Empowering Scientific Discovery

Funa Scientific Instruments (Shanghai) Co., Ltd.

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BrandATLANT3D
OriginDenmark
Manufacturer TypeAuthorized Distributor
Product OriginImported
ModelNANOFABRICATOR™ LITE
Substrate SizeUp to 4-inch wafers
Process Temperature Range50 °C – 300 °C
Precursor Channels2
Dimensions (W × H × D)1400 mm × 800 mm × (depth not specified)
Thickness UniformityCapable of controlled thickness gradients across substrate
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BrandForge Nano
OriginUSA
Manufacturer TypeAuthorized Distributor
Origin CategoryImported
ModelPROMETHEUS
QuotationUpon Request
Substrate Capacity5–5000 g powder
Process TemperatureUp to 200 °C
Precursor Channels2–8
Weight>200 kg
FootprintFloor-Standing
UniformityConformal atomic-layer coating across entire powder surface
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