TERA
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| Brand | TERA |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Product Category | Imported Instrument |
| Model | TERA-FAB E |
| Minimum Feature Size | 200 nm |
| Electron Beam Equivalent Resolution (via PPL) | <100 nm |
| Accelerating Voltage Range | 30 kV |
| Note | This is a *polymer pen lithography* system — not an electron beam lithography (EBL) instrument |
| Brand | TERA |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Product Origin | Imported |
| Model | TERA-FAB M |
| Minimum Feature Size | 100 nm |
| Electron Beam Equivalent Spot Size | 100 nm |
| Acceleration Voltage Range | 30 kV |