KANOMAX 3950-00 Ultra-Sensitive 0.1 μm Particle Counter for Semiconductor Cleanroom Monitoring

Overview

The KANOMAX 3950-00 is an ultra-compact, high-sensitivity airborne particle counter engineered specifically for real-time monitoring of sub-0.1 μm particulate contamination in semiconductor fabrication cleanrooms and critical process environments. Utilizing calibrated laser light scattering detection with dual-channel optical sizing (0.1 μm and 0.3 μm), the instrument meets the stringent metrological requirements of JIS B9921 and ISO 21501-4 for counting efficiency, size resolution, and false count performance. Its 2.83 L/min (0.1 CFM) volumetric flow rate is optimized for integration into tool-level monitoring systems—enabling continuous, embedded environmental surveillance without compromising spatial constraints typical of advanced lithography tools, wafer handlers, or mini-environments. Unlike conventional benchtop counters, the 3950-00 is designed as a sensor-grade module: its robust mechanical architecture, low thermal drift, and internal pump ensure stable operation under variable pressure and temperature gradients encountered near EUV scanners or chemical vapor deposition chambers.

Key Features

• Sub-0.1 μm detection capability with validated counting efficiency at the 0.1 μm threshold—critical for detecting nucleation-mode particles generated during plasma etch or CMP processes.
• Ultra-compact footprint (150 × 163 × 228 mm) and lightweight design (3.4 kg), enabling seamless integration into OEM equipment enclosures and tool-side monitoring nodes.
• 4.3-inch full-color resistive touchscreen interface with intuitive icon-based navigation—supports real-time visualization of cumulative (∑), differential (Δ), and histogram-mode particle counts.
• Dual-channel simultaneous measurement (0.1 μm and 0.3 μm) with independent calibration traceability to NIST-traceable PSL standards.
• Multi-mode sampling control: single-shot, repeat, continuous, ISO-compliant sequential sampling, GB/T 16292-based protocols, and user-defined calculation modes.
• Integrated communication suite: USB Device for direct PC connection and firmware updates; USB Host for printer output or external flash storage; RS-485 for Modbus RTU integration into facility SCADA systems; 10/100 Mbps Ethernet with configurable TCP/IP stack for centralized data aggregation.

Sample Compatibility & Compliance

The 3950-00 is validated for use with ambient air, nitrogen-purged tool exhaust streams, and inert gas environments common in front-end semiconductor manufacturing. It does not require external vacuum sources or dilution systems—its internal diaphragm pump maintains consistent flow across inlet pressure differentials up to ±15 kPa. Calibration and performance verification are fully aligned with ISO 21501-4 Annex A for light-scattering airborne particle counters, including specified test conditions for PSL aerosol generation, optical alignment verification, and coincidence error correction. The device supports audit-ready operation under GLP and GMP-aligned workflows: all measurement logs include embedded timestamps, operator IDs (via optional network authentication), and immutable record headers compliant with FDA 21 CFR Part 11 data integrity principles when deployed with KANOMAX’s certified data management software.

Software & Data Management

Raw measurement data is stored internally in CSV format (up to 10,000 records), preserving time-stamped channel-specific counts, flow status flags, and system diagnostics. The included KANOMAX ParticleView™ PC software enables post-acquisition analysis—including temporal trend plotting, ISO Class mapping (per ISO 14644-1:2015), and statistical process control (SPC) charting with Cp/Cpk metrics. Data export supports direct ingestion into MES platforms via OPC UA or RESTful API endpoints (available via optional firmware license). All communication protocols implement CRC-16 error checking and configurable retry logic to ensure packet integrity in electrically noisy fab-floor environments.

Applications

• Real-time contamination monitoring at photomask storage cabinets and reticle pre-aligners.
• Embedded particle sensing in track systems, cluster tools, and load-lock chambers.
• Verification of ULPA filter integrity and laminar airflow uniformity in Class 1 (ISO 3) and Class 0.1 (ISO 2) clean zones.
• Qualification of chemical delivery lines and purge gas purity in epitaxial reactor environments.
• Root-cause analysis of defect excursions through synchronized particle burst logging and tool event tagging.

FAQ

Does the 3950-00 meet ISO 14644-1 classification requirements for cleanroom certification?
Yes—the instrument satisfies the minimum detectable size and counting statistics criteria defined in ISO 14644-1:2015 for Class 1–Class 5 environments when operated in accordance with ISO 21501-4 calibration protocols and validated sampling procedures.
Can it be used for continuous unattended monitoring over extended periods?
Yes—its internal memory, low-power consumption (<12 W), and watchdog-timer reset functionality support 7×24 operation. Scheduled auto-calibration checks are configurable via Ethernet command set.
Is the 0.1 μm channel traceably calibrated to international standards?
Yes—each unit ships with a factory calibration certificate referencing NIST-traceable PSL monodisperse aerosols and verified against JIS B9921 reference instrumentation.
What is the maximum allowable sampling hose length for remote probe configurations?
For optimal isokinetic sampling and minimal particle loss, KANOMAX recommends ≤1.5 m of conductive 4 mm ID tubing with smooth inner surface finish (e.g., Tygon® E-3603); longer lengths require flow compensation and loss correction per ISO 21501-4 Annex C.
Does the device support multi-location mapping for distributed cleanroom monitoring networks?
Yes—it supports up to 99 predefined site IDs, each with unique alarm thresholds and sampling schedules, enabling synchronized fleet-wide deployment across fab-wide environmental monitoring systems (EMS).