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| Brand | ZEPTOOLS |
|---|---|
| Model | JS2000C |
| Measurement Principle | Inductive |
| Vertical Measurement Range | 10 nm – 80 µm |
| Probe Tip Radius | 1 µm / 2 µm |
| Normal Force Range | 0.5–50 mg |
| Scan Length | ≤50 mm |
| Step Height Repeatability | <0.5 nm |
| Vertical Resolution | 0.05 nm |
| Wafer Compatibility | 150 mm (6″) and 200 mm (8″) |
| Maximum Wafer Thickness | 50 mm |
| Positioning Accuracy (Vision System) | ±10 µm |
| Mechanical Stability | >500 consecutive wafers in marathon testing |
| Throughput | ≥10 WPH (single-side, ≥5 measurement positions) |
| Brand | ZEPTOOLS |
|---|---|
| Origin | Guangdong, China |
| Manufacturer Type | Original Equipment Manufacturer (OEM) |
| Product Category | Domestic |
| Model | JS100C |
| Pricing | Available upon Request |
| Measurement Principle | Inductive (LVDT-based) |
| Vertical Measurement Range | 160 µm |
| Probe Tip Radius | 2 µm / 1 µm (interchangeable) |
| Probe Normal Force | 0.5–50 mg |
| Scan Length | 55 mm |
| Step Height Repeatability | < 0.5 nm |
| Vertical Resolution | 0.05 nm (full-scale) |
| Maximum Sample Size | 150 mm × 150 mm |
| Brand | ZEPTOOLS |
|---|---|
| Origin | Guangdong, China |
| Manufacturer Type | Direct Manufacturer |
| Model | JS10C |
| Measurement Principle | Inductive |
| Vertical Measurement Range | 160 µm |
| Probe Tip Radius | 2 µm / 1 µm (interchangeable) |
| Normal Force Range | 0.5–50 mg |
| Scan Length | 55 mm |
| Step Height Repeatability | < 0.5 nm |
| Vertical Resolution | 0.05 nm (full-scale) |
| Maximum Sample Size | 150 mm (Ø) |
| Scan Resolution | 10 nm |
| Scan Speed | 5–1000 µm/s |
| Max Data Points per Scan | 2,000,000 |
| Software Functions | Step Height, Surface Roughness (Ra, Rq, Rz, etc.), Flatness, Warp Measurement |
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