VPI (Beijing Boyuan Weinano Technology Co., Ltd.)
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| Brand | VPI (Beijing Boyuan Weinano Technology Co., Ltd.) |
|---|---|
| Origin | Beijing, China |
| Model | SD-650MH |
| Vacuum Chamber | Ø260 mm × 270 mm (external), Ø210 mm × 270 mm (internal) |
| Ultimate Vacuum | 5×10⁻⁵ Pa |
| Turbo Molecular Pump | 300 L/s |
| Foreline Pump | 4 L/s with anti-backstreaming solenoid valve & oil mist filter |
| DC Power Supply | 0–600 V / 0–1.6 A |
| Sputtering Rate | 0–200 nm/min |
| Target Diameter | 50 mm |
| Integrated Thickness Monitor | 0–6000 nm, resolution 0.001 nm/s |
| Gas Control | Electromagnetic + manual mass flow valves for Ar and other inert gases |
| Compliance | Designed for GLP-aligned thin-film R&D environments |