iplas
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| Brand | iplas |
|---|---|
| Origin | Germany |
| Model | CYRANNUS® |
| Operating Pressure Range | 10 mbar to atmospheric pressure |
| Plasma Generation Method | External multi-electrode microwave excitation (2.45 GHz or 915 MHz) |
| Substrate Compatibility | Up to 300 mm diameter planar or curved substrates |
| Compatible Precursor Gases | CH₄/H₂/O₂/Ar/He/N₂ (inert and reactive) |
| Deposited Materials | Single-crystal diamond, polycrystalline diamond, nanocrystalline diamond, DLC, Al₂O₃, c-BN |
| Plasma Stability | High reproducibility under dynamic gas flow, pressure, and voltage fluctuations |
| Safety Compliance | Fully shielded microwave cavity |