MiXran Meg1090 Fused Silica Single-Sided Optical Flat

Overview

The MiXran Meg1090 is a precision-engineered fused silica single-sided optical flat designed for high-accuracy interferometric calibration, wavefront reference applications, and optical system alignment in metrology-grade laboratories. Fabricated from synthetic fused quartz (SiO₂), it exhibits exceptional thermal stability (CTE ≈ 0.55 × 10⁻⁶ /°C), low birefringence (<5 nm/cm), and high transmission across the UV-VIS-NIR spectrum (185–2100 nm). Its single-sided specification ensures one optically finished surface—polished to either λ/20 or λ/10 surface figure accuracy referenced to a HeNe laser wavelength of 633 nm—while the reverse side is ground and lapped for mechanical stability and mounting compatibility. Unlike double-sided flats, the Meg1090 eliminates ambiguity in orientation during setup and reduces potential for ghost reflections in null testing configurations. Its monolithic structure and absence of cemented interfaces guarantee long-term dimensional integrity under vacuum, temperature cycling, and cleanroom environments.

Key Features

• Fused silica substrate with certified homogeneity (Δn < 1 × 10⁻⁶) and ultra-low fluorescence for UV-sensitive applications
• Primary surface polished to λ/20 or λ/10 PV (peak-to-valley) surface figure at 633 nm, verified via phase-shifting interferometry (PSI) per ISO 10110-5
• Surface quality rated to 20–10 scratch-dig per MIL-PRF-13830B, ensuring minimal scatter for low-noise interferograms
• Thick-edge design with controlled thickness tolerance (±1 mm up to 101.6 mm; ±2 mm for larger diameters) to support stable kinematic mounting
• Optional broadband anti-reflection (BBAR) coating (R<0.25% @ 400–700 nm) available upon request for reduced etalon effects
• Traceable calibration certificate included, documenting surface figure map, RMS deviation, and interferometric test conditions

Sample Compatibility & Compliance

The Meg1090 is compatible with all standard optical interferometers including Zygo GPI, 4D AccuFiz, and Veeco NT-series systems. It meets dimensional and surface specification requirements for ISO 10110-7 (surface form tolerances), DIN 3140 (optical flat classification), and JIS B 7151 (Japanese industrial standard for optical components). Each unit undergoes 100% inspection in a Class 1000 cleanroom environment and is packaged in inert, static-dissipative containers compliant with IEST-STD-CC1246D. For regulated environments—including ISO/IEC 17025-accredited calibration labs—the Meg1090 supports full traceability to NIST-traceable interferometric standards and can be integrated into GLP/GMP documentation workflows.

Software & Data Management

While the Meg1090 itself is a passive optical component, its performance validation relies on industry-standard interferometric software platforms such as MetroPro (Zygo), QED Metrology Suite, and OpenFringe. All delivered units include ASCII-formatted Zernike coefficient files (.zmx or .dat) and full-field wrapped/unwrapped phase maps in TIFF format (16-bit, georeferenced). Raw interferogram data is archived with metadata including environmental conditions (temperature, humidity, air pressure), vibration isolation status, and instrument serial number—enabling audit-ready data lineage per FDA 21 CFR Part 11 requirements when used within validated optical test procedures.

Applications

• Null testing of spherical and aspheric mirrors using the three-flat method or computer-generated hologram (CGH) referencing
• Calibration of optical profilers, white-light interferometers, and confocal microscopes
• Reference surface for vacuum chamber window flatness verification in EUV lithography tool qualification
• Wavefront reference in adaptive optics testbeds and astronomical instrumentation alignment
• Substrate for deposition of ultra-stable thin-film filters where substrate flatness directly impacts spectral bandwidth and out-of-band rejection
• Alignment fiducial in high-precision optomechanical assemblies requiring sub-microradian angular repeatability

FAQ

What does “single-sided” mean in this context?

It indicates that only one surface is optically finished to metrology-grade flatness; the opposite side is mechanically processed for stability—not for optical use.
Is the λ/20 specification guaranteed over the entire clear aperture?

Yes. The specified surface figure applies to the full clear aperture (CA), defined as ≥90% of the nominal diameter, and is verified via full-aperture PSI with pixel resolution ≤10 µm.
Can the Meg1090 be used in vacuum or UHV environments?

Yes. Fused silica’s outgassing rate (<1 × 10⁻¹⁰ Torr·L/s·cm² per ASTM E595) and zero binder content make it suitable for UHV applications up to 10⁻¹¹ Torr.
Do you offer custom thickness or chamfer specifications?

Yes. Custom edge geometry (e.g., 0.5 mm × 45° chamfer), thickness control tighter than ±0.2 mm, and non-standard diameters are available under engineering review and NRE agreement.
How is surface cleanliness verified prior to shipment?

Each unit undergoes particle count verification per ISO 14644-1 Class 5 (≤3,520 particles ≥0.5 µm/m³) using dark-field microscopy and is sealed in nitrogen-purged, particulate-filtered packaging.