KANOMAX 3950-00 0.1 μm High-Sensitivity Optical Particle Counter for Cleanroom Monitoring
| Brand | KANOMAX |
|---|---|
| Origin | Japan |
| Model | 3950-00 |
| Flow Rate | 2.83 L/min (0.1 CFM) |
| Flow Accuracy | ±5% |
| Timing Accuracy | ±1 s per 6 min |
| Repeatability | ±5% |
| Size Resolution | ≤15% (relative to 0.3 μm PSL) |
| Counting Efficiency | 50±20% at 0.1 μm, 100±10% at 0.15–0.2 μm PSL |
| Max. Concentration | 10⁷ particles/m³ |
| False Count Rate | <1 count/35 min |
| Measurement Channels | 0.1 μm and 0.3 μm |
| Compliance | JIS B9921 & ISO 21501-4 |
| Display | 4.3″ color TFT touchscreen |
| Communication | USB (Host/Device), Ethernet, RS-485 (9600–38400 baud) |
| Data Storage | Internal memory (10,000 records, CSV format) |
| Operating Environment | 15–35 °C, 0–85% RH (non-condensing) |
| Dimensions | 150 × 163 × 228 mm |
| Weight | 3.4 kg |
Overview
The KANOMAX 3950-00 is a compact, high-sensitivity optical particle counter engineered specifically for continuous, real-time monitoring of ultra-clean environments—particularly ISO Class 3 to Class 5 cleanrooms, semiconductor fabrication tools, mini-environments, and critical process equipment enclosures. It employs single-particle light scattering (SPLS) detection with a high-efficiency 650 nm laser diode and optimized optical geometry to resolve sub-0.1 μm particles with trace-level sensitivity. Unlike conventional airborne particle counters limited to ≥0.3 μm detection, the 3950-00 delivers validated 0.1 μm channel capability—enabling early detection of molecular contamination precursors, outgassing byproducts, and nucleation-stage aerosols that precede visible particulate generation. Its 2.83 L/min (0.1 CFM) volumetric flow is calibrated per JIS B9921 and ISO 21501-4, ensuring metrological traceability in regulated manufacturing settings where particle size distribution integrity directly impacts yield and defect control.
Key Features
- Ultra-compact form factor (150 × 163 × 228 mm, 3.4 kg) enables seamless integration into OEM process tools, laminar flow hoods, and robotic handling systems without structural retrofitting.
- Dual-channel simultaneous detection at 0.1 μm and 0.3 μm—critical for distinguishing nanoscale process emissions from background condensation nuclei or lubricant volatiles.
- 4.3-inch full-color resistive touchscreen interface with intuitive icon-driven navigation; supports on-device configuration, real-time histogram visualization, and Δ/∑ mode switching without external software.
- Built-in vacuum pump with thermal mass-flow compensation ensures stable 2.83 L/min delivery across ambient pressure and temperature gradients typical in tool-integrated installations.
- Multi-protocol digital I/O: USB Device (for direct PC connection and firmware updates), USB Host (for direct printing or CSV export to flash storage), Ethernet (TCP/IP, Modbus TCP), and isolated RS-485 (Modbus RTU, selectable baud rates up to 38.4 kbps).
- Onboard data logging stores up to 10,000 measurement records in industry-standard CSV format—including timestamp, location ID (1–99), channel counts, differential/accumulated modes, and cycle metadata.
Sample Compatibility & Compliance
The 3950-00 is designed exclusively for ambient or process gas sampling (air, nitrogen, dry air, inert purge gases) in non-corrosive, non-explosive environments. It is not rated for liquid-phase or high-humidity (>85% RH) operation without external drying or conditioning. All photometric calibration and counting efficiency validation are performed using NIST-traceable polystyrene latex (PSL) spheres per ISO 21501-4 Annex B. The instrument meets JIS B9921 Class 1 requirements for cleanroom instrumentation and supports compliance workflows aligned with ISO 14644-1, SEMI S2/S8, FDA 21 CFR Part 11 (when paired with validated KANOMAX Data Management Software), and EU GMP Annex 1 (2022) for continuous environmental monitoring (CEM) systems. Its internal audit trail logs all parameter changes, user logins, and firmware updates—essential for GLP/GMP-regulated validation protocols.
Software & Data Management
KANOMAX provides optional Windows-based Data Management Software (v3.2+) supporting automated data ingestion via Ethernet or USB. The software enables configurable alarm thresholds per channel and location, trend analysis with linear regression and Cpk calculation, and report generation compliant with ISO/IEC 17025 documentation standards. Raw CSV files are natively compatible with MATLAB, Python (pandas), and LIMS platforms via ODBC or REST API extensions. For integrated OEM deployments, the device supports Modbus register mapping for real-time particle count streaming into SCADA or MES systems—eliminating proprietary middleware dependencies. All firmware updates undergo cryptographic signature verification prior to installation, satisfying cybersecurity requirements outlined in IEC 62443-3-3.
Applications
- Real-time particle feedforward control in EUV lithography tool purge lines and reticle storage cabinets.
- In-line monitoring of point-of-use gas filters in advanced packaging and compound semiconductor fabs.
- Validation and routine surveillance of isolators, RABS, and aseptic filling lines per EU GMP Annex 1 §8.62–8.71.
- Baseline characterization of clean bench exhaust recirculation loops during qualification (IQ/OQ).
- Research-grade nanoparticle emission profiling from ALD/CVD precursor delivery systems.
- Environmental monitoring in microgravity simulation chambers and controlled-atmosphere gloveboxes.
FAQ
Does the 3950-00 require annual recalibration to maintain ISO 21501-4 compliance?
Yes. KANOMAX recommends annual factory recalibration using NIST-traceable PSL standards and flow verification against a primary rotameter. Certificate of Calibration includes uncertainty budget per ISO/IEC 17025.
Can the 3950-00 operate continuously for 24/7 environmental monitoring?
Yes. Designed for unattended operation up to 10,000 hours MTBF. Internal thermal management and solid-state pump architecture eliminate moving-part wear concerns typical of rotary vane pumps.
Is the 0.1 μm channel certified per ISO 21501-4, or is it extrapolated from 0.3 μm performance?
The 0.1 μm channel is independently validated per ISO 21501-4 Clause 6.3.2 using 100 nm PSL reference aerosols and certified reference instruments. Counting efficiency curve (50% ±20%) is documented in the Type Evaluation Report (TER-3950-00-2023).
What is the minimum detectable particle concentration for statistical confidence at 0.1 μm?
At 2.83 L/min flow and 6-second sampling interval, the lower limit of quantitation (LLOQ) is 12 particles/m³ with ≤10% relative standard deviation (RSD) over 10 replicate measurements under controlled cleanroom conditions (ISO 14644-1 Class 3 background).
Does the device support remote firmware updates over Ethernet?
Yes—via secure HTTPS-initiated update packages signed with KANOMAX’s private key. Updates trigger automatic rollback if signature verification fails or flash write integrity is compromised.
