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| Brand | Hiden |
|---|---|
| Origin | United Kingdom |
| Model | SIMS Workstation |
| Mass Analyzer Type | Quadrupole |
| Primary Beam Energy | 25 keV Ga⁺ |
| Mass Range | 1000 amu |
| Mass Resolution | 0.5 amu (5% valley between adjacent equal-height peaks) |
| Detection Mode | Pulsed Ion Counting (positive/negative ions) |
| Dynamic Range | 7 decades |
| Spatial Resolution | 50 nm (Ga⁺ beam), 100–150 µm (O₂⁺/Cs⁺ beams) |
| Vacuum System | UHV-compatible, three-stage differential pumping |
| Control Interface | Ethernet LAN, RS232, RS485 |
| Software | MASsoft v6.x (GLP-compliant audit trail, method templating, automated sequence execution) |
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