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Tianhe ZKJ Intelligent Online Particle Monitoring System

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Brand Tianhe
Origin Tianjin, China
Manufacturer Type Authorized Distributor
Product Category Domestic
Model ZKJ
Instrument Type Optical Particle Counter
Particle Size Range 0.1–5 µm and 0.3–10 µm
Number of Size Channels 8 (user-configurable)
Sample Flow Rate 1.0 CFM (28.3 L/min)
Vacuum Pump Power 2.2 kW
Vacuum Pump Static Pressure 220/210 mbar
Maximum Monitoring Points 3200
Sampling Tube Length per Point ≤60 m
Power Supply 220 V / 380 V AC

Overview

The Tianhe ZKJ Intelligent Online Particle Monitoring System is an industrial-grade optical particle counter engineered for continuous, real-time airborne particulate monitoring in controlled environments. It operates on the principle of light scattering—where particles drawn through a calibrated sensing zone intercept a high-stability laser beam, generating scattered light pulses proportional to particle size and concentration. The system is specifically designed for mission-critical applications in semiconductor cleanrooms, lithium-ion battery dry rooms, photovoltaic manufacturing facilities, advanced material synthesis labs, and R&D environments where ISO Class 3–5 (ISO 14644-1) or stricter air quality compliance is mandated. Unlike portable or spot-check instruments, the ZKJ integrates distributed sampling architecture with centralized data aggregation, enabling synchronized, multi-point surveillance across large-scale production floors or research campuses.

Key Features

  • Network-based deployment architecture supporting Ethernet/IP and Modbus TCP protocols for seamless integration into existing facility monitoring systems (FMS) and SCADA platforms.
  • Scalable topology accommodating up to 3200 independently addressable monitoring points—each configurable with dedicated flow control valves to maintain ±2% volumetric accuracy across all sampling lines.
  • High-reliability vacuum system featuring a 2.2 kW dual-stage diaphragm pump delivering stable static pressure (220/210 mbar) and consistent 28.3 L/min (1.0 CFM) flow at each active sensor node.
  • Optical detection module compliant with JJF 1190–2008 “Calibration Specification for Liquid and Airborne Particle Counters”, ensuring traceable metrological performance under routine operation.
  • Real-time event logging with cryptographic timestamping and immutable audit trail generation—capturing operator actions, configuration changes, calibration events, and alarm acknowledgments.
  • Configurable 8-channel pulse-height analysis enabling user-defined binning schemes across two overlapping size ranges: 0.1–5 µm and 0.3–10 µm—optimized for detecting sub-micron defects in wafer processing or electrode coating environments.

Sample Compatibility & Compliance

The ZKJ system is validated for monitoring non-hazardous, non-corrosive ambient air and process gases in cleanroom-grade environments. It supports sampling from ISO Class 1–5 spaces and is routinely deployed in ISO/IEC 17025-accredited laboratories for environmental qualification and ongoing monitoring per ISO 14644-2:2015 Annex B. While not intrinsically safe, optional ATEX-compliant enclosures and explosion-proof sampling manifolds are available upon request for classified zones. The instrument’s firmware and software architecture support 21 CFR Part 11-compliant electronic signatures, audit trails, and role-based access control when deployed under GMP/GLP frameworks.

Software & Data Management

The embedded ZKJ Control Suite runs natively on Windows 10 and later, providing browser-accessible dashboards via HTTPS-secured web interface. All measurement data—including raw counts, cumulative/historical trends, and alarm logs—is stored in a relational SQL database with automated backup scheduling and ODBC connectivity for third-party analytics tools (e.g., Tableau, Spotfire). Custom reporting modules support scheduled PDF export, SPC charting (X̄-R, CUSUM), and deviation alerting with configurable thresholds per monitoring point. Data retention policies are user-definable, and full forensic search capability enables cross-referencing of particle excursions with maintenance logs, HVAC status, or tool uptime records.

Applications

  • Semiconductor fabrication: Real-time detection of >0.1 µm particles during photolithography, etch, and deposition steps to prevent yield loss.
  • Lithium battery dry room monitoring: Continuous verification of dew point stability and particulate ingress during electrode slurry mixing and calendering.
  • Advanced materials R&D: In-situ tracking of nanoparticle agglomeration dynamics during sol-gel synthesis or CVD reactor purging cycles.
  • Photovoltaic cell manufacturing: Monitoring laminar flow integrity in class-10 clean booths used for PERC and TOPCon cell handling.
  • Pharmaceutical isolator qualification: Supporting ISO 14644-3:2019 testing protocols for unidirectional airflow validation and recovery time assessment.

FAQ

What standards does the ZKJ system comply with for calibration and performance verification?
The optical sensor module conforms to JJF 1190–2008; system-level validation aligns with ISO 21501-4:2018 for airborne particle counters and supports ISO 14644-1:2015 classification testing.
Can the ZKJ integrate with existing Building Management Systems (BMS)?
Yes—via Modbus TCP or OPC UA gateways; native BACnet/IP support is available as an optional firmware upgrade.
Is remote diagnostics and firmware update supported?
Yes—the system includes secure SSH and TLS-enabled remote maintenance mode with rollback capability and version-controlled firmware archives.
What is the maximum allowable pressure drop across a 60-meter sampling line?
At 28.3 L/min flow, total system pressure loss remains below 120 mbar when using 6 mm OD conductive PTFE tubing with ≤3 directional fittings per branch.
How is data integrity ensured during network outages?
Each local sensor node buffers up to 72 hours of high-resolution count data locally; synchronization resumes automatically upon network restoration without data loss.

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