MiXran Meg1077 High-Precision Fused Silica Double-Sided Optical Flat

Overview

The MiXran Meg1077 is a high-precision double-sided optical flat fabricated from synthetic fused silica (SiO₂), engineered for demanding interferometric calibration, wavefront reference, and optical system alignment applications. Its ultra-low thermal expansion coefficient (~0.55 × 10⁻⁶ /°C), exceptional transmission across UV–VIS–NIR (185–2100 nm), and intrinsic homogeneity make it ideal for use as a reference standard in laser cavity alignment, gravitational wave detector metrology, null testing of aspheric optics, and precision surface figure verification. Each Meg1077 flat undergoes full-aperture interferometric certification using a certified reference interferometer traceable to NIST standards, with surface flatness verified at the He–Ne wavelength (633 nm). The dual polished surfaces are manufactured to meet stringent parallelism tolerances—down to <1 arcsecond—ensuring minimal beam deviation and high-fidelity phase comparison in Michelson, Twyman–Green, or Fizeau interferometric configurations.

Key Features

• Fused silica substrate with ≤10 ppb metallic impurity content, minimizing UV absorption and fluorescence
• Double-sided precision polishing achieving λ/20 or λ/10 surface flatness (RMS) at 633 nm, certified per ISO 10110-7
• Parallelism control options: <1″, <2″, <5″, or <2′ (measured via autocollimation and compensated interferometry)
• Surface quality rated to 10–5 scratch-dig per MIL-PRF-13830B, validated under 100× dark-field inspection
• Thermal annealing cycle post-polish to relieve subsurface stress and ensure long-term dimensional stability
• Custom thickness tolerance: ±1 mm (for diameters ≤101.6 mm) or ±2 mm (for ≥152.4 mm), optimized for mechanical mounting rigidity and thermal mass

Sample Compatibility & Compliance

The Meg1077 optical flat is compatible with all major commercial interferometers—including Zygo GPI, 4D AccuFiz, and Veeco NT-series—as well as custom-built null-test setups. Its fused silica composition complies with ASTM F795 (Standard Specification for Fused Silica Optical Components) and meets material requirements for Class 100 cleanroom handling per ISO 14644-1. All units are supplied with individual calibration certificates documenting measured surface figure (Zernike coefficients up to Z₃₆), peak-to-valley (PV) and root-mean-square (RMS) deviations, and parallelism vector magnitude and orientation. Traceability is maintained to NIST SRM 2085 (optical flat reference standard) and supported by uncertainty budgets compliant with ISO/IEC 17025:2017.

Software & Data Management

Each Meg1077 flat is delivered with a digital calibration report in PDF and ASCII formats, containing full interferogram metadata (exposure time, camera gain, vibration compensation status) and analysis parameters (apodization, filtering, Zernike fitting order). Raw .mat or .tif interferogram files are optionally available upon request for integration into proprietary QA/QC workflows. Calibration data conforms to ASME B89.3.3M-2020 for optical flat verification and supports audit-ready documentation for GLP and GMP environments, including FDA 21 CFR Part 11–compliant electronic signatures when paired with validated laboratory information management systems (LIMS).

Applications

• Primary reference standard for calibrating optical shop interferometers and verifying test plate accuracy
• Null testing of concave/convex spherical and aspheric mirrors using computer-generated holograms (CGHs)
• Laser resonator alignment and cavity mode profiling in ultra-stable frequency reference systems
• Surface figure validation of EUV lithography optics and synchrotron beamline components
• Gravitational wave interferometer arm cavity mirror flatness monitoring (e.g., LIGO-style thermal noise characterization)
• High-resolution microtopography mapping via white-light scanning interferometry (WLSI) reference calibration

FAQ

What surface flatness specification is guaranteed—and how is it verified?
Each Meg1077 flat is certified to either λ/20 or λ/10 PV flatness at 633 nm using a calibrated Fizeau interferometer. Certification includes full-aperture Zernike decomposition and uncertainty quantification per ISO/IEC 17025.
Can I specify custom coatings—for example, V-coating at 1064 nm or broadband AR from 400–1100 nm?
Yes. Optional ion-beam-sputtered (IBS) anti-reflection or high-reflection coatings are available; lead times increase by 3–4 weeks and require separate quoting.
Is the parallelism tolerance measured between the two functional surfaces—or between one surface and the mechanical back?
Parallelism is defined as the angular deviation between the two optically polished surfaces, measured via compensated autocollimation and confirmed interferometrically.
Do you provide mounting fixtures or kinematic cells optimized for Meg1077 flats?
Standard kinematic mounts (e.g., 3-point flexure cells with low-stress contact geometry) are available as optional accessories; custom designs require mechanical drawing submission and NDA execution.
Are calibration certificates valid for international accreditation—e.g., UKAS or DAkkS recognition?
Certificates are issued by an ILAC-MRA signatory lab; direct UKAS/DAkkS endorsement requires end-user-initiated on-site assessment and cannot be pre-validated by MiXran.