KRI (Kimball Physics / Kaufman Research Institute)
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| Brand | KRI (Kimball Physics / Kaufman Research Institute) |
|---|---|
| Origin | USA |
| Model | KDC 100 |
| Ion Energy Range | 100–1200 eV |
| Max Ion Current | >400 mA |
| Grid Diameter | 12 cm |
| Cathode Configuration | Dual Filament |
| Magnetic Confinement | DC |
| Anode Voltage | 0–100 V DC |
| Neutralizer Options | Sidewinder Filament, LFN-2000, or standard filament |
| Beam Profile | Parallel or Divergent |
| Mounting | Quick-Release or Movable Flange |
| Operating Gas Compatibility | Inert (Ar, Xe), Reactive (O₂, N₂, CF₄), and Mixed Gases |
| Recommended Source-to-Substrate Distance | 8–36 inches |
| Gas Control Channels | Up to 4 independently regulated gas inlets |
| Optional | Motorized Tilt Mount for Beam Angle Adjustment |
| Compliance | Designed for integration into UHV and HV vacuum systems (≤1×10⁻⁷ Torr base pressure) |