INFICON SKY CDG045D Capacitive Vacuum Gauge

Overview

The INFICON SKY CDG045D is a high-precision, temperature-stabilized capacitive manometer designed for accurate total pressure measurement and process control in medium-to-high vacuum environments. Operating on the principle of capacitance change induced by diaphragm deflection under differential pressure, the CDG045D employs a monolithic, ultra-pure alumina ceramic sensing element—engineered for exceptional long-term stability, chemical inertness, and mechanical robustness. Unlike metallic diaphragms susceptible to creep or hysteresis, the ceramic membrane exhibits negligible drift over time and rapid recovery from atmospheric exposure. To ensure metrological consistency across varying ambient conditions, the sensor head is actively maintained at a constant 45 °C via integrated thermal regulation—eliminating thermal expansion artifacts and enabling repeatable measurements with high signal fidelity. With a full-scale range of 100–1000 mTorr (13.3–133 Pa), the CDG045D bridges the critical transition zone between rough and medium vacuum, making it especially suitable for plasma-enhanced processes where dynamic pressure transients and reactive gas chemistries demand both accuracy and resilience.

Key Features

• Temperature-controlled sensor head stabilized at 45 °C for superior signal stability and repeatability
• Full-scale range: 100–1000 mTorr (13.3–133 Pa), linear 0–10 V analog output independent of gas composition
• Alumina ceramic diaphragm offering corrosion resistance, fast atmospheric recovery (<60 s), and <15 min warm-up time
• Low power consumption and energy-efficient design—reducing operational cost of ownership (CoO) by up to 50% versus conventional heated gauges
• Standard flange options including ISO-KF 16/25/40, CF 1.33″, and NW16; fieldbus interface compatibility (optional Profibus DP, DeviceNet, or RS-485)
• Integrated diagnostic port for real-time status monitoring, fault logging, and accelerated field service
• Zero adjustment via front-panel push-button or remote command (TTL/RS-232); user-configurable zero offset compensation
• Two-year limited warranty backed by INFICON’s global support infrastructure and rigorous factory calibration traceable to NIST standards

Sample Compatibility & Compliance

The CDG045D is compatible with aggressive process gases—including Cl₂, NF₃, O₂, CF₄, and SiH₄—commonly encountered in plasma etch, PECVD, and sputtering systems. Its all-ceramic wetted path eliminates galvanic corrosion and adsorption-related hysteresis, ensuring reliable performance in chemically hostile vacuum environments. The gauge meets CE marking requirements under the EU Machinery Directive and Electromagnetic Compatibility (EMC) Directive. It is certified to UL 61010-1 (Safety Requirements for Electrical Equipment for Measurement, Control, and Laboratory Use), complies with SEMI S2/S8 safety and environmental guidelines for semiconductor manufacturing equipment, and conforms to RoHS 2011/65/EU restrictions on hazardous substances. While not intrinsically rated for explosive atmospheres, its low-power architecture and non-sparking design support integration into Class 1, Division 2 hazardous locations when installed per NEC Article 500.

Software & Data Management

The CDG045D supports both standalone operation and system-level integration via analog voltage output or digital fieldbus protocols. INFICON’s optional SKYLink software enables configuration, real-time data acquisition, trend logging, and alarm threshold management through a Windows-based GUI. All calibration parameters, firmware revision history, and sensor diagnostics are stored internally with timestamped audit trails—supporting GLP/GMP documentation requirements. When deployed in regulated environments, the device can be configured to generate electronic records compliant with FDA 21 CFR Part 11, including operator identification, change logs, and immutable data export in CSV or XML formats. No proprietary drivers are required for third-party SCADA or PLC integration; standard Modbus RTU or ASCII serial commands facilitate seamless interoperability.

Applications

• Process pressure monitoring and closed-loop control in semiconductor fabrication tools (etch, CVD, PVD, ALD)
• Reference-grade pressure measurement for vacuum system validation and chamber leak testing
• Transfer standard applications requiring traceable, gas-independent readings across multiple instrument platforms
• Chemical vapor synthesis, vacuum distillation, and catalyst activation systems handling corrosive or condensable vapors
• Research vacuum chambers requiring stable, low-drift reference sensors for kinetic studies and thin-film deposition optimization
• Calibration laboratories performing inter-comparison measurements against primary standards per ISO/IEC 17025

FAQ

What is the recommended mounting orientation for optimal performance?
The CDG045D is specified for horizontal mounting with the electrical connector facing downward to prevent condensate ingress; vertical mounting is permissible but requires verification of local thermal gradients.
Is the 0–10 V output truly gas-type independent across the entire range?
Yes—the capacitive measurement principle ensures linear, gas-independent response within ±0.25% FS accuracy; no gas-specific correction factors are needed.
Can the CDG045D be used as a transfer standard in accredited calibration labs?
Yes—its NIST-traceable calibration certificate, documented long-term stability (<0.1% FS/year), and compliance with ISO 5725 repeatability criteria support use as a secondary reference standard.
Does the gauge require periodic recalibration in-situ?
No—due to inherent ceramic diaphragm stability and active temperature control, recalibration is only recommended annually or after physical shock or exposure beyond specification limits.
How does the CDG045D handle sudden pressure surges during plasma ignition?
Its ceramic membrane’s high natural frequency (>10 kHz) and overpressure tolerance (2× full scale) prevent mechanical overload; transient damping is managed via internal RC filtering optimized for plasma tool duty cycles.