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| Brand | Leica |
|---|---|
| Origin | Germany |
| Model | EM ACE200 |
| Vacuum Level | ≤7 × 10⁻³ mbar |
| Chamber Dimensions (W×D×H) | 140 mm × 145 mm × 150 mm |
| Sample Stage Diameter | 80 mm |
| Working Distance | 30–100 mm |
| Sputtering Current | ≤150 mA |
| Film Thickness Resolution (with QCM option) | 0.1 nm |
| Coating Modes | Ion Sputtering, Carbon Wire Evaporation, Dual-Mode, Optional Glow Discharge |
| Optional Features | Quartz Crystal Microbalance (QCM), Planetary Rotation, Interchangeable Shields, Directional Sputtering, Pulsed Carbon Evaporation |
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