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| Brand | VC Plasma |
|---|---|
| Origin | Guangdong, China |
| Model | VP-C120 |
| RF Power Supply | 1000 W / 500 W with Auto-Matching Capacitive RF Generator |
| Rated Power | ≤5 kW |
| Chamber Vacuum Level | ≤6 Pa |
| Operating Temperature | <35 °C (process-dependent) |
| Chamber Rack Modularity | >100 configurable cavity fixture configurations |
| Gas Flow Control | Integrated Mass Flow Controllers (MFCs) for multi-gas compatibility (O₂, Ar, N₂, CF₄, air) |
| Control System | Industrial PLC + HMI touchscreen interface with dual-mode operation (manual/automatic), interlocked mode switching, and role-based user access control |
| Dimensions (W×D×H) | 1030 mm × 1281 mm × 1632 mm (powder-coated steel enclosure) |
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