MiXran Meg1017 UV-Fused Silica Spherical Lens

Overview

The MiXran Meg1017 is a precision-engineered UV-fused silica spherical lens series designed for demanding optical applications requiring high transmission in the deep ultraviolet (DUV) spectrum and exceptional thermal and chemical stability. Constructed from synthetic fused quartz with certified OH⁻ content < 1 ppm, each lens exhibits minimal absorption below 200 nm—critical for excimer laser systems (e.g., ArF at 193 nm, KrF at 248 nm), UV spectroscopy, photolithography alignment optics, and space-based UV instrumentation. The plano-convex geometry optimizes collimation and focusing performance while minimizing spherical aberration when used with the convex side facing the collimated beam. All Meg1017 lenses are manufactured to ISO 10110-1 and ISO 10110-3 standards for surface form accuracy and surface imperfections, ensuring consistent wavefront fidelity across the full aperture.

Key Features

• UV-grade fused silica substrate with certified transmittance ≥ 85% at 193 nm (10 mm path length)
• Precision-polished surfaces meeting 40-20 scratch-dig specification per MIL-PRF-13830B
• Surface flatness of λ/4 (633 nm) on plano side; sphericity tolerance ≤ ±0.2 µm RMS on convex surface
• Low thermal expansion coefficient (α ≈ 0.55 × 10⁻⁶ /°C) enabling stable performance under thermal cycling
• No internal stress birefringence (≤ 5 nm/cm), verified via polariscopic inspection per ISO 10110-5
• Optional broadband AR coating available for 190–350 nm or custom dual-band (e.g., 193/248 nm)

Sample Compatibility & Compliance

The Meg1017 lens series is compatible with standard kinematic mounts (e.g., SM1-threaded lens tubes, Ø1″ post holders) and vacuum-compatible optical tables. All lenses are cleaned to Class 100 cleanroom standards and packaged in nitrogen-purged, static-dissipative containers. Compliance documentation includes material certification (ASTM C148-22 for fused silica), spectral transmittance reports (measured per ISO 9050), and conformance to RoHS 2015/863/EU and REACH SVHC regulations. For regulated environments—including ISO/IEC 17025-accredited labs and FDA-regulated phototherapy device manufacturing—the lenses support traceable calibration chains and full lot-level traceability upon request.

Software & Data Management

While the Meg1017 is a passive optical component, its integration into automated optical systems benefits from standardized metrology data exchange. Each lens shipment includes a digital Certificate of Conformance (CoC) in PDF/A-1b format, containing measured EFL, BFL, radius of curvature (ROC), and interferometric surface map metadata compliant with ISO 14971 risk management annexes. For OEM integration, MiXran provides ASCII-formatted Zemax-compatible .DAT files (including surface sag and refractive index dispersion data per Sellmeier coefficients) and supports direct API access to batch-specific QA datasets via secure SFTP portal—enabling automated validation against design tolerances in CI/CD optical assembly workflows.

Applications

• Excimer laser beam shaping and homogenization in semiconductor lithography steppers
• UV Raman spectrometer collection optics requiring minimal fluorescence background
• High-power DUV LED collimation for water disinfection and surface sterilization systems
• Stray-light suppression elements in EUV metrology tools (as pre-filter or relay optics)
• Calibration reference lenses in NIST-traceable radiometric measurement setups
• Space-qualified optical benches for UV astronomy payloads (e.g., Lyman-alpha imaging)

FAQ

Is the Meg1017 lens suitable for 193 nm ArF excimer laser use?
Yes. All Meg1017 lenses are fabricated from low-OH fused silica with certified transmission >82% at 193 nm (10 mm thickness) and laser-induced damage threshold (LIDT) >5 J/cm² at 193 nm, 10 ns pulse width, 10 Hz repetition rate.
Do you provide interferometric surface maps for individual lenses?
Yes. Upon request, MiXran supplies ZYGO-compatible .ZRD files or ASCII point-cloud data for each lens, including PV and RMS surface error metrics referenced to best-fit sphere.
Can I order custom diameters or focal lengths outside the listed GL28-xxx series?
Yes. MiXran offers custom fabrication under NDA, including non-standard diameters (Ø5–150 mm), aspheric variants, and ion-beam figured surfaces with sub-nanometer figure error control.
What is the lead time for coated versions?
Standard broadband UV AR coating adds 12–15 business days; custom multi-layer coatings (e.g., V-coat at 193 nm) require 20–25 business days due to chamber scheduling and environmental stabilization protocols.
Are mounting adapters or kinematic cells available?
Yes. MiXran stocks SM1-threaded lens retainers, kinematic tip/tilt mounts (K10CR1), and vacuum-compatible lens cells (VRC2/M) engineered for thermal drift compensation in UHV environments.