Zhuochi SK3-9-12-10 Triple-Zone Vacuum & Atmosphere Tube Furnace
| Brand | Zhuochi |
|---|---|
| Origin | Zhejiang, China |
| Model | SK3-9-12-10 |
| Max Temperature | 1300°C |
| Temp Control Accuracy | ±1°C |
| Max Power | 9 kW |
| Heating Rate (to max temp) | 50°C/min |
| Heating Method | Resistance Wire (HRE Alloy) |
| Internal Dimensions | 100 mm Ø × 1400 mm L |
| Nominal Volume | 140 L |
| Tube ID/OD | 92 mm / 100 mm |
| Heating Zone Length | 1000 mm (330 + 340 + 330 mm) |
| Vacuum Level | –0.1 MPa (with rotary vane pump) |
| Atmosphere Compatibility | N₂, Ar, H₂, forming gas |
| Thermocouple Type | K-type |
| Insulation Material | Polycrystalline Alumina Ceramic Fiber |
| Controller | Yudian PID Intelligent Meter with 30-segment programmable ramp-soak profile |
| Compliance | Designed for GLP-compliant lab environments |
Overview
The Zhuochi SK3-9-12-10 Triple-Zone Vacuum & Atmosphere Tube Furnace is an engineered solution for high-precision thermal processing under controlled gaseous or vacuum conditions. Designed for materials synthesis, annealing, sintering, and CVD precursor decomposition, it employs a three-independent-zone resistive heating architecture—each zone (330 mm + 340 mm + 330 mm) individually regulated via K-type thermocouples and SCR/SSR-controlled HRE resistance wire elements. The furnace achieves stable operation up to 1300°C (short-term), with continuous working temperature rated at 1100°C. Its core measurement principle relies on closed-loop PID feedback control with auto-tuning capability, ensuring thermal uniformity ≤±1°C across the 1400 mm quartz tube length (Φ92 mm ID / Φ100 mm OD). The polycrystalline alumina ceramic fiber insulation—fabricated via wet-vacuum filtration—delivers low thermal mass (50% energy reduction during cyclic operation.
Key Features
- Triple independent heating zones with fully decoupled PID control for axial thermal gradient programming (e.g., hot-zone diffusion, cold-wall deposition)
- High-purity fused quartz tube (99.99% SiO₂) with precise dimensional tolerance (±0.2 mm ID/OD), certified for ≤1200°C continuous use and compatible with aggressive atmospheres including H₂ and NH₃
- Integrated 316L stainless steel flange assembly featuring dual vacuum-tight ports (KF25 or CF35 configurable), digital vacuum gauge interface, and gas inlet/outlet with Swagelok-compatible VCR fittings
- Yudian AI-808P intelligent controller with 30-segment programmable ramp-soak profiles, real-time data logging (via RS485/Modbus), and optional PC software for CSV export and time-stamped event tracking
- Robust mechanical design: CNC-machined cold-rolled steel enclosure with epoxy-polyester powder coating, front-accessible wiring ducts, and modular safety interlocks
- Comprehensive protection suite: overtemperature cutoff (hardware + software), thermocouple break detection, phase-loss monitoring, and integrated 63A air circuit breaker per IEC 60947-2
Sample Compatibility & Compliance
The furnace accommodates cylindrical samples up to 90 mm in diameter and 1200 mm in length within the central 1400 mm quartz tube. It supports inert (Ar, N₂), reducing (H₂, 5% H₂/N₂), and reactive (NH₃, CO) atmospheres at pressures ranging from 10⁻³ mbar (with turbomolecular pump upgrade) to 2 bar (gauge). Vacuum integrity is verified per ASTM E595 for outgassing compliance, while thermal stability meets ISO 8573-1 Class 4 for particulate control in cleanroom-adjacent installations. The system is configured for GLP/GMP-aligned workflows: all temperature setpoints, ramp rates, hold durations, and alarm events are timestamped and stored locally with write-protection—enabling full traceability required under FDA 21 CFR Part 11 when paired with validated software.
Software & Data Management
The standard Yudian controller provides Modbus RTU communication (RS485) for integration into LabView, Python (PyModbus), or SCADA platforms. Optional PC software enables real-time graphing of all three zone temperatures, vacuum pressure (via analog input), and gas flow (with mass flow controller integration). Data is saved in UTC-referenced CSV format with SHA-256 checksums; historical logs persist for ≥12 months without overwrite. Audit trails record operator login/logout, parameter changes, and emergency stops—meeting ISO/IEC 17025 clause 7.7.1.2 requirements for measurement uncertainty documentation.
Applications
- Graphene and 2D material growth via atmospheric-pressure or low-pressure CVD
- Thermal annealing of semiconductor wafers (SiC, GaN) under nitrogen or argon ambients
- Catalyst activation and regeneration studies requiring precise redox atmosphere control
- Solid-state battery cathode material synthesis (e.g., LiCoO₂, NMC) with oxygen partial pressure modulation
- Pre-sintering of ceramic green bodies prior to HIP or SPS consolidation
- Thermogravimetric analysis (TGA) coupling with FTIR or QMS for evolved gas analysis
FAQ
What vacuum level can be achieved with the standard configuration?
With the included 2L/s rotary vane pump, the system reaches –0.1 MPa (100 mbar absolute) in ≤15 minutes. For <10⁻² mbar operation, a diffusion or turbomolecular pump package is available as an option.
Is the quartz tube resistant to hydrofluoric acid vapor?
No—standard fused quartz is etched by HF. For HF-containing processes, optional alumina or silicon carbide tubes are recommended.
Can the furnace operate under positive pressure?
Yes—rated for continuous operation up to 2 bar(g) with reinforced flanges and pressure-relief valve integration (optional accessory).
Does the controller support remote access via Ethernet?
The base model uses RS485. An Ethernet-to-Modbus gateway or upgraded controller with built-in TCP/IP is available for networked lab infrastructure.
What maintenance intervals are recommended for long-term reliability?
Quartz tube inspection every 200 operating hours; O-ring replacement every 6 months or after 50 thermal cycles above 1000°C; thermocouple calibration annually per ISO/IEC 17025.
