Tongzhou Weipu SCr Recirculating Chiller for Semiconductor Dicing Saws
| Brand | Tongzhou Weipu |
|---|---|
| Origin | Beijing, China |
| Manufacturer Type | Direct Manufacturer |
| Product Category | Domestic |
| Model | SCr |
| Pricing | Upon Request |
| Cooling Architecture | Dual-Temperature, Dual-Control Single-System |
| Spindle Circuit | Closed-Loop, ±0.1°C Stability |
| Dicing Circuit | Recirculating with Auto-Replenishment, ±0.5°C Stability |
| Compliance | SEMI-compliant |
| Configurations | Single-, Dual-, and Multi-Channel Options |
| Control System | Proprietary Temperature Management Platform |
| Footprint | Space-Optimized Industrial Design |
Overview
The Tongzhou Weipu SCr Recirculating Chiller is an engineered thermal management solution purpose-built for semiconductor dicing saws and other precision wafer processing tools requiring stable, independent coolant delivery to multiple process zones. Operating on the principle of single-system dual-temperature recirculation, the SCr integrates two thermally isolated cooling circuits within one compact chassis—enabling simultaneous, independent temperature control at the spindle assembly and the dicing head. This architecture addresses a critical requirement in advanced singulation processes: minimizing thermal drift at the spindle (where mechanical stability dictates sub-0.2°C tolerance) while accommodating higher thermal load variability at the cutting interface. Unlike generic industrial chillers, the SCr adheres to the thermal performance, material compatibility, and reliability benchmarks defined in SEMI F57 (Specification for Recirculating Coolants for Semiconductor Manufacturing Equipment) and SEMI S2 (Safety Guidelines), making it suitable for integration into front-end lithography support systems, back-end packaging lines, and high-precision die separation platforms.
Key Features
- Dual-circuit thermal architecture: Independent closed-loop control for spindle cooling (±0.1°C stability) and open-loop recirculating dicing circuit (±0.5°C stability with auto-replenishment)
- Proprietary PID-based temperature regulation system with adaptive gain tuning, minimizing overshoot during setpoint transitions
- Corrosion-resistant fluid path constructed from 316 stainless steel, EPDM-free fluoropolymer tubing, and semiconductor-grade ethylene glycol/water coolant compatibility
- Integrated level-sensing reservoir with ultrasonic fill-level monitoring and fail-safe pump interlock
- Modular channel configuration: Field-upgradable from single-channel base unit to dual- or multi-channel variants without hardware replacement
- IP54-rated enclosure with vibration-damped mounting feet and low-noise centrifugal circulation pumps (<58 dB(A) at 1 m)
Sample Compatibility & Compliance
The SCr is designed exclusively for use with semiconductor dicing equipment—including diamond blade saws, laser dicing platforms, and plasma dicing systems—where coolant purity, thermal inertia, and long-term operational continuity are non-negotiable. It supports standard coolant formulations meeting SEMI C32 (Coolant Purity Specifications) and is validated for continuous operation under Class 1000 cleanroom ambient conditions (ISO 14644-1). All wetted materials comply with SEMI F19 (Materials Compatibility Requirements) and have undergone extractables testing per USP . The unit meets CE marking requirements for electromagnetic compatibility (EN 61000-6-2/6-4) and low-voltage safety (EN 61000-1-2), and its control firmware supports audit-ready event logging required under ISO 9001:2015 and IATF 16949 quality management systems.
Software & Data Management
The SCr operates via an embedded ARM Cortex-M7 controller running real-time deterministic firmware. Local HMI includes a 5.7″ resistive touchscreen with multilingual UI (English, Japanese, Korean, Simplified Chinese), configurable alarm thresholds, and password-protected parameter access levels (Operator / Technician / Administrator). Remote monitoring is supported through Modbus TCP/IP and EtherNet/IP protocols, enabling seamless integration into factory-wide SCADA or MES platforms. All temperature setpoints, actual readings, flow rates, reservoir levels, and fault logs are timestamped and stored onboard for ≥30 days. Optional data export via USB-C supports CSV-formatted reports compatible with JMP, Minitab, and Python-based SPC analysis workflows. Audit trail functionality satisfies FDA 21 CFR Part 11 requirements when deployed in regulated packaging environments.
Applications
- Thermal stabilization of high-RPM dicing saw spindles during ultra-thin wafer processing (≤50 µm)
- Coolant supply to laser-assisted dicing (LAD) nozzles requiring precise thermal gradient control
- Supporting plasma dicing tools where coolant temperature directly influences etch uniformity and sidewall morphology
- Integration with automated tape-and-reel handlers requiring synchronized coolant delivery across multiple stations
- Backup thermal conditioning for CMP slurry chillers in hybrid packaging lines
FAQ
Does the SCr support integration with third-party dicing equipment OEMs?
Yes—the SCr provides standardized analog (4–20 mA) and digital (Modbus RTU over RS-485) I/O interfaces, and has been successfully commissioned with DISCO, K&S, Tokyo Seimitsu, and BESI platforms.
What is the maximum allowable coolant conductivity for compliant operation?
The system maintains full specification compliance with coolant resistivity ≥1 MΩ·cm (conductivity ≤1 µS/cm), verified using inline conductivity sensors calibrated per ASTM D1125.
Can the SCr operate continuously for 7×24 production cycles?
Yes—designed for >10,000 hours MTBF, the SCr incorporates redundant pressure switches, dual-stage filtration (5 µm + 1 µm), and predictive maintenance alerts based on cumulative pump runtime and thermal cycling history.
