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| Brand | Vistron |
|---|---|
| Manufacturer | Laser oFab GmbH |
| Origin | Germany |
| Model | Laser oFab EUV Tube |
| EUV Peak Wavelength | 13.5 nm |
| Spectral Bandwidth (FWHM) | ~1 nm |
| Power Output (2π, 2% BW @ 13.5 nm) | ≤20 µW |
| Long-Term Intensity Stability (72 h) | <1% RMS |
| Source Size (FWHM) | Adjustable from <10 µm to ≥100 µm |
| Vacuum Interface | DN 16 CF flange |
| Emission Cone | 30° full angle, centered on flange axis |
| Target Material | Solid-state (L2,3-transition optimized) |
| Operating Voltage/Current | Software-controlled |
| Compliance | Designed for UHV-compatible metrology environments |
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