i-Lab UHN15-1EL High-Purity Nitrogen Generator for Excimer & Femtosecond Laser Systems
| Brand | i-Lab |
|---|---|
| Origin | Shanghai, China |
| Manufacturer Type | Direct Manufacturer |
| Product Category | Domestic |
| Model | UHN15-1EL |
| Instrument Type | Nitrogen Generator |
| Nitrogen Generation Principle | Pressure Swing Adsorption (PSA) with Carbon Molecular Sieve (CMS) |
| Output Flow Rate | 15 L/min |
| Output Pressure Range | 0–7 bar |
| Nitrogen Purity | ≥99.99% |
| Dew Point | ≤−60 °C |
| Key Components | Imported CMS beds, high-efficiency coalescing filters, precision pressure regulators, and integrated oxygen analyzer |
Overview
The i-Lab UHN15-1EL is an engineered nitrogen generation system specifically designed to support the operational integrity of excimer and femtosecond laser sources used in precision photolithography, ophthalmic surgery (e.g., LASIK), ultrafast spectroscopy, and micromachining applications. Unlike general-purpose nitrogen generators, the UHN15-1EL employs a dual-bed, pressure-swing adsorption (PSA) architecture optimized for continuous, low-oxygen (<10 ppmv O₂), ultra-dry (dew point ≤−60 °C) nitrogen delivery—critical parameters for maintaining laser cavity stability, preventing optical component degradation, and ensuring pulse energy reproducibility. Its core separation mechanism relies on carbon molecular sieve (CMS) media with precisely controlled pore size distribution, enabling selective kinetic separation of O₂, CO₂, and H₂O from compressed air under cyclic pressurization and depressurization. The system integrates real-time oxygen monitoring via electrochemical sensor feedback, triggering automatic purge cycles to sustain purity compliance across variable load conditions.
Key Features
- Application-Specific Engineering: Designed exclusively for excimer (e.g., KrF, ArF) and Ti:sapphire-based femtosecond laser systems requiring stable, high-purity nitrogen as purge gas or laser cavity fill medium.
- Imported Critical Components: Features CMS beds sourced from ISO 9001-certified European suppliers, paired with UL-listed solenoid valves, stainless-steel pneumatic manifolds, and a calibrated paramagnetic oxygen analyzer compliant with ASTM D6245.
- Rigorous In-Line Quality Assurance: Each unit undergoes 72-hour continuous performance validation at rated flow and pressure, including simultaneous measurement of O₂ content (via trace oxygen analyzer), dew point (chilled mirror hygrometer), and pressure stability (±0.1 bar).
- Compact Modular Architecture: Footprint of 520 × 420 × 780 mm (W × D × H); supports wall-mounting or benchtop deployment; includes integrated noise-dampening enclosure (≤62 dB[A] at 1 m).
- Intelligent Pressure Management: Dual-stage regulation ensures stable output pressure (0–7 bar adjustable) independent of inlet pressure fluctuations; downstream pressure relief valve meets PED 2014/68/EU requirements.
Sample Compatibility & Compliance
The UHN15-1EL delivers nitrogen meeting ISO 8573-1:2010 Class 1.2.1 (compressed air quality reference) for purity, moisture, and particulate content—directly translatable to laser-grade nitrogen specifications per IEC 61000-4-30 and SEMI F57-0301. It complies with CE marking directives (MD, EMC, RoHS), carries China Compulsory Certification (CCC) for electrical safety, and supports GLP/GMP-aligned operation through configurable audit trails and user-access logging (optional firmware upgrade). The system’s oxygen analyzer is traceable to NIST standards; calibration certificates are provided with each unit. No external liquid nitrogen or high-pressure cylinders required—eliminates supply chain dependencies and associated contamination risks.
Software & Data Management
While the base UHN15-1EL operates via intuitive front-panel controls (LCD + tactile buttons), optional RS-485 Modbus RTU or Ethernet TCP/IP interface enables integration into centralized lab infrastructure. Compatible with i-Lab’s LabLink™ SCADA module (v3.2+), it supports remote monitoring of real-time O₂ ppmv, outlet pressure, dew point, CMS cycle count, and maintenance alerts. All operational logs—including start/stop timestamps, alarm events, and purity excursions—are time-stamped and exportable in CSV format. Firmware adheres to FDA 21 CFR Part 11 principles: electronic signatures, role-based access control (admin/operator), and immutable audit trail storage for ≥12 months.
Applications
- Excimer laser purge gas supply in semiconductor photomask fabrication and flat-panel display annealing lines.
- Femtosecond laser cavity inerting in multiphoton microscopy and attosecond pulse generation setups.
- Nitrogen blanket for UV-optical alignment stations and laser-induced breakdown spectroscopy (LIBS) sample chambers.
- On-site nitrogen source for ISO Class 5 cleanroom laser processing workstations requiring continuous, oil-free, particle-free gas.
- Research-grade nitrogen for cryogenic laser cooling systems where hydrocarbon contamination must remain below 0.1 ppbv.
FAQ
What laser types is the UHN15-1EL certified to support?
It is validated for KrF (248 nm), ArF (193 nm), and Ti:sapphire-based femtosecond lasers operating at repetition rates up to 1 kHz and average powers ≤50 W.
Does the system require external cooling or ventilation?
No active cooling is needed; ambient air convection suffices. Minimum clearance of 150 mm around exhaust vents is recommended for optimal thermal management.
How often does the CMS bed require replacement?
Under continuous operation at 15 L/min and ambient inlet air ≤35 °C/60% RH, CMS service life exceeds 20,000 hours (≈2.3 years), with performance trending supported by onboard diagnostics.
Can the unit be integrated into a building’s central compressed air network?
Yes—designed for direct connection to oil-free, refrigerated-dried compressed air mains (ISO 8573-1 Class 2.2.2 minimum); inlet pressure range: 7–10 bar(g).
Is third-party calibration documentation available?
Each unit ships with a factory calibration report signed by a CNAS-accredited metrology lab, covering O₂ sensor, pressure transducer, and dew point sensor traceability to national standards.
