KLOE
Filter
Showing all 3 results
| Brand | KLOE |
|---|---|
| Origin | France |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | Dialse 3D |
| Pricing | Available Upon Request |
| Laser Wavelengths | 375 nm or 405 nm |
| Spot Size Range | 1–50 µm |
| Maximum Print Area | 100 mm × 100 mm × 50 mm |
| Minimum Layer Step | 100 nm |
| Linear Printing Speed | Up to 50 mm/s |
| Positioning Accuracy & Repeatability | 100 nm |
| Substrate Compatibility | 1–4 inch wafers, thickness 250 µm–10 mm |
| Input File Format | STL |
| Printing Modes | Raster Scan & Vector Direct-Write |
| Depth of Focus | High (enabling vertical wall fidelity) |
| Resolution Capability | Down to 5 µm (customizable) |
| Brand | KLOE |
|---|---|
| Origin | France |
| Model | Dilase 250 |
| Exposure Mode | Non-contact (Flying Spot) |
| Resolution | ≤100 nm (line width, under optimal resist & process conditions) |
| Wavelength | 375 nm or 405 nm (solid-state laser) |
| Beam Spot Size | Adjustable from 1 µm to 50 µm |
| Writing Area | 100 mm × 100 mm |
| Stage Positioning Accuracy | 100 nm (standard), 40 nm (optional) |
| Repeatability | ±100 nm |
| Overlay Accuracy (Multi-layer) | ≤1 µm |
| Orthogonality Error | <1 mrad |
| Maximum Sample Size | Up to 125 mm square (5-inch equivalent) |
| Substrate Thickness Range | 250 µm – 5 mm |
| Laser Lifetime | >10,000 h |
| File Format Support | GDSII, OASIS, DXF, LWO |
| Safety Compliance | EN 60825-1, IEC 61000-6-2/6-4, CE Marked |
| Brand | KLOE |
|---|---|
| Origin | France |
| Model | UV-KUB Series |
| Light Source Wavelengths | 365 nm / 385 nm / 405 nm |
| Minimum Resolution | 2 µm |
| Maximum Divergence Angle | < 2° |
| Energy Density | 25 mW/cm² ±10% (UV-KUB 2) / 30 mW/cm² ±10% (UV-KUB 3) |
| Max. Substrate Size | 4-inch wafer |
| Alignment Capability | Manual pre-alignment + fine manual alignment (UV-KUB 2) |
| Exposure Time Range | 1 s – 18 h |
| Thermal Rise During Exposure | < 1 °C |
| Max. Stored Programs | 10 (UV-KUB 2) / Unlimited (UV-KUB 3) |
| Display | 5.7″ color touchscreen (UV-KUB 2) / 15.6″ color touchscreen (UV-KUB 3) |
| Dimensions (W×D×H) | 260 × 260 × 260 mm (UV-KUB 2) / 480 × 480 × 480 mm (UV-KUB 3) |
| Weight | 8.2 kg (UV-KUB 2) / 55 kg (UV-KUB 3) |
| Compatible Photoresists | AZ, Shipley, SU-8, K-CL series |
| Contact Modes | Hard contact (direct contact) and soft contact (proximity mode) |