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| Brand | KLA |
|---|---|
| Origin | USA |
| Model | R54 |
| Automation Level | Semi-Automatic |
| Resistivity Measurement Range | 1 mΩ/□ to 200 Ω/□ |
| Resistivity Measurement Accuracy | < 0.02% |
| Z-Travel Range | 15 mm |
| XY Stage Type | Motorized |
| Max Sample Height | 15 mm |
| Max Sample Weight | 2.5 kg |
| 4PP Measurement Repeatability | < 0.02% |
| EC Measurement Repeatability | < 0.2% |
| Compatible Sample Sizes | Up to 300 mm Ø or A4 (210 × 297 mm) |
| Probe Configurations | Customizable rectangular, linear, polar, and user-defined mapping patterns |
| Dual-Mode Operation | Four-Point Probe (4PP) and Non-Contact Eddy Current (EC) |
| Brand | KURASHIKI |
|---|---|
| Origin | Japan |
| Model | MT-0817 |
| Weight | ~560 kg |
| Acoustic Isolation Range | 16 Hz to 8 kHz |
| Application | Atomic Force Microscopy (AFM), Scanning Probe Microscopy (SPM), Laser Scanning Microscopy |
| Brand | HORIBA |
|---|---|
| Origin | France |
| Model | Smart SE |
| Measurement Speed | 5 s (typical), down to 1 s (max) |
| Wavelength Range | 450–1000 nm |
| Spot Sizes | 7 selectable configurations (e.g., 75 µm × 150 µm to 500 µm × 500 µm) |
| Software | DeltaPsi² v5.x (Windows-based) |
| Compliance | Designed for GLP/GMP-aligned workflows |
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