| Ultimate Pressure (Metal Seal) | ≤1×10⁻⁷ Pa |
| Weight | 51 kg |
| Inlet Flange | DN200 ISO-F (Standard), DN200 CF (Optional), DN200 LF (Customizable) |
| Rated Rotational Speed | 30,000 rpm |
| Startup Time | ≤6 min |
| Shutdown Time | ≤16 min |
| Recommended Forepump Speed | ≥16 L/s |
| Cooling Method | Water-Cooled |
| Compression Ratio (N₂) | >1×10⁷ |
| Compression Ratio (Ar) | >1×10⁷ |
| Compression Ratio (He) | >1×10⁴ |
| Compression Ratio (H₂) | >1×10³ |
| Brand | KYKY |
|---|---|
| Origin | Beijing, China |
| Manufacturer Type | Direct Manufacturer |
| Instrument Class | Floor-Standing Conventional SEM |
| Electron Source | Tungsten Filament |
| SEM Category | Entry-Level Tungsten-Filament SEM |
| Secondary Electron (SE) Resolution | 3 nm @ 30 kV, 8 nm @ 3 kV |
| Accelerating Voltage Range | 0.2–30 kV |
| Backscattered Electron (BSE) Resolution | 4 nm @ 30 kV |
| Sample Chamber | Optional Large-Capacity Chamber |
| Vacuum Mode | Compatible with Low-Vacuum Module |
| Load Lock System | Max. Sample Diameter ≤75 mm, Height ≤15 mm |
| Navigation Camera | Integrated Wide-Field CCD Navigation Camera |
| Imaging Modes | Simultaneous SE/BSE Dual-Channel Imaging |
| Image Stitching | Automated Full-Field Matrix Acquisition & Real-Time High-Throughput Mosaic Reconstruction |
| Particle Analysis | AI-Driven Morphometric Quantification (size, aspect ratio, circularity, convexity, Feret diameter, etc.) with Auto-Scale Calibration |
| Metrology Tools | Distance, Angle, Line (horizontal/vertical), Circle Diameter, and Profile Analysis |
| Electron Beam Lithography (EBL) Capability | Integrated Vector-Scan EBL Subsystem Supporting Pattern Definition, Dose Control, and Concurrent SEM Observation |
| Brand | KYKY |
|---|---|
| Origin | Beijing, China |
| Manufacturer Type | Direct Manufacturer |
| Country of Origin | China |
| Model | SBC-16 |
| Target Material (Standard) | Au (57 mm diameter × 0.1 mm thickness) |
| Optional Targets | Pt, Au/Pd, Pt/Pd |
| Control System | Microprocessor-based timer (1–999 s), automatic pump-down, sputtering, and venting sequence |
| Chamber Dimensions | Stainless steel, Ø120 mm × H75 mm |
| Viewport Dimensions | Ø120 mm × H45 mm |
| Sample Stage | Standard rotary stage (Ø40 mm), accommodates 4 standard SEM stubs |
| Sputtering Gas | Argon (recommended) or dry air |
| Operating Pressure Range | Atmospheric to 1×10⁻³ mbar |
| Ultimate Vacuum | ≤1×10⁻⁴ mbar |
| Pumping Speed | 133 L/min |
| Sputtering Current | 5–30 mA (digitally regulated, pressure-independent) |
| Acoustic Noise Level | ≤56 dB(A) |
| Brand | KYKY |
|---|---|
| Origin | Beijing, China |
| Manufacturer Type | Direct Manufacturer |
| Origin Category | Domestic (China) |
| Model | FJ-80 |
| Instrument Category | Other Vacuum Systems |
| Product Type | Oil-Free Turbomolecular Pump System |
| Pumping Speed | N₂: 62 L/s, He: 55 L/s, H₂: 34 L/s, Ar: 65 L/s |
| Ultimate Pressure | 3×10⁻⁵ Pa (ISO-K flange), 5×10⁻⁶ Pa (CF flange) |
| External Dimensions | 400 × 300 × 260 mm |
| Weight | 16–21 kg |
| Motor Power Supply | 220 ± 20 V / 50 Hz |
| Recommended Fore-Vacuum Pressure | < 50 Pa |
| Compression Ratio | N₂: 1×10⁹, He: 1×10⁵, H₂: 1×10⁴, Ar: 1×10⁹ |
| Cooling Method | Air-Cooled |
| Operating Ambient Temperature | 5–40 °C |
| Mounting Orientation | Vertical |
| Inlet Flange | DN63 ISO-K or CF63 (customizable to KF40/KF16) |
| Outlet Flange | ISO-KF |
| Quick-Connect Gas Port | φ8 mm |
| Standard Forepump | GHD-031B Dry Diaphragm Pump |
| Brand | KYKY |
|---|---|
| Model | FF-100/150 |
| Type | Oil-Free Turbo Molecular Pump |
| Pumping Speed (N₂) | 140 L/s |
| Ultimate Pressure (CF Flange) | 2×10⁻⁷ Pa |
| Ultimate Pressure (ISO-KF Flange) | 2×10⁻⁶ Pa |
| Max. Continuous Forepressure (N₂) | 220 Pa |
| Max. Instantaneous Forepressure (N₂) | 500 Pa |
| Compression Ratio (N₂) | ≥1×10⁷ |
| Compression Ratio (Ar) | ≥1×10⁷ |
| Compression Ratio (He/H₂) | ≥1×10³ |
| Gas Load Capacity (N₂) | 135 sccm |
| Rated Rotational Speed | 51,000 rpm |
| Startup Time | ≤3 min |
| Power Supply | DC 24 V or AC 220 V |
| Max. Power Consumption | 90 W |
| Cooling | Air or Water (Flow Rate: ≥1 L/min |
| Weight (ISO-KF Version) | 6.0 kg |
| Weight (CF Version) | 8.6 kg |
| Inlet Flange | DN100 CF or DN100 ISO-K |
| Outlet Flange | DN25 ISO-KF |
| Compatible Forepumps | 1–2 L/s Rotary Vane or Diaphragm Pumps |
| Brand | KYKY |
|---|---|
| Origin | Beijing, China |
| Manufacturer Type | Direct Manufacturer |
| Product Type | Oil-Free Turbo-Molecular Pump |
| Model | FF-100/300 |
| Pumping Speed (N₂) | 295 L/s |
| Ultimate Pressure (CF Flange) | 5×10⁻⁷ Pa |
| Ultimate Pressure (ISO-KF Flange) | 2.5×10⁻⁶ Pa |
| Maximum Continuous Forepressure | 500 Pa |
| Max Transient Forepressure (N₂) | 700 Pa |
| Compression Ratio (N₂) | 1×10⁹ |
| Compression Ratio (He) | 1×10⁶ |
| Compression Ratio (H₂) | 1×10⁵ |
| Compression Ratio (Ar) | 1×10⁹ |
| Gas Load Capacity (N₂) | 120 sccm |
| Gas Load Capacity (He) | 50 sccm |
| Rated Rotational Speed | 51,000 rpm |
| Startup Time | ≤4 min |
| Cooling | Air or Water (Water Flow Rate: ≥1 L/min |
| Power Supply | DC 24 V or AC 220 V |
| Max Power Consumption | 220 W |
| Inlet Flange | DN100 CF or DN100 ISO-K |
| Outlet Flange | DN25 ISO-KF |
| Weight (ISO-K Version) | 8.5 kg |
| Weight (CF Version) | 11 kg |
| Compatible Forepumps | 1–3 L/s Rotary Vane or Diaphragm Pumps |
| Recommended Controllers | TD-300, TCP-240, TC-100 |
| Brand | KYKY |
|---|---|
| Origin | Beijing, China |
| Manufacturer Type | Direct Manufacturer |
| Country of Origin | China |
| Model | SBC-12 |
| Target Materials | Au, Ag, Pt, Cr, Ti, Cu, Ni, Au-Pd alloy |
| Target Diameter & Thickness | Φ58 mm × 0.12 mm |
| Control Method | Manual |
| Chamber Dimensions | Φ40 mm × 130 mm (sample compartment) |
| Stage Diameter | Φ40 mm (standard), optional Φ60 mm stage |
| Sputtering Gas | Air or Argon |
| Vacuum System | Two-stage direct-coupled rotary vane pump |
| Vacuum Gauge | Pirani gauge |
| Safety Feature | Micro-flow gas inlet valve for ion current regulation |
| Chamber Viewport | Reinforced borosilicate glass with optimized sealing |
| Brand | KYKY |
|---|---|
| Origin | Beijing, China |
| Manufacturer Type | Direct Manufacturer |
| Instrument Type | Floor-Standing SEM |
| Electron Gun | Thermal Field Emission |
| SEM Class | Ultra-High-Resolution Field Emission |
| Secondary Electron Resolution | 0.8 nm @ 15 kV, 1.5 nm @ 1 kV |
| Magnification Range | 1×–3,000,000× (electronic), 1×–100× (optical) |
| Accelerating Voltage | 0.2–30 kV |
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