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ULVAC-Feins (Nanjing) Instruments Co., Ltd.

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BrandULVAC-PHI
OriginJapan
ModelPHI GENESIS 500
CategoryImported Instrument
Distribution StatusAuthorized Distributor
PricingUpon Request
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BrandULVAC-PHI
OriginJapan
ModelPHI ADEPT-1010
Instrument TypeQuadrupole
Primary Beam Energy Range0.25–11 keV
Mass Range1–340 amu
Distribution StatusAuthorized Distributor (Imported)
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BrandULVAC-PHI
OriginJapan
ModelPHI 710
TypeScanning Auger Electron Spectrometer (AES)
SEM Resolution≤3 nm
AES Spatial Resolution≤8 nm (@20 kV, 1 nA)
Analyzer GeometryCoaxial Cylindrical Mirror Analyzer (CMA)
Energy Resolution0.1% (high-resolution mode)
Beam Diameter20 nm (adjustable)
Ion Gun Sputtering Energy0.5 kV (standard configuration)
Software SuitePHI SmartSoft-AES & MultiPak
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