AITOLY MFM Series Thermal Mass Flow Meter
| Brand | AITOLY |
|---|---|
| Model | MFM Flow Meter |
| Type | Thermal Mass Flowmeter |
| Accuracy | ±0.5% FS |
| Repeatability | ±0.2% FS |
| Flow Range | 0.5–100% FS |
| Operating Temperature | −20 to +65 °C |
| Humidity | 0–98% RH (non-condensing) |
| Max Pressure Rating | 3 MPa |
| Response Time | <1 s |
| Power Supply | 15–40 VDC |
| Power Consumption | <1.2 W |
| Communication Interfaces | RS232, RS485, CAN, 0–5 VDC, 4–20 mA |
| Wetted Materials | SUS304 / SUS316L |
| Seals | FKM (Viton®) |
| Connection Types | Push-to-Connect, Quick-Release, Swagelok®, VCR |
| Display | Integrated LCD with keypad |
| Built-in Sensors | Temperature & Pressure Compensation |
Overview
The AITOLY MFM Series Thermal Mass Flow Meter is an industrial-grade, direct mass flow measurement instrument engineered for high-reliability gas flow monitoring in demanding process and analytical environments. Based on constant-temperature anemometry (CTA), the device measures mass flow rate by detecting heat transfer between a heated sensor element and the flowing gas stream—eliminating dependence on pressure and temperature fluctuations. Unlike volumetric flowmeters, the MFM delivers true mass flow output (standard cubic centimeters per minute — SCCM — or standard liters per minute — SLPM) without external compensation, making it ideal for applications requiring trace-level gas control, stoichiometric ratio management, or multi-gas flexibility across semiconductor fabrication, analytical instrumentation, and clean energy systems.
Key Features
- No moving parts: Ensures long-term operational stability, zero mechanical wear, and immunity to particulate contamination—critical for ultra-clean processes such as RIE/DRIE etching and vacuum deposition.
- Integrated dual-sensor architecture: Onboard temperature and absolute pressure sensors enable real-time density correction, delivering consistent accuracy across varying ambient and process conditions.
- Multi-gas capability: Factory-calibrated for common process gases (N₂, O₂, Ar, He, H₂, CO₂, Air, etc.) with optional user-defined gas tables via configuration software; supports up to 10 preloaded gas profiles.
- High-resolution local interface: Backlit monochrome LCD display with intuitive keypad navigation enables standalone operation—showing instantaneous flow, totalized volume, temperature, pressure, and diagnostic status simultaneously.
- Rugged wetted path construction: Flow body and sensor housing fabricated from electropolished SUS316L stainless steel; fluorocarbon (FKM/Viton®) seals ensure chemical compatibility with aggressive gases and cleaning agents.
- Flexible electrical integration: Supports industry-standard analog (0–5 VDC, 4–20 mA) and digital (RS232, RS485 Modbus RTU, CAN 2.0B) outputs—enabling seamless connectivity to PLCs, DCS, SCADA, and laboratory data acquisition systems.
Sample Compatibility & Compliance
The MFM Series is designed for use with non-corrosive, non-abrasive, and non-condensing gases in low-to-medium pressure applications. It complies with IEC 61000-6-2 (EMC immunity) and IEC 61000-6-4 (EMC emissions) standards. While not intrinsically safe certified, its low-power design (<1.2 W) and robust enclosure meet general-purpose industrial safety requirements. The device supports audit-ready operation in regulated environments: firmware logs all configuration changes and calibration events with timestamps; optional firmware upgrades provide configurable data logging intervals and alarm thresholds aligned with GLP/GMP documentation practices. Though not FDA 21 CFR Part 11–certified out-of-the-box, the system’s deterministic communication protocol and tamper-evident configuration file structure facilitate validation under quality management systems compliant with ISO 13485 and ISO 9001.
Software & Data Management
Configuration and diagnostics are performed using AITOLY’s cross-platform PC utility (Windows/macOS/Linux), which communicates via USB-to-serial adapter or native RS232/RS485 interface. The software allows users to select gas type, adjust damping filters, define custom linearization curves, set alarm thresholds, and export calibration reports in PDF or CSV format. All parameter settings are stored in non-volatile memory with write-protection options. For OEM integration, a full API (C/C++ and Python SDKs) is available—including Modbus register maps and CAN message definitions—to support embedded control logic and real-time telemetry streaming.
Applications
- Semiconductor Manufacturing: Precise delivery of process gases (e.g., SF₆, C₄F₈, O₂) in reactive ion etching (RIE) and deep reactive ion etching (DRIE) tools; endpoint detection support via flow signature analysis.
- Analytical Instrumentation: Carrier and make-up gas control in gas chromatography (GC) systems; purge gas regulation in mass spectrometry sample introduction modules.
- Fuel Cell & Electrolyzer Testing: Anode/cathode reactant flow metering (H₂, O₂, air) with simultaneous temperature/pressure compensation for accurate stoichiometry calculation and efficiency modeling.
- Vacuum Coating & PVD/CVD Systems: Reactive gas dosing (e.g., N₂, CH₄, NH₃) during sputtering or plasma-enhanced chemical vapor deposition—where repeatability and zero drift directly impact film uniformity.
- Laser Welding & Additive Manufacturing: Shielding gas (Ar, He) flow verification in laser beam welding cells and metal powder bed fusion systems—ensuring weld integrity and minimizing oxidation.
FAQ
What gases can the MFM Series measure?
The meter is factory-calibrated for nitrogen, oxygen, argon, helium, hydrogen, carbon dioxide, synthetic air, and other common industrial gases. Custom calibration for additional gases is available upon request with certified reference standards.
Does the device require external temperature or pressure transmitters?
No—integrated PT1000 temperature and piezoresistive absolute pressure sensors provide automatic compensation; no external hardware is needed for standard operation.
Can the MFM be used in vacuum or sub-atmospheric applications?
It is rated for operation up to 3 MPa (435 psi) maximum working pressure but is not designed for vacuum-side installation (i.e., downstream of vacuum pumps); it must be installed on the upstream, positive-pressure side of the gas supply line.
Is field recalibration possible?
Yes—users may perform zero calibration at atmospheric pressure with no flow using the front-panel menu or remote command; span calibration requires certified gas standard and is recommended annually or after sensor exposure to contamination.
What mounting orientations are supported?
The MFM is orientation-insensitive due to thermal sensing principle; however, horizontal installation is preferred to minimize condensation risk in high-humidity environments. Vertical mounting with upward flow direction is also acceptable if drip paths are avoided.
