INFICON SKY CDG025D-X3 Capacitance Manometer Vacuum Gauge

Overview

The INFICON SKY CDG025D-X3 is a high-precision, temperature-compensated capacitance manometer vacuum gauge engineered for demanding industrial and semiconductor process environments. Operating on the fundamental principle of capacitive pressure transduction, it measures absolute pressure by detecting minute deflections of a metallic diaphragm—hermetically sealed against a fixed electrode—within a reference vacuum cavity. This differential capacitance change is converted into a highly linear, low-drift analog or digital output signal. Unlike thermal conductivity gauges, the CDG025D-X3 delivers true absolute pressure measurement with exceptional long-term stability, zero-point repeatability, and immunity to gas composition effects—critical for process-critical applications such as plasma etching, chemical vapor deposition (CVD), atomic layer deposition (ALD), and physical vapor deposition (PVD). Its robust design meets stringent cleanroom compatibility requirements (ISO Class 4 compliant per ISO 14644-1), and its rapid thermal stabilization (<30 seconds from power-on) and atmospheric recovery time (<60 seconds after venting) set industry benchmarks for operational responsiveness.

Key Features

• Full-scale range: 0.133 kPa to 133.3 kPa (100 mTorr to 1000 Torr), optimized for medium-vacuum process control
• Ultra-stable ceramic-sapphire sensor assembly with corrosion-resistant, ultra-pure Al₂O₃ diaphragm—rated for >1 million pressure cycles including repeated atmospheric exposure
• Patented sensor shielding technology minimizes particle adhesion and process-induced contamination in aggressive chemistries (e.g., Cl₂, NF₃, WF₆)
• Digital electronics with integrated temperature compensation algorithm (±0.01 %FS/°C typical drift suppression)
• One-touch zero calibration function with non-volatile memory retention
• Dual programmable setpoints with relay outputs for real-time process interlock signaling
• Wide-input power supply: 18–30 VDC, compatible with standard industrial PLC power rails
• RS-232 serial interface supporting ASCII command protocol for integration into SCADA, MES, and SECS/GEM host systems
• Enhanced EMC performance per IEC 61326-1:2022 (industrial environment), including conducted/radiated immunity up to 10 V/m

Sample Compatibility & Compliance

The CDG025D-X3 is compatible with inert, reactive, and corrosive process gases—including halogen-based etchants, silanes, metal-organic precursors, and oxidizing agents—without sensor degradation. Its all-metal wetted path (316L stainless steel body + ceramic diaphragm) eliminates elastomer or polymer components that could outgas or swell. The device conforms to key international standards: CE marking per EU Machinery Directive 2006/42/EC and EMC Directive 2014/30/EU; RoHS 2011/65/EU compliance; and cleanroom suitability verified per SEMI F21-0217. While not intrinsically safe, it is rated for use in non-hazardous areas (IEC 60079-0 general requirements). For regulated pharmaceutical or medical device manufacturing, the gauge supports audit-ready operation when paired with INFICON’s optional firmware-enabled 21 CFR Part 11-compliant data logging module (sold separately).

Software & Data Management

The CDG025D-X3 operates autonomously but integrates seamlessly via RS-232 into higher-level control architectures. INFICON provides the free SKY Control Utility—a Windows-based configuration tool enabling remote setup of zero offset, setpoint thresholds, damping filters, and communication parameters. All calibration constants and event logs (e.g., zero-initiation timestamps, over-range occurrences) are stored in EEPROM with write-protection. When deployed in GxP environments, traceable calibration certificates (NIST-traceable, ISO/IEC 17025 accredited) are available upon request. The gauge supports Modbus RTU protocol via optional firmware upgrade, facilitating interoperability with Allen-Bradley, Siemens, and Beckhoff PLCs without gateway hardware.

Applications

• Semiconductor fabrication: Endpoint detection and chamber pressure profiling in RIE, ICP, and ALD tools
• Flat-panel display (FPD) manufacturing: Precise pressure control during sputtering and thin-film encapsulation
• Vacuum metallurgy and coating systems: Real-time monitoring in batch and inline PVD furnaces
• Research vacuum systems: Calibration reference for Pirani and cold cathode gauges in UHV/XHV cascades
• Leak detection support: Stable baseline pressure acquisition prior to helium mass spectrometer testing
• Space simulation chambers: Medium-vacuum hold verification under thermal cycling conditions

FAQ

What is the recommended calibration interval for the CDG025D-X3 in continuous semiconductor production?
INFICON recommends annual recalibration under normal operating conditions; however, for critical ALD/CVD processes, quarterly verification against a primary standard is advised per SEMI E10-0317.
Can the CDG025D-X3 be mounted in any orientation?
Yes—the sensor is orientation-insensitive due to symmetrical diaphragm geometry and internal gravity-compensated electronics.
Does the gauge require warm-up time before achieving specified accuracy?
No—full specification accuracy is achieved within 30 seconds of power application, as validated per ISO 2533 Annex B.
Is firmware update capability supported in-field?
Yes—firmware updates are performed via RS-232 using INFICON’s authenticated binary loader; no hardware modification required.
How does the patented sensor shield affect measurement response time?
The shield introduces negligible thermal mass and zero measurable hysteresis; step-response time remains <100 ms (10–90% full scale) per IEC 60770-1.