NTT-AT
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| Brand | NTT-AT |
|---|---|
| Origin | Japan |
| Manufacturer Type | Authorized Distributor |
| Product Origin | Imported |
| Model | XRESO Series |
| Component Category | Optical Element |
| Substrate Material | Si / SiN / SiC / Ru |
| Absorber Material | Ta |
| Minimum Feature Size | 20 nm (XRESO-20), 50 nm (XRESO-50HC), 100 nm (XRESO-100) |
| Membrane Thickness | 50 nm–2 µm |
| Substrate Dimensions | 10 mm × 10 mm (standard), customizable |
| Pattern Area | 250 µm × 350 µm to 300 µm² |
| Absorber Thickness | 100 nm–1 µm Ta |
| Alignment | Centered on substrate |