Denton Vacuum
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| Brand | Denton Vacuum |
|---|---|
| Origin | USA |
| Model | Explorer |
| Substrate Size (Max) | 8" (200 mm) |
| Base Pressure | ≤5 × 10⁻⁶ Torr |
| Pumping Options | Turbo-molecular or Diffusion Pump |
| Deposition Methods | Thermal Evaporation, E-beam Evaporation, DC/Pulse DC/RF Sputtering, Co-sputtering, Ion Beam Assisted Deposition (IAD), PECVD |
| Load Lock Option | Available |
| Vacuum Architecture | High-vacuum, differential pumping compatible |
| Compliance | Designed for GLP/GMP-aligned labs |