Step Height Measurement Instrument
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| Brand | ZEPTOOLS |
|---|---|
| Origin | Guangdong, China |
| Manufacturer Type | Direct Manufacturer |
| Model | JS10C |
| Measurement Principle | Inductive |
| Vertical Measurement Range | 160 µm |
| Probe Tip Radius | 2 µm / 1 µm (interchangeable) |
| Normal Force Range | 0.5–50 mg |
| Scan Length | 55 mm |
| Step Height Repeatability | < 0.5 nm |
| Vertical Resolution | 0.05 nm (full-scale) |
| Maximum Sample Size | 150 mm (Ø) |
| Scan Resolution | 10 nm |
| Scan Speed | 5–1000 µm/s |
| Max Data Points per Scan | 2,000,000 |
| Software Functions | Step Height, Surface Roughness (Ra, Rq, Rz, etc.), Flatness, Warp Measurement |
| Brand | ZEPTOOLS |
|---|---|
| Origin | Anhui, China |
| Manufacturer Type | Authorized Distributor |
| Country of Origin | China |
| Model | JS2000B |
| Price | Upon Request |
| Positioning Accuracy | Better than ±10 µm |
| Standard Probe Tip Radius | ≥2 µm (60° included angle) |
| Maximum Scan Length | ≤55 mm |
| Step Height Repeatability | ≤0.5 nm |
| Vertical Resolution | 0.05 nm |
| Maximum Sample Size Compatibility | 6-inch and 8-inch wafers |
| Maximum Wafer Thickness | ≤10 mm |
| Wafer Material Compatibility | Silicon, Lithium Tantalate, Glass (opaque, translucent, and transparent) |
| Probe Normal Force Range | 0.5 mg–50 mg |
| Maximum Step Height Range | ≤80 µm |
| Image Recognition System Accuracy | Better than ±10 µm |
| Mechanical Stability (Marathon Test) | >500 wafers |
| Throughput | ≥10 WPH (single-side measurement at ≥5 locations) |
| Brand | ZEPTOOLS |
|---|---|
| Model | JS2000C |
| Measurement Principle | Inductive |
| Vertical Measurement Range | 10 nm – 80 µm |
| Probe Tip Radius | 1 µm / 2 µm |
| Normal Force Range | 0.5–50 mg |
| Scan Length | ≤50 mm |
| Step Height Repeatability | <0.5 nm |
| Vertical Resolution | 0.05 nm |
| Wafer Compatibility | 150 mm (6″) and 200 mm (8″) |
| Maximum Wafer Thickness | 50 mm |
| Positioning Accuracy (Vision System) | ±10 µm |
| Mechanical Stability | >500 consecutive wafers in marathon testing |
| Throughput | ≥10 WPH (single-side, ≥5 measurement positions) |
| Brand | ZEPTOOLS |
|---|---|
| Origin | Anhui, China |
| Model | JS3000B |
| Positioning Accuracy | < ±10 µm |
| Probe Tip Radius | ≥2 µm (60° included angle, standard) |
| Probe Normal Force Range | 0.5–50 mg |
| Scan Length | ≤55 mm |
| Step Height Repeatability | ≤0.5 nm |
| Vertical Resolution | 0.05 nm |
| Maximum Step Height Range | ≤80 µm |
| Wafer Compatibility | 200 mm & 300 mm (thickness ≤10 mm |
| materials | Si, LiTaO₃, glass, opaque/semi-transparent/transparent substrates) |
| Image Recognition Localization Accuracy | < ±10 µm |
| Mechanical Stability | >500 wafers in continuous EFEM transfer test |
| Throughput | ≥10 WPH (single-side, ≥5 measurement sites) |