Sensofar S neox Five Axis 5-Axis Full-Field 3D Optical Profilometer

Overview

The Sensofar S neox Five Axis is a high-precision, non-contact 3D optical profilometer engineered for full-surface topographic characterization of complex geometries. It integrates white-light interferometry (WLI), confocal chromatic aberration, and multi-focus stacking methodologies within a unified platform—enabling simultaneous acquisition of sub-nanometer vertical resolution (≤0.1 nm RMS noise in PSI mode) and high lateral resolution (down to 0.28 µm at 100× magnification). Unlike conventional 3-axis profilometers, the S neox Five Axis incorporates two motorized rotational axes (A and B) that enable dynamic reorientation of the sample relative to the optical axis. This architecture eliminates shadowing artifacts on steep-sided features (>90° slopes), undercuts, and freeform surfaces—making it uniquely suited for metrology in micro-optics, precision molds, semiconductor packaging, medical implants, and additive-manufactured components where geometric fidelity and surface integrity are subject to ISO 25178, ASME B46.1, and ISO 4287 compliance requirements.

Key Features

• 5-axis synchronized motion control: A-axis provides continuous 360° rotation with <1 arcsecond repeatability; B-axis offers tilt range from –30° to +110° with 0.5 arcminute positioning accuracy and integrated limit switches.
• Dual-mode optical engine: Simultaneous support for phase-shifting interferometry (PSI) for ultra-smooth surfaces (Ra < 0.5 nm), vertical scanning interferometry (VSI) for moderate slopes, and confocal imaging for high-reflectivity or highly textured surfaces (e.g., polished steel, diamond-turned optics).
• Multi-focus stacking capability: Enables rapid profiling of surfaces with large local gradients (up to 70° slope) without manual focus adjustment—ideal for structured light diffusers, MEMS actuators, and turbine blade leading edges.
• Servo-controlled System3R clamping system: Modular fixture interface supporting flat chucks, collet-based rotational holders (15 interchangeable collets available), and custom kinematic mounts for repeatable part alignment.
• Uniform LED ring illumination: Optimized spectral output and angular distribution ensure consistent signal-to-noise ratio across confocal and multi-focus acquisitions—critical for quantitative reflectance-independent height reconstruction.
• Integrated calibration suite: Includes certified NIST-traceable step-height standards, flatness reference mirrors, and roughness artifacts compliant with ISO 5436-1 for in-situ system verification.

Sample Compatibility & Compliance

The S neox Five Axis accommodates samples up to Ø200 mm × 50 mm height (standard configuration), with extended stages available for larger substrates. Its non-contact nature ensures measurement integrity on fragile, soft, or temperature-sensitive materials—including polymer films, photoresists, thin-film solar cells, and biological scaffolds. All measurement data are generated in accordance with ISO/IEC 17025-accredited laboratory practices when used with SensoFIVE’s optional GLP/GMP mode. Audit trails, electronic signatures, and user-access controls comply with FDA 21 CFR Part 11 requirements for regulated environments. Roughness parameters (Sa, Sq, Sz, Sdr, etc.) are calculated per ISO 25178-2:2012 and ASME B46.1–2022, with traceability documented to NPL, NIST, and PTB primary standards.

Software & Data Management

SensoFIVE v6.x serves as the unified analytical environment for acquisition, reconstruction, and reporting. It supports automated multi-position measurement routines via graphical path planning—allowing users to define regions of interest (ROIs), assign measurement modes per zone, and execute batch sequences with one-click initiation. The software includes advanced stitching algorithms that align and fuse datasets acquired from multiple orientations using fiducial markers or edge-matching heuristics. Export formats include ISO-standardized .STL, .PLY, and .OPJ files, alongside metrology-ready .CSV and .XLSX reports containing full uncertainty budgets (GUM-compliant). Raw interferograms and confocal intensity stacks are stored in lossless TIFF format with embedded metadata (wavelength, magnification, scan speed, environmental conditions).

Applications

• Micro-optics & diffractive elements: Characterization of aspheric lenses, GRIN profiles, and metasurface topographies requiring <10 nm form error quantification.
• Precision tooling & injection molds: Verification of cavity geometry, draft angles, gate locations, and surface finish after EDM or polishing—ensuring conformance to automotive and aerospace PPAP documentation.
• Medical device manufacturing: 3D assessment of dental implant threads, stent strut geometry, and porous scaffold architectures per ASTM F3122 and ISO 13314.
• Wafer-level packaging: Inspection of redistribution layers (RDL), microbumps, and TSV openings with sub-micron lateral registration accuracy.
• Additive manufacturing: In-process validation of overhang angles, stair-stepping artifacts, and powder-bed fusion surface anomalies across curved build plates.

FAQ

What surface roughness ranges can the S neox Five Axis measure?
It measures Ra values from ~0.05 nm (mirror-polished silicon wafers) to >50 µm (sandblasted metal)—with validated performance across ISO 25178 roughness classes Sa through Sc.
Does the system support automated stitching of multi-angle measurements?
Yes. SensoFIVE performs automatic alignment and fusion of datasets acquired at different A/B-axis orientations using both feature-based and intensity-based registration algorithms.
Can the instrument be integrated into a cleanroom or production line environment?
The system is compatible with Class 1000 cleanrooms (ISO 6); optional vibration-isolation tables and ESD-safe enclosures are available for factory-floor deployment.
Is calibration traceable to international standards?
All calibration artifacts are certified by accredited labs against NIST SRM 2130a (step height), PTB B2 (roughness), and NPL P11 (flatness), with full uncertainty budgets provided.
What level of training and technical support is included?
Sensofar provides on-site installation qualification (IQ), operational qualification (OQ), and user training aligned with ISO/IEC 17025 competency frameworks—including SOP development and method validation assistance.