Ellipsometer
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Showing all 21 results
| Brand | Accurion |
|---|---|
| Origin | Germany |
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported |
| Model | EP4 |
| Pricing | Upon Request |
| Brand | Accurion |
|---|---|
| Origin | Germany |
| Model | Nanofilm_EP4 |
| Spectral Range | 190–2750 nm |
| Spot Size | 1 µm |
| Angle of Incidence | 38°–90° |
| Sample Diameter | 2–12 inches |
| Spectral Resolution | 0.1 nm |
| Thickness Measurement Accuracy | 0.1 nm |
| Thickness Repeatability | 0.01 nm |
| Brand | Accurion |
|---|---|
| Origin | Switzerland |
| Model | RSE Referenced Spectroscopic Ellipsometry Fast Inspection System |
| Spectral Range | 450–900 nm |
| Spot Size | 50 × 100 µm (at 60° incidence) |
| Thickness Measurement Range | <1 nm to 10 µm |
| Acquisition Rate | 200 full spectroscopic ellipsometric spectra per second |
| Mapping Area | 100 mm × 100 mm in ≤12 min |
| Data Processing | Real-time look-up table (LUT)-based fitting |
| Compliance | Designed for ISO/IEC 17025-aligned QC environments, supports GLP/GMP traceability via audit-ready software logs |
| Brand | Bruker |
|---|---|
| Origin | USA |
| Model | FilmTek 2000M TSV |
| Optical Configuration | Collimated Beam Reflectometry |
| Spot Size Range | 2 × 1 µm to >100 µm (adjustable via microscope objectives) |
| Spectral Range | 190–1100 nm |
| Spectral Resolution | <1.5 nm FWHM |
| Thickness Measurement Range | 5 nm – 350 µm |
| Compliance | ASTM E2476, ISO/IEC 17025 (when operated in accredited lab environments), supports GLP/GMP data integrity requirements |
| Brand | Bruker |
|---|---|
| Origin | USA |
| Model | Filmtek 4000 |
| Measurement Angles | 0° (normal incidence) and 70° (grazing incidence) |
| Spectral Range | 400–1650 nm |
| Spot Size | 1 mm (0°), 2 mm (70°) |
| Thickness Range | 100 nm – 150 µm |
| Thickness Accuracy | ≤3 Å (1σ), Repeatability: ≤0.5 nm (1σ) |
| Refractive Index Resolution | 2×10⁻⁵ @ TE, 4×10⁻⁵ @ TM (1σ) |
| Stage Travel | 200 mm × 200 mm, Positioning Resolution: 1 µm |
| Light Source | Halogen lamp, Lifetime ≥2000 h |
| Detectors | Dual visible CCDs (380–950 nm, 0.3 nm resolution, 2048 px) + Dual IR InGaAs detectors (950–1650 nm, 2 nm resolution, 512 px) |
| Software | Filmtek 4000 Suite with DPSD, Cauchy, Sellmeier, Drude, Lorentz, Tauc, EMA, Graded, Superlattice, and NK modeling |
| Brand | Eoptics |
|---|---|
| Origin | Hubei, China |
| Manufacturer Type | Authorized Distributor |
| Country of Origin | China |
| Model | SE-VF |
| Pricing | Upon Request |
| Brand | HORIBA |
|---|---|
| Origin | France |
| Model | Auto SE |
| Spectral Range | 450–1000 nm |
| Incident Angle | 70° fixed |
| Detector | CCD array |
| Spot Size Options | 8 discrete sizes (automatically selectable) |
| Sample Stage | Motorized XYZ stage (200 mm × 200 mm travel, Z > 35 mm) |
| Optical Architecture | Liquid crystal phase modulation (no moving parts in measurement path) |
| Brand | HORIBA |
|---|---|
| Origin | France |
| Model | Auto SE |
| Spectral Range | 450–1000 nm |
| Incident Angle | 70° |
| Sample Stage | Motorized XYZ Translation (200 mm × 200 mm travel, Z-height > 35 mm) |
| Detection | CCD-based Full-Spectrum Acquisition |
| Optical Architecture | Liquid-Crystal Variable Retarder (LCVR) Modulation, No Moving Parts in Measurement Path |
| Spot Visualization | Integrated Real-Time Imaging System |
| Compliance | Designed for ISO/IEC 17025-aligned QC environments, supports audit-ready data logging per GLP/GMP principles |
| Brand | HORIBA |
|---|---|
| Origin | France |
| Model | UVISEL 2 |
| Spectral Range | 190–2100 nm |
| Minimum Spot Size | 35 × 85 µm |
| Sample Stage | 200 mm × 200 mm with Motorized XYZ Translation and Auto-Leveling |
| Incidence Angle Range | 35°–90° (Auto-Adjustable, 0.01° Minimum Step) |
| Detector Configuration | Three Independent Detectors (UV-Optimized, VIS-Optimized, NIR-Optimized) |
| Optical Architecture | Dual-Grating Spectrometer with High Stray-Light Suppression |
| Modulation Technology | 50 kHz Photoelastic Modulator (PEM) |
| Imaging Capability | Integrated Visible Microscope with Real-Time Spot Visualization |
| Beam Delivery | Fixed-Path, No Moving Elements in Measurement Light Path |
| Brand | HORIBA |
|---|---|
| Origin | France |
| Model | In-situ Series |
| Application | In-line thin-film process monitoring during deposition and etching |
| Measurement Principle | Spectroscopic ellipsometry (SE) |
| Optical Configuration | Fiber-coupled, modular probe head design for integration into vacuum chambers or CVD/PVD/ALD tools |
| Spectral Range | Typically 190–1700 nm (configurable per system variant) |
| Spot Size | Adjustable, down to ~50 µm (dependent on optical interface and working distance) |
| Angle of Incidence | Fixed or motorized, commonly 65°–75° (customizable per integration requirement) |
| Measurement Speed | Up to 10 Hz spectral acquisition (full spectrum), sub-second single-wavelength monitoring |
| Single-Measurement Time | <100 ms (at fixed wavelength) |
| Sample Compatibility | Wafers up to 300 mm, flat or curved substrates, high-temperature or cryogenic environments (with optional thermal management) |
| Thickness Accuracy | ±0.1 nm (for SiO₂ on Si reference films, under controlled conditions) |
| Repeatability | <0.05 nm RMS over 24 h (thermal drift compensated) |
| n/k Determination Uncertainty | Δn < 0.002, Δk < 0.0005 (for transparent dielectrics) |
| Brand | HORIBA |
|---|---|
| Origin | France |
| Model | Smart SE |
| Spectral Range | 450–1000 nm |
| Spot Size Options | Multiple Micro-Spot Sizes with Real-Time Visual Observation |
| Incidence Angle | Variable (Motorized Multi-Angle Capability) |
| Measurement Speed | Full-Spectrum Acquisition in <1 Second |
| Single-Measurement Time | <2 s (Typical, Including Stage Positioning) |
| Sample Stage | Motorized XYZ Translation (200 mm × 200 mm Travel, Z-Travel >35 mm) |
| Detector | CCD-Based Spectral Analyzer |
| Modulation Technology | Liquid Crystal Variable Retarder (LCVR), No Moving Parts in Optical Path |
| Configuration Flexibility | Supports Both In-Line Process Integration and Stand-Alone Lab Use |
| Compliance | Designed for ISO/IEC 17025-Compatible Metrology Environments |
| Software | HORIBA DeltaPsi² Platform with Audit Trail, User Access Control, and Exportable Raw Data (CSV, XML, HDF5) |
| Brand | HORIBA |
|---|---|
| Origin | France |
| Model | Smart SE |
| Spectral Range | 450–1000 nm |
| Detector | CCD |
| Spot Visualization | Patented real-time surface imaging |
| Spot Selection | Motorized multi-size micro-spot (e.g., 30 µm, 100 µm, 300 µm) |
| Sample Stage | Motorized XYZ stage (200 mm × 200 mm travel, Z-axis range >35 mm) |
| Modulation | Liquid Crystal Variable Retarder (LCVR), no moving parts in optical path |
| Measurement Mode | Variable-angle spectroscopic ellipsometry |
| Output | Full-spectrum Ψ(λ) and Δ(λ) in <1 s per angle |
| Configuration | Supports both offline lab-based and inline process-integrated deployment |
| Brand | HORIBA |
|---|---|
| Origin | France |
| Model | Smart SE |
| Measurement Speed | 5 s (typical), down to 1 s (max) |
| Wavelength Range | 450–1000 nm |
| Spot Sizes | 7 selectable configurations (e.g., 75 µm × 150 µm to 500 µm × 500 µm) |
| Software | DeltaPsi² v5.x (Windows-based) |
| Compliance | Designed for GLP/GMP-aligned workflows |
| Brand | HORIBA |
|---|---|
| Origin | France |
| Manufacturer Type | Original Equipment Manufacturer (OEM) |
| Origin Category | Imported Instrument |
| Model | UVISEL |
| Pricing | Available Upon Request |
| Origin | United Kingdom |
|---|---|
| Manufacturer Type | Authorized Distributor |
| Origin Category | Imported Instrument |
| Model | NKD8000 |
| Price | Upon Request |
| Spectral Range (Standard) | 350–1000 nm |
| Spectral Range (UV-Enhanced) | 280–1000 nm |
| Spectral Range (NIR) | 800–1700 nm |
| Spectral Range (Broadband) | 350–1700 nm |
| Spectral Range (Extended Broadband) | 350–2200 nm |
| Spectral Resolution | 1 nm or 2 nm (selectable) |
| Measurement Time | 2–10 minutes (dependent on spectral range and configuration) |
| Analysis Time | 5 seconds–5 minutes (dependent on model complexity) |
| Incident Angle Range | 20°–70° (motorized continuous variable), or fixed angles (30°/50°/70°) |
| Spot Size | 5 mm (standard), 250 µm (optional micro-spot) |
| Sample Stage | X-Y motorized scanning stage (100 mm travel), accommodates samples from 10×10 mm to 200×250 mm |
| Max. Layers | 5-layer stack with up to two unknown parameters per layer |
| Thickness Range | 1 nm – 25 µm (wavelength-, angle-, and polarization-dependent) |
| Accuracy (semi-absorbing films) | thickness <1% (typ.), <3% (max) |
| Accuracy (metallic films) | thickness <1% (typ.), <3% (max) |
| Repeatability | transmission <0.01% (typ.), <0.1% (max) |
| Light Source | 150 W xenon arc lamp (NKD8000v) |
| Power Supply | 220 V, 50 Hz, 2 A or 110 V, 60 Hz, 3 A |
| Dimensions | 890 × 540 × 720 mm |
| Weight | 105 kg |
| Brand | Optrel |
|---|---|
| Origin | Germany |
| Model | Multiskop |
| Type | Imported Instrument |
| Configuration | Ellipsometry + SPR + Waveguide Mode Analysis + Reflectometry + Brewster Angle Microscopy + SPR Microscopy + Imaging Ellipsometry + Contact Angle Analysis |
| Measurement Speed | Sub-millisecond time resolution (SPR mode) |
| Thickness Resolution | 0.1 nm (ellipsometry) |
| Lateral Resolution | 2 µm (imaging ellipsometry) |
| Vertical Resolution | 0.1 nm (imaging ellipsometry) |
| Typical Field of View (BAM) | 20–200 µm |
| Reflectivity Detection Limit | 10⁻⁶ (BAM) |
| Software Modules | Angle-resolved reflectance scan, Kinetic angle tracking, Reflectance time-series monitoring, Advanced data processing suite |
| Brand | SENTECH |
|---|---|
| Origin | Germany |
| Manufacturer Type | Authorized Distributor |
| Product Origin | Imported |
| Model | SpectraRay/4 |
| Spectral Range | Configurable per instrument integration (e.g., 190–1700 nm) |
| Spot Size | Instrument-dependent (typically 10–100 µm) |
| Incidence Angle | Adjustable (40°–90°, motorized goniometer support) |
| Measurement Speed | Up to 100 ms per spectrum (full spectral acquisition) |
| Single-Measurement Time | < 5 s (typical auto-alignment + acquisition + fit) |
| Sample Size Compatibility | Up to Ø300 mm wafers or custom substrates |
| Spectral Resolution | ≤ 1 nm (dependent on spectrometer configuration) |
| Thickness Measurement Accuracy | Sub-nanometer for single-layer SiO₂ on Si (calibration traceable to NIST standards) |
| Repeatability | ≤ ±0.05 nm (1σ, over 24 h, controlled environment) |
| Direct Reflectance Accuracy | ±0.2% absolute reflectance (NIST-traceable calibration source) |
| Brand | SP Spectral Products |
|---|---|
| Origin | USA |
| Manufacturer Type | Authorized Distributor |
| Import Status | Imported |
| Model | SpecEl-2000-VIS |
| Wavelength Range | 380–780 nm (standard), 450–900 nm (optional) |
| Optical Resolution | 4.0 nm FWHM |
| Angle of Incidence | 70° |
| Spot Size | 2 mm × 4 mm (standard), 200 µm × 400 µm (optional) |
| Thickness Measurement Range | 0.1 nm – 5 µm (single transparent film) |
| Thickness Resolution | 0.1 nm |
| Refractive Index Accuracy | ±0.005% |
| Measurement Time | 3–15 s (per acquisition) |
| Dynamic Acquisition Interval | 3 s |
| Mechanical Height Tolerance | ±1.5 mm |
| Angular Tolerance | ±1.0° |
| Maximum Layer Count | 32 layers |
| Software Platform | Windows-based 32-bit control and analysis suite |
| Brand | Top Instruments (TP) |
|---|---|
| Origin | Tianjin, China |
| Manufacturer Type | Direct Manufacturer |
| Product Origin | Domestic (China) |
| Model | TPY-1 |
| Price | Upon Request |
| Angle of Incidence | 20°–90° (±0.05° resolution) |
| Film Thickness Measurement Accuracy | ±1 nm |
| Thickness Range | 1–300 nm |
| Refractive Index Range | 1.0–10.0 |
| Minimum Display Resolution | ≤1 nm |
| Laser Wavelength | 632.8 nm (He-Ne) |
| Optical Center Height | 80 mm |
| Max Sample Diameter | φ140 mm |
| Min Sample Diameter | φ10 mm |
| Max Sample Thickness | 16 mm |
| Polarizer Azimuth Range | 0°–180° (0.05° resolution) |
| Thickness Repeatability | ±1 nm |
| Refractive Index Repeatability | ±0.01 |
| Instrument Weight | 25 kg |
| Brand | Topo |
|---|---|
| Model | TPY-2 |
| Origin | Tianjin, China |
| Manufacturer Type | Original Equipment Manufacturer (OEM) |
| Spectral Range | 632.8 nm (He–Ne laser) |
| Thickness Measurement Range | 1–4000 nm |
| Refractive Index Range | 1.0–10.0 |
| Incidence Angle Range | 20°–90° (±0.05° angular resolution) |
| Sample Diameter Compatibility | Ø10–Ø140 mm, max thickness 16 mm |
| Thickness Accuracy | ±0.5 nm (for films 10–100 nm), ±1 nm (full range) |
| Refractive Index Repeatability | ±0.005 |
| Polarizer Azimuth Range | 0°–180° |
| Optical Center Height | 80 mm |
| Dimensions (L×W×H) | 680 × 390 × 310 mm |
| Weight | 26 kg |
| Interface | USB 2.0 |
| Software | Windows-based ellipsometry analysis suite with real-time data acquisition, multi-layer modeling, and export to CSV, TXT, and XML |
| Brand | ULVAC KIKO |
|---|---|
| Origin | Japan |
| Model | UNECS Series |
| Measurement Principle | Spectroscopic Ellipsometry (SE) |
| Wavelength Range Options | Standard: 530–750 nm |
| Visible-Extended | 380–760 nm |
| Minimum Acquisition Time | 20 ms per spectrum |
| Sensor Architecture | Fixed-optics, no rotating elements |
| Environmental Configurations | Ambient-air, vacuum-integrated, and in-situ chamber-mounted variants |
| Sample Stage Options | Manual, motorized XY, large-substrate (up to 300 mm), portable benchtop, and OEM-integrated modules |
| Compliance | Designed for ISO/IEC 17025-aligned calibration traceability |