CombiNEG Non-Evaporable Getter (NEG) Composite Ion Pump System

Overview

The CombiNEG Non-Evaporable Getter (NEG) Composite Ion Pump System is an integrated ultra-high vacuum (UHV) pumping solution engineered for demanding laboratory and research environments where hydrocarbon-free, vibration-free, and magnetically quiet operation is essential. Unlike conventional oil-based or turbomolecular pumps, the CombiNEG combines a high-efficiency sputter-ion pump—optimized for noble gases (e.g., Ar, He, Ne) and reactive species—with a sintered non-evaporable getter (NEG) cartridge specifically formulated to chemisorb hydrogen, CO, CO₂, N₂, O₂, and water vapor at room temperature. This dual-pump architecture leverages complementary pumping mechanisms: ionization and sputtering in the ion pump stage, and surface diffusion and atomic binding in the NEG stage—enabling simultaneous, high-speed removal of both inert and active gas species without regeneration cycles or moving parts. The system is designed for integration into analytical instrumentation (e.g., surface science chambers, residual gas analyzers, electron microscopes), quantum physics setups, and accelerator beamlines where long-term pressure stability, zero hydrocarbon backstreaming, and minimal electromagnetic interference are mandatory.

Key Features

• Hybrid pumping architecture: Integrated sputter-ion pump + sintered NEG cartridge delivers broad-spectrum gas removal across inert, reactive, and condensable species.
• Sintered NEG construction eliminates powder shedding risk—unlike pressed-powder alternatives—ensuring system cleanliness and extended service life under continuous UHV operation.
• Low magnetic field design (< 1 mT at pump surface) minimizes perturbation of electron trajectories and sensitive detectors, supporting applications in LEED, AES, and low-energy electron spectroscopy.
• ConFlat non-rotating inlet flange (CF-63 or CF-100 configurable) with optional side-port CF connection enables flexible vacuum line routing and modular chamber integration.
• No moving parts or lubricants: inherently vibration-free operation critical for interferometry, atomic force microscopy (AFM), and cryogenic systems.
• Low leak current electronics ensure stable, low-noise pressure readouts compatible with high-resolution vacuum gauges (e.g., Bayard–Alpert, cold cathode).
• Pre-baked and valve-sealed at > 400 °C under vacuum: guarantees factory-certified cleanliness and eliminates outgassing during initial installation.

Sample Compatibility & Compliance

The CombiNEG system is compatible with stainless steel (304/316L), copper, and aluminum vacuum systems conforming to ISO 28621 and ASTM E595 outgassing specifications. Its all-metal, oil-free construction meets stringent requirements for semiconductor metrology, synchrotron beamline endstations, and space-simulation chambers. The pump’s bakeout capability (> 400 °C) supports compliance with NASA/ESA contamination control standards (e.g., ECSS-Q-ST-70-02C). While not certified to a specific ISO 8573 class, its ultimate pressure performance (≤ 5 × 10⁻² mbar, typical base pressure < 1 × 10⁻⁸ mbar after conditioning) aligns with ISO 21360-1 for ion pump verification. Full traceability documentation—including material certifications (EN 10204 3.1), RoHS/REACH declarations, and factory test reports—is provided per unit for GLP/GMP audit readiness.

Software & Data Management

The CombiNEG operates as a standalone hardware module with analog voltage output (0–10 V) proportional to ion current—directly interfaced with standard vacuum controllers (e.g., Agilent Vacuubrand, Pfeiffer TPG300 series). Optional digital communication via RS-485 or Modbus RTU enables integration into LabVIEW, EPICS, or SCADA-based vacuum management platforms. All operational parameters—including accumulated ion current, NEG activation status, and overtemperature alerts—are logged with timestamped metadata. Audit trail functionality complies with FDA 21 CFR Part 11 requirements when paired with validated controller firmware and secure user access protocols.

Applications

• Surface science analysis: XPS, UPS, STM, and molecular beam epitaxy (MBE) growth chambers requiring sub-10⁻⁹ mbar base pressures and zero carbon contamination.
• Particle accelerator vacuum systems: Beam pipe conditioning and maintenance in storage rings and linacs.
• Quantum computing infrastructure: Cryo-cooled dilution refrigerators where magnetic noise and vibration must be minimized.
• Space environment simulation: Thermal vacuum testing of satellite components per ECSS-E-ST-10-04C.
• High-resolution mass spectrometry: Time-of-flight (TOF) and Orbitrap systems demanding ultra-stable background pressure for isotopic ratio accuracy.

FAQ

What gases does the CombiNEG pump remove most efficiently?
The ion pump stage provides high speed for argon, helium, and other noble gases; the sintered NEG cartridge delivers rapid sorption of H₂, CO, CO₂, N₂, O₂, and H₂O—covering > 95% of residual gas load in well-baked UHV systems.
Is the NEG cartridge replaceable in situ?
Yes—the sintered NEG element is housed in a removable, CF-flanged cartridge assembly, enabling replacement without breaking main chamber vacuum, provided a gate valve isolates the pump section.
Does the pump require periodic regeneration?
No. The sintered NEG operates continuously at ambient temperature after initial activation; no thermal cycling or power interruption is needed for sustained performance.
Can the CombiNEG be used in magnetic confinement experiments?
Yes—its low-field design ensures negligible distortion of external magnetic fields up to 1 T, making it suitable for fusion diagnostics and magneto-optical trap (MOT) vacuum systems.
What safety certifications apply to this pump?
The unit carries CE marking per EU Machinery Directive 2006/42/EC and EMC Directive 2014/30/EU; electrical safety complies with IEC 61000-6-2/6-4 and UL 61010-1 third-party certification.