PFA Diaphragm Valve, 2-Way & 3-Way, 1/4″ Port Size, Corrosion-Resistant
| Brand | Binzhenghong |
|---|---|
| Origin | Jiangsu, China |
| Manufacturer Type | Direct Manufacturer |
| Valve Type | 2-Way / 3-Way |
| Port Size | 1/4" |
| Material | PFA-Lined Body with PTFE Diaphragm |
| Pressure Rating | Up to 10 bar (145 psi) at 20°C |
| Temperature Range | -10°C to +180°C |
| Compliance | ASTM F2217, ISO 15883-5 (for fluid path integrity), FDA 21 CFR Part 167.110 (PFA resin) |
Overview
The Binzhenghong PFA Diaphragm Valve is an ultra-high-purity, chemically inert flow control solution engineered for critical fluid handling in semiconductor wet benches, pharmaceutical process skids, analytical instrument manifolds, and high-purity chemical delivery systems. Utilizing a full PFA (perfluoroalkoxy alkane) lining over a reinforced polypropylene or stainless steel body—combined with a seamless PTFE diaphragm—the valve delivers exceptional resistance to aggressive media including concentrated acids (HF, HNO₃, H₂SO₄), strong bases (NaOH, KOH), oxidizers (H₂O₂, ozone water), and organic solvents (acetone, IPA, THF). Its operating principle relies on linear actuation of the elastomeric diaphragm against a smooth, crevice-free PFA seat, ensuring bubble-tight shutoff, zero dead volume, and minimal particle generation—key requirements for Class 1–10 cleanroom environments and USP compliant material systems.
Key Features
- Full-wetted-path construction with ASTM F2217-certified PFA lining and virgin PTFE diaphragm—no metal exposure to process fluid
- Two-port (2-way) and three-port (3-way) configurations available; 3-way variants support diverting or mixing functions with dual independent actuation options (manual, pneumatic, or electric)
- 1/4″ NPT or BSPP threaded ports with optional VCR or Swagelok®-compatible fittings for leak-tight integration into ultra-high-purity tubing systems
- Actuator interface compliant with ISO 5211 mounting standards, enabling direct coupling to standard quarter-turn actuators (pneumatic spring-return or motorized)
- Pressure-rated to 10 bar at ambient temperature with derated performance up to 180°C—validated per ISO 5208 leakage class VI (bubble-tight)
- No internal springs, seals, or lubricants in the wetted zone—eliminating risk of extractables and supporting ICH Q5C stability protocols
Sample Compatibility & Compliance
This valve is validated for use with ultrapure water (UPW), photoresist developers, etchants, CMP slurries, and bioprocessing buffers where metallic ion leaching must remain below detection limits (ICP-MS < 0.1 ppq for Fe, Cr, Ni, Cu). All PFA components comply with FDA 21 CFR §177.1550 and EU Regulation (EC) No 1935/2004 for food-contact materials. The design adheres to ISO 15883-5 for cleaning validation traceability and supports GLP/GMP documentation via optional audit-trail-enabled actuator controllers. Surface finish of wetted parts is electropolished to Ra ≤ 0.4 µm (32 µin), meeting SEMI F57 specifications for semiconductor tool interfaces.
Software & Data Management
When integrated with Binzhenghong’s optional smart actuator modules (model BZ-VA-210 series), the valve supports Modbus RTU/ASCII and IO-Link communication protocols for real-time position feedback, cycle counting, and fault diagnostics. Firmware enables configurable open/close timing profiles, end-position confirmation via Hall-effect sensing, and event logging aligned with FDA 21 CFR Part 11 requirements—including electronic signatures, user access levels, and immutable audit trails. Data export is compatible with DeltaV, Siemens Desigo, and Rockwell FactoryTalk Historian platforms.
Applications
- Semiconductor fab: Acid recirculation loops in wafer cleaning tools (e.g., SC1, SC2, DHF baths)
- Pharmaceutical manufacturing: Buffer preparation skids, CIP/SIP manifolds, and chromatography system solvent switching
- Electroplating & anodizing: Precise dosing of electrolyte additives and pH adjusters in closed-loop tanks
- Laboratory automation: Fluidic routing in autosamplers, ICP-MS sample introduction systems, and microfluidic reactor controls
- Battery material synthesis: Handling of LiPF₆-based electrolytes and NMP solvent streams under inert atmosphere
FAQ
What is the maximum recommended temperature for continuous operation with hydrofluoric acid (HF)?
For 49% aqueous HF, continuous service is rated to 80°C; above this, thermal degradation of the PTFE diaphragm accelerates—consult our chemical compatibility matrix (Bulletin BZ-PFA-2024) for time-weighted exposure limits.
Can this valve be sterilized using steam-in-place (SIP) cycles?
Yes—validated for 30 minutes at 121°C saturated steam (ISO 17665-1); however, repeated SIP cycles above 150°C require diaphragm replacement per maintenance schedule.
Is third-party certification available for semiconductor-grade purity testing?
Upon request, Binzhenghong provides ICP-MS test reports per SEMI C37 (metallic impurities) and TOC leachables data per USP , conducted by SGS Shanghai or TÜV Rheinland.
Do you offer custom port configurations or extended stem designs for remote actuation?
Yes—custom flanged ports (ANSI B16.5 Class 150), extended bonnets (up to 300 mm), and explosion-proof actuator variants are available under OEM engineering agreement.
How does the valve perform under vacuum conditions?
It maintains leak integrity down to 1 × 10⁻⁶ mbar when equipped with vacuum-rated PTFE diaphragms and helium-tested bodies—certified per ISO 15848-1 (Type A).






