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| Brand | Thorlabs |
|---|---|
| Model | MAX601D |
| Type | Manual 6-Axis Nanopositioning Flexure Stage |
| Travel (X/Y/Z) | 4 mm |
| Travel (θx/θy/θz) | 6° (105 mrad) |
| Fine Adjustment Range (X/Y/Z) | 300 µm |
| Fine Adjustment Range (θx/θy/θz) | 18 arcmin (5.2 mrad) |
| Coarse Adjustment Resolution | 5 µm |
| Fine Adjustment Resolution | 0.5 µm |
| Maximum Load Capacity | 1 kg |
| Platform Height | 112.5 mm |
| Stiffness (X/Z) | 1 N/µm |
| Stiffness (Y) | 0.5 N/µm |
| Resonant Frequency | >130 Hz (±10%) |
| Common Rotation Pivot | Yes |
| Coupled Actuator Mounting | Yes |
| Compatibility | DRV3 Differential Micrometers (pre-installed) |
| Modular Drive Interface | Yes |
| Brand | TMC |
|---|---|
| Origin | USA |
| Model | STACIS III |
| Active DOF | 6 |
| Active Bandwidth | 0.6–150 Hz |
| Passive Natural Frequency | 18 Hz (vertical & horizontal) |
| Effective Active Resonant Frequency | 0.5 Hz |
| Isolation at 1 Hz | 40–70% |
| Isolation ≥2 Hz | ≥90% |
| Settling Time (10 lb step, 10 | 1): 0.3 sec |
| Internal Noise | <0.1 nm RMS |
| Load Range per Isolator | Low (181–499 kg), Med (408–953 kg), Hi (862–2041 kg) |
| Static Lift Capacity | 4090 kg |
| Stiffness (Med isolator, 454 kg) | 73 × 10⁵ N/m |
| Magnetic Emission (<102 mm) | <0.02 µG broadband RMS |
| Environmental Compliance | CE, RoHS |
| Operating Temp | 10–32 °C |
| Humidity | 30–60% RH |
| Power | 100–240 VAC, 50/60 Hz, <600 W |
| Isolator Dimensions | 300 × 320 × 275 mm |
| Isolator Weight | 34 kg |
| DC-2020 Controller | Dual-core 150/75 MHz, 10 kHz sampling, 16 AI/AO channels, Ethernet + USB + RS-232, embedded GUI |
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