BEQ
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| Brand | BEQ |
|---|---|
| Origin | Anhui, China |
| Model | BTF-1700C |
| Maximum Temperature | 1700 °C |
| Temperature Control Accuracy | ±1 °C |
| Rated Power | 5.2 kW |
| Heating Rate | ≤10 °C/min below 1200 °C, ≤5 °C/min from 1200–1500 °C, ≤2 °C/min above 1500 °C |
| Heating Element | Silicon Molybdenum (MoSi₂) Rods |
| Control System | Fuzzy PID with auto-tuning, 30-segment programmable controller, over-temperature and thermocouple failure alarm |
| Tube Dimensions | Φ60 mm × 1000 mm (ID × effective length) |
| Chamber Lining | High-purity alumina (Al₂O₃) tube with proprietary high-emissivity ceramic coating (imported from USA) |
| Brand | BEQ |
|---|---|
| Origin | Anhui, China |
| Manufacturer Type | Authorized Distributor |
| Product Category | Domestic |
| Model | 1700°C Dual-Zone High-Temperature Tube Furnace |
| Temperature Range | Up to 1700°C |
| Temperature Uniformity | ±1°C (at setpoint, within 100 mm central zone) |
| Maximum Power | 11 kW |
| Heating Rate | ≤10°C/min below 1200°C, ≤5°C/min from 1200–1500°C, ≤2°C/min above 1500°C |
| Heating Element | Silicon Molybdenum (MoSi₂) Rods |
| Control System | Fuzzy PID with Auto-Tuning, 30-Stage Programmable Ramp/Soak Profile, Over-Temperature & Thermocouple Break Protection |
| Tube Dimensions | Φ60 mm × 1000 mm (ID × Length) |
| Chamber Lining | High-Purity Al₂O₃ Ceramic Tube with US-Imported High-Temperature Aluminum Oxide Coating |
| Cooling | Dual-Layer Air-Cooled Steel Housing |
| Structural Support | Integrated Flange Mounting Bracket for Load Distribution |
| Brand | BEQ |
|---|---|
| Origin | Anhui, China |
| Model | BTF-1700C-III |
| Max Temperature | 1700 °C |
| Temperature Uniformity | ±1 °C |
| Max Power | 13 kW |
| Heating Rate | ≤10 °C/min (≤1200 °C), ≤5 °C/min (1200–1500 °C), ≤2 °C/min (>1500 °C) |
| Heating Element | Silicon Molybdenum (MoSi₂) Rods |
| Control System | Fuzzy PID with Auto-Tuning, 30-Stage Programmable Ramp/Soak, Over-Temperature & Thermocouple Break Protection |
| Tube Dimensions | Φ60 mm × 1000 mm (ID × Length) |
| Chamber Lining | High-Purity Al₂O₃ Ceramic Tube with US-Imported High-Temperature Alumina Coating |
| Cooling | Dual-Layer Air-Cooled Shell Structure |
| Structural Support | Integrated Flange Mounting Bracket for Load Distribution |
| Brand | BEQ |
|---|---|
| Origin | Anhui, China |
| Model | BTF-1700C-S |
| Maximum Temperature | 1700 °C |
| Temperature Uniformity | ±1 °C |
| Rated Power | 4 kW |
| Heating Rate | ≤10 °C/min (≤1200 °C), ≤5 °C/min (1200–1500 °C), ≤2 °C/min (>1500 °C) |
| Heating Element | Silicon Molybdenum (MoSi₂) Rods |
| Control System | Fuzzy PID with Auto-Tuning, 30-Stage Programmable Ramp/Soak Profile, Over-Temperature & Thermocouple Break Protection |
| Tube Dimensions | Φ60 mm × 800 mm (ID × Length) |
| Chamber Lining | High-Purity Al₂O₃ Ceramic Tube with US-Imported High-Temperature Alumina Coating |
| Cooling | Dual-Layer Air-Cooled Steel Housing |
| Brand | BEQ |
|---|---|
| Origin | Anhui, China |
| Model | BTF-1750C |
| Maximum Temperature | 1750 °C |
| Temperature Control Accuracy | ±1 °C |
| Heating Rate | ≤10 °C/min up to 1400 °C |
| Heating Element | Silicon Molybdenum (MoSi₂) Rods |
| Control System | Fuzzy PID with Auto-Tuning, 30-Stage Programmable Logic Controller, Over-Temperature & Thermocouple Break Protection |
| Tube Dimensions | 100 mm OD × 1300 mm L |
| Insulation | Vacuum-Formed Alumina Fiber Blankets |
| Cooling | Dual-Layer Air-Cooled Housing |
| Structural Support | Dual End Flange Mounting Brackets |
| Brand | BEQ |
|---|---|
| Origin | Anhui, China |
| Model | BTF-900C-SS |
| Maximum Temperature | 900 °C |
| Temperature Control Accuracy | ±1 °C |
| Rated Power | 280 W |
| Heating Rate (to Max Temp) | 10 °C/min |
| Heating Method | Resistance Wire Heating |
| Control System | Fuzzy PID + Auto-Tuning |
| Programmable Stages | 30-segment Intelligent Ramp/Soak |
| Safety Features | Over-Temperature & Thermocouple Break Alarms |
| Tube Inner Diameter | Φ25 mm |
| Hot Zone Length | 90 mm |
| Furnace Liner Material | High-Purity Alumina Fiber |
| Brand | BEQ |
|---|---|
| Origin | Anhui, China |
| Manufacturer Type | Authorized Distributor |
| Country of Origin | China |
| Model | BTF-ALD-100 |
| Precursor Configuration | 2 heated metal precursor lines (up to 200 °C) + 1 H₂O precursor line |
| Sample Capacity | Up to 4-inch wafers (100 mm), fully compatible with ≤4″ substrates |
| Uniformity | < ±1% non-uniformity over 4″ Al₂O₃ film after 300 ALD cycles |
| Base Pressure | ≤5 × 10⁻⁵ Torr (with dual-stage rotary vane pump, ≥16 m³/h) |
| Temperature Control | Substrate heating up to 300 °C (±0.5 °C) |
| Vacuum Gauge | MKS digital capacitance manometer (10⁻⁵–10⁵ Torr) |
| Sealing | Perfluoroelastomer (FFKM) O-rings, leak rate < 5 × 10⁻⁷ Pa·L/s |
| MFC Accuracy | ±1% FS for two analog mass flow controllers |
| Power Supply | 380 V AC, 50–60 Hz, 5 kW |
| Brand | BEQ |
|---|---|
| Origin | Anhui, China |
| Manufacturer Type | Authorized Distributor |
| Country of Origin | China |
| Model | MF-1200C |
| Instrument Type | Box-Type Muffle Furnace |
| Max. Operating Temperature | 1200°C |
| Continuous Service Temperature | 1100°C |
| Temperature Uniformity | ±2°C (within 80×80×80 mm zone at 1100°C) |
| Control Accuracy | ±1°C |
| Max. Heating Rate | 30°C/min |
| Rated Power | 4 kW |
| Internal Chamber Dimensions | 300 × 200 × 120 mm (7.2 L) |
| External Dimensions | 435 × 550 × 540 mm |
| Net Weight | 53 kg |
| Heating Element | Molybdenum-Doped Alloy Resistance Wire |
| Insulation Material | Vacuum-Formed High-Purity Alumina Fiber |
| Cooling System | Dual-Layer Air-Cooled Shell |
| Safety Features | Door-Interlocked Power Cut-off, Dual Mechanical Latches, Over-Temperature & Thermocouple Break Alarms |
| Controller | 30-Stage Programmable PID with Auto-Tuning, RS485 Communication Port (optional LabVIEW integration), Touchscreen Interface (optional upgrade) |
| Certifications | CE Compliant |
| Warranty | 12 months full unit coverage |
| Brand | BEQ |
|---|---|
| Origin | Anhui, China |
| Manufacturer Type | Authorized Distributor |
| Country of Origin | China |
| Model | MF-1200C-L |
| Instrument Type | Box-Type Muffle Furnace |
| Max Temperature | 1200°C |
| Operating Temperature Range | ≤1100°C |
| Temperature Control Accuracy | ±1°C |
| Rated Power | 4 kW (Note: 6 kW listed in description refers to peak/derated capacity |
| Heating Rate (to max temp) | 5–20°C/min |
| Heating Element | Kanthal A1 Resistance Wire |
| Chamber Dimensions | 250 × 300 × 250 mm (L×W×H) |
| Nominal Volume | 64 L |
| External Dimensions | 670 × 630 × 1010 mm |
| Net Weight | 143 kg |
| Gross Weight | 172 kg |
| Voltage | AC 208–240 V, Single Phase, 50/60 Hz |
| Thermocouple | Type K |
| Control System | 30-Stage Programmable PID with Auto-Tuning, Over-Temperature & Thermocouple Break Protection |
| Insulation | Multi-Layer Alumina Fiber (Vacuum-Formed), High-Purity Al₂O₃ Liner |
| Cooling | Dual-Wall Air-Cooled Jacket with Integrated Air Channel |
| Safety Certification | CE-compliant |
| Optional Certifications | UL 61010 (TUV or CSA, fee-based) |
| Brand | BEQ |
|---|---|
| Origin | Anhui, China |
| Manufacturer Type | Authorized Distributor |
| Product Origin | Domestic (China) |
| Model | Micro PECVD |
| Heating Method | Hot-Wall |
| Base Vacuum | 5 × 10⁻¹ Pa |
| Operating Pressure Range | 1.01325 × 10⁵ Pa to 1.33 × 10⁻² Pa |
| RF Power Output | 0–150 W |
| RF Interface | 50 Ω, N-type female |
| Power Stability | ≤5 W |
| Harmonic Content | ≤−50 dBc |
| Max. Heating Temperature | 1200 °C (Continuous Use ≤1100 °C) |
| Effective Chamber Dimensions | Φ25 mm / Φ50 mm (Customizable Tube Diameter) |
| Chamber Material | Alumina + High-Temperature Ceramic Fiber |
| Thermocouple Type | K-type |
| Temperature Control Accuracy | ±1 °C |
| Control Mode | 30-Stage Programmable PID with Auto-Tuning |
| Heating Zone Length | 230 mm |
| Heating Element | Resistance Wire |
| Power Supply | Single-phase, 220 V, 50/60 Hz |
| Total System Power | 1 kW |
| Pumping Speed | 10 m³/h |
| Ultimate Vacuum (with Pump) | 5 × 10⁻¹ Pa |
| Vacuum Gauge Range | −0.1 to 0.15 MPa (0.01 MPa/div) |
| Mass Flow Controllers | Triple-channel, Stainless Steel Dual-Ferrule Fittings |
| Standard N₂ Flow Ranges | 200 / 500 / 1000 sccm (Customizable) |
| MFC Accuracy | ±1.5% FS |
| Linearity | ±1% FS |
| Repeatability | ±0.2% FS |
| Response Time (Gas) | 1–4 s |
| (Electrical) | 10 s |
| Working Pressure Drop | 0.1–0.5 MPa |
| Max. Inlet Pressure | 3 MPa |
| Cooling | Forced Air |
| Ambient Temp. Range | 5–45 °C |
| Relative Humidity | ≤85% RH |
| Noise Level | ≤50 dB(A) |
| Vacuum Interface | KF25 (Inlet & Exhaust) |
| Vacuum Connection | Bellows + Manual Gate Valve |
| Brand | BEQ |
|---|---|
| Origin | Anhui, China |
| Manufacturer Type | Authorized Distributor |
| Target Market | Domestic (China) |
| Target Applications | SEM Sample Preparation |
| Sputtering Target Diameter | 58 mm |
| Sample Stage Diameter | 40 mm (accommodates up to six standard sample cups) |
| Chamber Dimensions | Ø100 mm × 130 mm (height) |
| Vacuum System | Direct-coupled two-stage rotary vane pump (RVD-2), pumping speed: 2 L/s, ultimate pressure: 5 × 10⁻² Pa |
| Vacuum Gauge | Pirani gauge |
| Process Gas Options | Air or high-purity argon (dedicated Ar inlet with fine-flow micro-regulation valve) |
| Operating Pressure Range | Adjustable from ~1–20 Pa via precision bleed valve |
| Safety Interlock | Automatic cutoff at 20 Pa chamber pressure |
| Brand | BEQ |
|---|---|
| Origin | Anhui, China |
| Model | VGT-1990QTD |
| Ultrasonic Frequency | 40 kHz |
| Ultrasonic Power | 200 W |
| Adjustable Temperature Range | 0–80 °C |
| Timer Range | 1–99 min (LED digital display) |
| Tank Capacity | 9 L |
| Internal Tank Dimensions | 300 × 240 × 150 mm (L×W×H) |
| External Dimensions | 330 × 270 × 310 mm (L×W×H) |
| Drain Valve | Yes |
| Heating System | Ceramic heater |
| Construction | Stainless steel SUS304 tank and housing |
| Transducer Configuration | Four 50 W piezoelectric transducers (total 200 W) |
| Basket Material | Welded SUS304 mesh basket (optional) |
| PCB Protection | Moisture- and corrosion-resistant coating |
| Brand | BEQ |
|---|---|
| Origin | Anhui, China |
| Model | VTF-1200C-S-III-D50 |
| Instrument Type | Vertical Tube Furnace |
| Max Temperature | 1200 °C |
| Continuous Operating Temperature | ≤1100 °C |
| Temperature Control Accuracy | ±1 °C |
| Max Heating Rate (to max temp) | ≤10 °C/min |
| Heating Element | Resistance Wire |
| Thermocouple Type | K-Type |
| Control Method | Intelligent Fuzzy PID with Auto-Tuning & 30-Stage Programmable Ramp/Soak |
| Total Power | ≤4 kW |
| Heating Zone Length | 240 mm |
| Internal Chamber Dimensions (L×W×H) | 950×800×1200 mm |
| Unit Weight | ~100 kg |
| Insulation Material | Lightweight Alumina Fiber |
| Brand | BEQ |
|---|---|
| Origin | Anhui, China |
| Model | BOF-4-300-11-GB |
| Max Temperature | 600°C |
| Temperature Control Accuracy | ±1°C |
| Max Power | 15 kW |
| Heating Rate to Max Temp | ≤10°C/min |
| Heating Method | Resistance Wire Heating |
| Control System | Fuzzy PID + Auto-Tuning, 30-Stage Programmable Logic Controller with Over-Temperature and Thermocouple Failure Alarms |
| Tube Dimensions | Φ300 mm × 3000 mm |
| Glovebox Integration | Dual Front/Back Integrated Inert Atmosphere Enclosures (O₂ < 1 ppm, H₂O < 1 ppm) |
| Sample Loading Ports | 8 Access Ports (4 per glovebox) |
| Brand | BEQ |
|---|---|
| Origin | Anhui, China |
| Model | BTF-1200C-RTP-CVD |
| Temperature Range | 100–1000 °C |
| Max Heating Rate | 50 °C/s |
| Max Operating Temperature | 1200 °C |
| Vacuum Base Pressure | 5.0×10⁻¹ Pa (cold, empty) |
| Heating Zone Length | 230 mm |
| Uniform Zone Length | 120 mm |
| Temperature Repeatability | ±3 °C |
| Control Accuracy | ±0.1 °C |
| Furnace Tube | High-Purity Quartz, Φ90×400 mm, R45 end cap |
| Gas Flow Controllers | Dual-stainless-steel double-ferrule fittings, N₂-calibrated ranges 200/500 sccm, accuracy ±1.5%, repeatability ±0.2%, response time 1–4 s (gas), 10 s (electrical) |
| Vacuum Pump | KF25 inlet/outlet, 165 L/min pumping speed, 1.1 L oil capacity |