VPI (Vision Precision Instruments)
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| Brand | VPI (Vision Precision Instruments) |
|---|---|
| Model | ETD-2000 |
| Type | DC Magnetron Sputtering System |
| Target Configuration | Single removable sputter target head |
| Chamber Vacuum Range | 1 × 10⁻³ to 5 × 10⁻¹ mbar |
| Operating Current Range | 0–40 mA (adjustable) |
| Process Timer | 0–300 seconds (digital display) |
| Chamber Material | Borosilicate glass viewport + aluminum alloy main body |
| Pumping System | Integrated two-stage rotary vane pump (pump-down time < 90 s to 1 × 10⁻² mbar) |
| Power Supply | DC, stabilized, current-limited |
| Leak Rate Compliance | ≤5 × 10⁻⁷ mbar·L/s (as verified per ISO 20483) |