CDE (Creative Design Engineering)
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| Brand | CDE (Creative Design Engineering) |
|---|---|
| Model | ResMap 178 |
| Origin | USA |
| Automation Level | Semi-Automatic |
| Measurement Range | 1 mΩ/□ to 5 MΩ/□ |
| Repeatability | ≤ ±0.02% (on static standard resistor) |
| Scan Speed | ≥49 points/min |
| Edge Correction Capability | Effective within 1.5 mm from wafer edge |
| Probe Force Control | Software-adjustable, 90–200 g |
| Probe Types Available | A, B, K, M, N series and custom configurations |
| Supported Substrates | Circular wafers up to 200 mm (8″), square substrates up to 156 mm × 156 mm |
| Data Output | 2D/3D resistivity maps, statistical summaries, Excel-compatible reports |
| Compliance | NIST-traceable calibration standards included (6 certified reference wafers) |