NS (Nippon Seiko)
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| Brand | NS (Nippon Seiko) |
|---|---|
| Origin | Japan |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | IBE |
| Price Range | USD 210,000 – 280,000 |
| Sample Diameter | 3"–6" φ |
| Max. Ion Incidence Angle | ±90° |
| Ion Source | Kaufman-type KDC-40 / KDC-75 / KDC-160 (KRI, USA) |
| Ultimate Vacuum | ≤1×10⁻⁴ Pa (4IBE/7.5IBE/16IBE/20IBE), ≤8×10⁻⁵ Pa (MEL 3100) |
| Turbomolecular Pump | Pfeiffer (350 L/s or 1250 L/s) |
| Etch Uniformity | ≤±5% |
| Cooling | Direct substrate cooling |
| Motion System | Dry Chuck Planet (planetary rotation + revolution) |
| Etch Mode | Physical sputtering (Ar⁺ beam), non-reactive, anisotropic |
| Brand | NS (Nippon Seiko) |
|---|---|
| Origin | Japan |
| Model | NS-8 |
| Minimum Feature Size | ≤1 µm |
| Ion Beam Diameter | ≤1 mm |
| Acceleration Voltage Range | 0.5–2 kV |
| Substrate Capacity | 3″ wafers × 8 pcs or 4″ wafers × 6 pcs |
| Stage Cooling | Direct-contact liquid-cooled chuck (20 cm diameter) |
| Ion Source | Kaufman-type broad-beam ion source (OEM from Kimball Physics / original Kaufman design heritage) |
| Beam Tilt Adjustment | ±15° continuous RF-driven angular control |
| Substrate Motion | Dual-axis rotation (planetary motion: rotation + revolution) |
| Power Supply Compatibility | 200–240 VAC, 50/60 Hz (field-replaceable with domestic-standard AC input modules) |