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| Brand | ULVAC-PHI |
|---|---|
| Origin | Japan |
| Model | PHI 710 |
| Type | Scanning Auger Electron Spectrometer (AES) |
| SEM Resolution | ≤3 nm |
| AES Spatial Resolution | ≤8 nm (@20 kV, 1 nA) |
| Analyzer Geometry | Coaxial Cylindrical Mirror Analyzer (CMA) |
| Energy Resolution | 0.1% (high-resolution mode) |
| Beam Diameter | 20 nm (adjustable) |
| Ion Gun Sputtering Energy | 0.5 kV (standard configuration) |
| Software Suite | PHI SmartSoft-AES & MultiPak |
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