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| Brand | Ted Pella |
|---|---|
| Origin | Imported |
| Manufacturer Type | Authorized Distributor |
| Model | 208HR |
| Target Material | Gold (Au) |
| Target Diameter | φ58 mm |
| Control Method | Programmable Digital Control |
| Chamber Dimensions | Ø120 mm × H120 mm |
| Sample Stage Capacity | 12 SEM stubs |
| Stage Height Adjustment Range | 50 mm |
| Sputtering Gas | Air or Argon |
| Base Pressure | 1 × 10⁻⁵ mbar |
| Pumping Speed | 300 L/min at 0.1 mbar |
| Pumpdown Time | ≤60 s to 1 × 10⁻³ mbar |
| Operating Pressure Range | 0.2–0.005 mbar |
| Deposition Rate Tunability | 0.002–1.0 nm/s |
| Current Selection | 20/40/60/80 mA (digitally selectable) |
| Magnetron Type | Low-Voltage Planar Magnetron |
| Safety Interlock | Yes |
| Vacuum Gauge | Analog + digital readout |
| Optional Thickness Monitor | MTM-20 Quartz Crystal Microbalance |
| Brand | EMCN |
|---|---|
| Origin | Henan, China |
| Manufacturer Type | Authorized Distributor |
| Country of Manufacture | China |
| Model | MSBC-12 |
| Target Material | Pure Gold (Au) |
| Target Diameter | 58 mm |
| Control Mode | Fully Automatic |
| Chamber Dimensions | Ø100 mm × 130 mm (H) |
| Sample Stage Diameter | Ø40 mm (holds up to six standard specimen cups) |
| Sputtering Gas | Ambient Air or Argon (Ar) with dedicated Ar inlet and fine-flow needle valve |
| Vacuum System | Direct-coupled rotary vane pump (2 L/s) |
| Vacuum Gauge | Pirani gauge |
| Operating Pressure Range | Adjustable down to ~20 Pa via precision bleed valve |
| Gas Inlet | Dual-mode (air default |
| Brand | EMCN |
|---|---|
| Model | 9000 Series |
| Type | Vacuum Oven |
| Temperature Range | RT+10°C to 200°C / RT+10°C to 250°C |
| Temperature Uniformity | ±1.0°C |
| Internal Chamber Dimensions | 340 × 320 × 320 mm (W×D×H) |
| External Dimensions | 620 × 440 × 490 mm (W×D×H) |
| Chamber Material | Stainless Steel or High-Quality Cold-Rolled Steel |
| Heating Method | Embedded Heated Plate |
| Power Supply | Standard Single-Phase AC (specification compliant with IEC 61000-4 series for EMC) |
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