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| Brand | ZEPTOOLS |
|---|---|
| Origin | Guangdong, China |
| Manufacturer Type | Original Equipment Manufacturer (OEM) |
| Country of Origin | China |
| Model | ZEL304G |
| Pricing | Available upon request |
| Electron Source | Schottky field-emission gun |
| Acceleration Voltage | 20 V–30 kV |
| Image Resolution | ≤1 nm @ 15 kV, ≤1.5 nm @ 1 kV |
| Minimum Beam Spot Size | ≤2 nm |
| Beam Current | ≥100 nA |
| Beam Current Density | >7000 A/cm² |
| Beam Blanking Rise Time | <100 ns |
| Writing Field | ≥500 × 500 µm |
| Minimum Single-Exposure Line Width | <15 nm |
| Stage Travel | ≥105 mm |
| Stitching Accuracy | <50 nm (mean + 1σ) |
| Overlay Accuracy | <50 nm (mean + 1σ) |
| Scan Rate | ≥20 MHz (standard), up to 50 MHz (max) |
| D/A Resolution | 20-bit |
| Dwell Time Increment | 10 ns |
| Supported File Formats | GDSII, DXF, BMP |
| Scan Modes | Raster (Z-scan), serpentine (S-scan), spiral vector scanning |
| Exposure Modes | Field calibration, field stitching, multi-layer overlay, auto-exposure sequencing |
| Optional Features | Proximity effect correction (PEC), laser interferometric stage, Faraday cup beam current monitor, TTL-compatible beam blanking (5 V), external I/O for synchronized stage motion, beam blanking, SE detection, and scan control |
| Brand | ZEPTOOLS |
|---|---|
| Origin | Anhui, China |
| Manufacturer Type | Direct Manufacturer |
| Instrument Type | Desktop SEM |
| Electron Source | Pre-aligned Tungsten Filament |
| SEM Class | Entry-level Tungsten-Filament SEM |
| Secondary Electron (SE) Resolution | 4 nm |
| Maximum Magnification | 360,000× |
| Accelerating Voltage Range | 3–20 kV (1 kV step adjustment) |
| Backscattered Electron (BSE) Resolution | 4 nm |
| Stage Option | 5-Axis Motorized Stage (Optional) |
| Chamber Dimensions | 185 mm × 176 mm × 125 mm |
| Vacuum Modes | High Vacuum & Low Vacuum |
| Environmental Suitability | Vibration-isolated design for standard labs/offices/factories |
| Detector Configuration | SE + BSE detectors |
| Optional Upgrades | EDS, Deceleration Mode, In-situ Platforms |
| Filament Upgrade Option | LaB₆ |
| Brand | ZEPTOOLS |
|---|---|
| Model | JS2000C |
| Measurement Principle | Inductive |
| Vertical Measurement Range | 10 nm – 80 µm |
| Probe Tip Radius | 1 µm / 2 µm |
| Normal Force Range | 0.5–50 mg |
| Scan Length | ≤50 mm |
| Step Height Repeatability | <0.5 nm |
| Vertical Resolution | 0.05 nm |
| Wafer Compatibility | 150 mm (6″) and 200 mm (8″) |
| Maximum Wafer Thickness | 50 mm |
| Positioning Accuracy (Vision System) | ±10 µm |
| Mechanical Stability | >500 consecutive wafers in marathon testing |
| Throughput | ≥10 WPH (single-side, ≥5 measurement positions) |
| Brand | ZEPTOOLS |
|---|---|
| Origin | Anhui, China |
| Manufacturer Type | Direct Manufacturer |
| Product Category | Domestic |
| Model | ZEM20 EDS-integrated Desktop SEM |
| Instrument Type | Desktop / Benchtop SEM |
| Electron Source | Tungsten Filament |
| SEM Class | Entry-level Tungsten-Filament SEM |
| Secondary Electron Image Resolution | 4 nm |
| Maximum Magnification | 360,000× |
| Accelerating Voltage Range | 3–20 kV (1 kV step adjustment) |
| Backscattered Electron Image Resolution | 4 nm |
| Integrated EDS System | Oxford Instruments Xplore Compact 30 |
| EDS Detector Active Area | 30 mm² (SuperATW window) |
| Energy Resolution | ≤129 eV (Mn Kα) |
| Cooling | Peltier-cooled (LN₂-free) |
| Elemental Detection Range | Boron (B, Z=5) to Californium (Cf, Z=98) |
| Analysis Modes | Point, Line, and Area Mapping |
| Software Interface | Fully Localized Chinese UI with Optional English Toggle |
| Vacuum Architecture | Dual-chamber Separated Vacuum System (Gun Chamber & Sample Chamber) |
| Sample Chamber Camera | Integrated HD In-Chamber Camera |
| Sample Stage Mode | Deceleration Mode for Low-Conductivity Specimens |
| Typical Sample Exchange Time | <60 s |
| Brand | ZEPTOOLS |
|---|---|
| Origin | Guangdong, China |
| Manufacturer Type | Direct Manufacturer |
| Model | LN-4H-06 |
| Vacuum Base Pressure | <6×10⁻³ Pa (pre-cooling), <6×10⁻⁴ Pa (at 77 K) |
| Probe Arm Count | 4 standard |
| Probe Positioning Range | 50 mm × 50 mm × 30 mm |
| Probe Positioning Resolution | <10 µm |
| Sample Stage Diameter | 50 mm |
| Temperature Range | 77 K–400 K |
| Temperature Stability | ±0.5 K |
| Microscope Optical Magnification | 0.58×–7× (with 1× objective) |
| Microscope Resolution | <2 µm |
| Camera | Full HD digital with coaxial + annular LED illumination |
| Focus Mechanism | Dual mechanical + optical fine focus |
| Electrical Leakage | <1 pA (DC) |
| Included Vacuum System | Imported turbomolecular pump set + full-range vacuum gauge |
| Temperature Controller | Intelligent PID-based digital controller |
| Optional Fiber Integration | Yes (replaces electrical probes) |
| RF Capability | Up to 100 GHz (optional probe configurations) |
| Chamber Diameter | 245 mm |
| X-Y Stage Accuracy | ±0.01 mm |
| Probe Shaft Stroke | 110 mm |
| Brand | ZEPTOOLS |
|---|---|
| Origin | Guangdong, China |
| Manufacturer Type | OEM Manufacturer |
| Product Category | Domestic |
| Model | SEM Nano-Probe Station |
| Pricing | Upon Request |
| XYZ Travel Range | ±10 mm |
| Fine-Adjustment Resolution | 0.5 nm |
| Sample Stage Flatness | 10 µm |
| Total Probe Station Mass | 225 g |
| Max. Translation Speed | 3 mm/s |
| Motion Guidance | Zero-Gap Flexure Hinge System |
| Actuation | Piezoelectric Ceramic Positioning Stages |
| Optional Modules | Cryogenic Stage, High-Temperature Stage, Fiber Optic Feedthrough & Clamp, EBIC Kit |
| Brand | ZEPTOOLS |
|---|---|
| Origin | Guangdong, China |
| Manufacturer Type | Original Equipment Manufacturer (OEM) |
| Product Category | Domestic |
| Model | JS100C |
| Pricing | Available upon Request |
| Measurement Principle | Inductive (LVDT-based) |
| Vertical Measurement Range | 160 µm |
| Probe Tip Radius | 2 µm / 1 µm (interchangeable) |
| Probe Normal Force | 0.5–50 mg |
| Scan Length | 55 mm |
| Step Height Repeatability | < 0.5 nm |
| Vertical Resolution | 0.05 nm (full-scale) |
| Maximum Sample Size | 150 mm × 150 mm |
| Brand | ZEPTOOLS |
|---|---|
| Origin | Guangdong, China |
| Manufacturer Type | OEM/ODM Manufacturer |
| Origin Category | Domestic (China) |
| Model | SEM Cryogenic Vacuum Transfer System |
| Pricing | Upon Request |
| Cooling Stage Temperature Range | −170 °C to +100 °C |
| Cooling Stage Temperature Stability | ≤ ±0.1 °C |
| Cooling Stage Rotation | 0–360° continuous |
| Cooling Stage Tilt Angle | ≥55° |
| Cold Trap Temperature | ≤ −190 °C |
| Cold Trap Temperature Stability | ≤ ±0.5 °C |
| Cooling Stage Cool-down Time to −170 °C | ≤35 min |
| Cold Trap Cool-down Time to −190 °C | ≤20 min |
| Bake-out Capability | ≥100 °C |
| Liquid Nitrogen Capacity | 35 L |
| Continuous Operation Duration | >8 h |
| LN₂ Refill Port | Hot-swap compatible (no system shutdown required) |
| Vacuum Transfer Chamber | Enables glovebox ↔ FIB ↔ SEM cryo-transfer |
| Vacuum Load Lock | Integrated for rapid, contamination-controlled SEM insertion |
| Control System | Integrated PLC-based HMI with real-time temperature/vacuum monitoring and logging |
| Brand | ZEPTOOLS |
|---|---|
| Origin | Anhui, China |
| Manufacturer Type | Direct Manufacturer |
| Product Origin | Domestic (China) |
| Model | ZEM20 In-situ Tensile Integrated SEM |
| Instrument Type | Desktop SEM |
| Electron Source | Tungsten Filament |
| SEM Class | Entry-level Tungsten-Filament SEM |
| Secondary Electron (SE) Resolution | 4 nm @ 20 kV |
| Maximum Magnification | 360,000× |
| Accelerating Voltage Range | 3–20 kV (1 kV step adjustment) |
| Backscattered Electron (BSE) Resolution | 4 nm @ 20 kV |
| In-situ Stage Load Capacity | 0–1000 N |
| Displacement Resolution | 20 nm |
| Optional Heating Module | Yes |
| Mechanical Testing Modes | Tensile, Compression, Three-point Bending |
| Vacuum Architecture | Dual-chamber (separated electron gun & specimen chamber) |
| Sample Chamber Camera | Integrated HD in-chamber camera |
| Chamber Volume | Extra-large for multi-modal in-situ platform integration |
| Brand | ZEPTOOLS |
|---|---|
| Origin | Guangdong, China |
| Manufacturer Type | Direct Manufacturer |
| Product Category | Optical Component |
| Model | SMG26 |
| Grating Pitch | 256 µm |
| Absolute Accuracy | ±3 µm @ 20 °C |
| Operating Temperature Range | up to 100 °C |
| Subdivision Resolution (with TF15 interface) | 1 nm |
| Material | Low-Thermal-Expansion Glass |
| Installation Tolerance | ±0.1 mm |
| Vacuum Compatibility | UHV (≤10⁻⁹ mbar) |
| Compliance | Designed for UHV-compatible bake-out protocols (≤100 °C) |
| Brand | ZEPTOOLS |
|---|---|
| Origin | Anhui, China |
| Manufacturer Type | Original Equipment Manufacturer (OEM) |
| Product Category | Domestic |
| Model | ZEM18 |
| Instrument Type | Desktop SEM |
| Electron Source | Pre-aligned Tungsten Filament |
| SEM Class | Entry-level Tungsten-Filament SEM |
| Secondary Electron (SE) Resolution | <6 nm |
| Backscattered Electron (BSE) Resolution | <6 nm |
| Maximum Magnification | 200,000× |
| Accelerating Voltage Range | 3–18 kV |
| Maximum Sample Dimensions | Ø50 mm × 35 mm (H) |
| Stage | Motorized 2-Axis Automated Stage |
| Signal Acquisition Bandwidth | 10 MHz |
| Vacuum Mode Options | High Vacuum (<5×10⁻³ Pa), Low Vacuum (optional) |
| Pump-down Time (High Vacuum) | <90 s |
| Imaging Modes | Video Mode, Fast Scan Mode, Slow Scan Mode |
| Auto Functions | Auto Focus, Auto Brightness/Contrast |
| Detector Configurations | SE Detector, BSE Detector, Optional EDS Detector |
| Brand | ZEPTOOLS |
|---|---|
| Origin | Guangdong, China |
| Manufacturer Type | Direct Manufacturer |
| Origin Category | Domestic (China) |
| Model | PicoFemto In Situ MEMS Heating & Electrical Sample Holder Series |
| Application Field | Materials Science |
| Instrument Classification | In Situ Heating Holder |
| Pricing | Upon Request |
| Compatibility | Compatible with Standard TEM Goniometer Stages and Specified Pole Pieces |
| Brand | ZEPTOOLS |
|---|---|
| Origin | Anhui, China |
| Manufacturer Type | Direct Manufacturer |
| Instrument Type | Desktop SEM |
| Electron Gun | Single-Crystal LaB₆ Filament |
| SEM Class | Entry-Level Tungsten- or LaB₆-Based SEM (Non-FEG) |
| Secondary Electron Resolution | 3 nm @ 20 kV |
| Maximum Magnification | 360,000× |
| Accelerating Voltage Range | 3–20 kV |
| Backscattered Electron Resolution | 3 nm @ 20 kV |
| Sample Chamber Dimensions (max) | 165 × 122 × 51.5 mm (W × D × H) |
| Stage Movement (standard) | X = 60 mm, Y = 55 mm (2-axis) |
| Optional Deceleration Mode | 0–10 kV landing energy via sample bias |
| Imaging Modes | Video mode (512 × 512), Fast Scan (512 × 512), Slow Scan (2048 × 2048) |
| Image Formats | BMP, TIFF, JPEG, PNG |
| Navigation | Integrated optical camera + chamber-viewing CCD |
| Automation | Auto Contrast/Brightness, Auto Focus, Large-Area Image Stitching |
| Dimensions (main unit) | 650 × 370 × 642 mm (W × D × H) |
| In-situ Compatibility | TEC cooling stage, heating stage, tensile stage (ZEPTOOLS proprietary) |
| Brand | ZEPTOOLS |
|---|---|
| Origin | Guangdong, China |
| Manufacturer Type | Direct Manufacturer |
| Product Category | Domestic (China-Made) |
| Model | RF-8382A |
| Pricing | Upon Request |
| Product Type | Motorized Translation Stage |
| Drive Principle | Piezoelectric Ceramic Actuation |
| Rotation Range | Continuous 360° |
| Position Holding | Integrated Mechanical Lock |
| Environmental Compatibility | Ambient Air and High Vacuum (≤10⁻⁷ mbar) |
| Control Mode | Open-Loop and Closed-Loop (with Optional Capacitive or Strain-Gauge Feedback Module) |
| Resolution (Open-Loop) | Sub-100 nrad |
| Repeatability | ≤±50 nrad |
| Bidirectional Repeatability | ≤±75 nrad |
| Maximum Load Capacity | 1.2 kg (axial, centered) |
| Thermal Drift (24h, 23°C ±0.5°C) | <200 nrad |
| Vacuum-Compatible Materials | 316L Stainless Steel, Ceramic Insulators, Gold-Plated Electrical Contacts |
| Brand | ZEPTOOLS |
|---|---|
| Origin | Beijing, China |
| Manufacturer Type | OEM Manufacturer |
| Product Category | Domestic |
| Model Series | PicoFemto In Situ Cryo Sample Holder |
| Instrument Classification | In Situ Cryogenic TEM Holder |
| Application Field | Materials Science |
| Cooling Medium | Liquid Nitrogen |
| Minimum Temperature | ≤ –170 °C (≤ 103 K) |
| Temperature Stability | < ±0.1 K |
| Cool-down Time to Minimum Temperature | ≤ 45 min |
| Dewar Capacity | 180 mL |
| Cryo Hold Time | ≥ 4 h |
| Resolution Compatibility | < 0.3 nm TEM Imaging |
| Dual-Tilt Range (β) | ±25° |
| Vacuum Bake Temperature | 120 °C |
| Base Vacuum (with Pre-pump System) | 6×10⁻⁵ Pa |
| Integrated Plasma Cleaning Power | 5–50 W (ICP mode) |
| Modular Interface Slots | 4 |
| Compatible TEM Platforms | Thermo Fisher Scientific (TFS), JEOL, Hitachi |
| Optional Functional Modules | Heating, Electrical Biasing, Mechanical Actuation (MEMS), STM Integration, High-Angle Tilt, Porous-Sample Support |
| Brand | ZEPTOOLS |
|---|---|
| Origin | Anhui, China |
| Manufacturer Type | Direct Manufacturer |
| Product Origin | Domestic (China) |
| Model | Custom-Integrated SEM-EDS Platform |
| Price Range | USD 17,000 – 25,500 |
| Magnification Range | 10× – 360,000× (continuously adjustable, user-definable setpoints) |
| Best Imaging Resolution | 3 nm (at 30 kV, SE mode) |
| EDS Detector | Silicon Drift Detector (SDD), ≥10 eV energy resolution (Mn-Kα) |
| Stage Dimensions | 540 mm × 760 mm |
| Motion Axes | 4-axis (X, Y, U, V) motorized precision stage |
| Minimum Positioning Increment | 0.001 mm |
| EDS Quantification Accuracy | ±2–5 wt% (matrix-dependent, per ISO 16529:2014 and ASTM E1508) |
| Brand | ZEPTOOLS |
|---|---|
| Origin | Guangdong, China |
| Manufacturer Type | Direct Manufacturer |
| Product Category | Domestic |
| Model | PicoFemto In Situ TEM Sample Holder Series |
| Instrument Classification | In Situ Tensile Holder |
| Application Field | Materials Science |
| Electrical Measurement Range | 1 nA – 30 mA |
| Current Resolution | < 100 fA |
| Voltage Output | ±10 V (Standard Mode), ±150 V (High-Voltage Mode) |
| Coarse Positioning Range (XY/Z) | 2.5 mm / 1.5 mm |
| Fine Positioning Range (XY/Z) | 15 µm / 1.5 µm |
| Fine Positioning Resolution (XY/Z) | 0.4 nm / 0.04 nm |
| Brand | ZEPTOOLS |
|---|---|
| Origin | Guangdong, China |
| Manufacturer Type | Direct Manufacturer |
| Product Category | Domestic |
| Model | 2DTrans-ams-03 |
| Product Type | Motorized Translation Stage |
| Sample Stage | 5-Axis Motorized Platform (X/Y/Z/α/β) |
| Carrier Slide Stage | 5-Axis Motorized Platform (X/Y/Z/α/β) |
| Rotation Precision (R) | ≤ ±0.01° |
| Linear Repeatability (XY) | ≤ ±2 µm |
| Vertical Repeatability (Z) | ≤ 1 µm |
| Tilt Precision (α/β) | ≤ ±0.005° |
| Heating Range | Up to 240 °C |
| Temperature Stability | ±0.1 °C |
| Microscope | Integrated Motorized Optical Microscope with HDMI Camera (8 MP, 30 fps) |
| Vacuum & Magnetic Sample Holding | Dual-mode Adsorption Module |
| Vibration Isolation | Desktop Pneumatic Air-Floating Platform |
| Motion Control Axes | 7-axis (ZT02) or 9-axis (ZT03) Controller |
| Brand | ZEPTOOLS |
|---|---|
| Origin | Anhui, China |
| Manufacturer Type | Direct Manufacturer |
| Instrument Type | Desktop SEM |
| Electron Source | Pre-aligned Tungsten Filament |
| Acceleration Voltages | 5 kV / 10 kV / 15 kV |
| Secondary Electron (SE) Resolution | <10 nm |
| Backscattered Electron (BSE) Resolution | <10 nm |
| Maximum Magnification | 150,000× |
| Stage Type | Motorized 2-Axis Sample Stage (X/Y: 25 mm × 25 mm) |
| Vacuum Pumping Time to High Vacuum | ≤2 min |
| Max Sample Dimensions | Ø50 mm × H35 mm |
| Integrated Optics | Monolithic Condenser Lens System |
| Operating Environment | Standard Lab/Office Floor with Vibration Damping Base |
| Brand | ZEPTOOLS |
|---|---|
| Origin | Guangdong, China |
| Manufacturer Type | Direct Manufacturer |
| Model | JS10C |
| Measurement Principle | Inductive |
| Vertical Measurement Range | 160 µm |
| Probe Tip Radius | 2 µm / 1 µm (interchangeable) |
| Normal Force Range | 0.5–50 mg |
| Scan Length | 55 mm |
| Step Height Repeatability | < 0.5 nm |
| Vertical Resolution | 0.05 nm (full-scale) |
| Maximum Sample Size | 150 mm (Ø) |
| Scan Resolution | 10 nm |
| Scan Speed | 5–1000 µm/s |
| Max Data Points per Scan | 2,000,000 |
| Software Functions | Step Height, Surface Roughness (Ra, Rq, Rz, etc.), Flatness, Warp Measurement |
| Brand | ZEPTOOLS |
|---|---|
| Origin | Guangdong, China |
| Manufacturer Type | Original Equipment Manufacturer (OEM) |
| Product Category | Domestic |
| Model | RF-33A |
| Pricing | Upon Request |
| Type | Motorized Rotary Translation Stage |
| Brand | ZEPTOOLS |
|---|---|
| Origin | Guangdong, China |
| Manufacturer Type | Original Equipment Manufacturer (OEM) |
| Product Category | Domestic |
| Model | PicoFemto In Situ MEMS Gas/Liquid TEM Sample Holder Series |
| Pricing | Upon Request |
| Instrument Classification | In Situ Gas Holder |
| Application Domain | Materials Science |
| Brand | ZEPTOOLS |
|---|---|
| Origin | Guangdong, China |
| Manufacturer Type | Original Equipment Manufacturer (OEM) |
| Product Origin | Domestic |
| Model | LHe-6H-06 |
| Pricing | Upon Request |
| Base Temperature | 6 K |
| Operating Temperature Range | 6 K to 400 K |
| Temperature Stability | ±0.05 K (auto-controlled) |
| Vacuum Base Pressure | <6×10⁻⁴ Pa (pre-cooling), <6×10⁻⁵ Pa (at 6 K) |
| Sample Stage Diameter | 50 mm |
| Stage Temperature Uniformity | ±0.01 K |
| Probe Arm Count | 6 |
| Probe Motion Range | 50 mm × 50 mm × 30 mm |
| Positioning Resolution | <10 µm |
| Microscope Optical Magnification | 1.4×–9× (with optional 2× auxiliary lens) |
| Video Magnification | ~700× |
| Imaging Resolution | <2 µm |
| Camera | Full HD digital with coaxial + annular LED illumination |
| Electrical Leakage | <1 pA (DC) |
| RF Capability | Up to 100 GHz (optional) |
| Vacuum Feedthroughs | 2 × KF40 flanges |
| Cryocooler | Sumitomo F-50 continuous-flow cryocooler |
| Control Interface | Touchscreen HMI + LabVIEW-compatible drivers |
| Included Vacuum System | Imported turbomolecular pump set + full-range vacuum gauge |
| Integrated Triax Cabling | 6 × Triax probe cables + 1 × additional Triax on stage base |
| Optional Fiber Integration | Replaceable electrical probes with single-mode or multimode optical fibers |
| System Power Consumption | 2.5 kW |
| Net Weight | 200 kg |
| Brand | ZEPTOOLS |
|---|---|
| Origin | Guangdong, China |
| Manufacturer Type | Original Equipment Manufacturer (OEM) |
| Country of Origin | China |
| Model | PicoFemto NI-100 |
| Pricing | Upon Request |
| Load Range | 100 mN |
| Force Resolution | 10 µN |
| Response Time | 50 ms |
| Closed-Loop XY Nanopositioning Stage | Travel ±20 µm (100 µm total), Positional Accuracy: 20 nm |
| Open-Loop XYZ Coarse Stage | XY ±10 mm, Z 10 mm, Minimum Step Size ≤1 nm |
| Dimensions (Nanoforce Stage Only) | 130 × 65 × 55 mm |
| Weight (Bare Stage) | ~300 g |
| Max Sample Size | 30 × 30 mm |
| Optional Modules | High-Temperature Heating (up to 400 °C), Electrical Biasing |
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