KJ-Science
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| Brand | KJ-Science |
|---|---|
| Origin | Anhui, China |
| Model | VTC-2RF |
| RF Power | 300 W, 13.56 MHz |
| Target Diameter | 50 mm (2") |
| Chamber Material | High-purity quartz (OD 160 mm × ID 150 mm × H 250 mm) |
| Base Pressure | ≤1×10⁻³ Torr (with dual-stage rotary vane pump) / ≤1×10⁻⁵ Torr (with optional turbomolecular pump) |
| Substrate Holder | Rotatable (1–20 rpm), heated up to 700 °C (short-term), 500 °C continuous |
| max. substrate size | 50 mm dia. (accommodates 2" wafers) |
| Cooling | Integrated recirculating chiller (16 L/min flow rate |
| required flow at sputter head | ≥10 L/min) |
| Thickness Monitoring | In-situ quartz crystal microbalance (QCM) with 0.1 Å resolution and LED display |
| Compliance | CE-certified |
| Warranty | 12 months |