Boyuan Weina / VPI
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| Brand | Boyuan Weina / VPI |
|---|---|
| Origin | Beijing, China |
| Manufacturer Type | Authorized Distributor |
| Product Origin | Domestic (China) |
| Model | SD-900M Magnetron Sputter Coater |
| Target Materials | Au, Ag, Pt, etc. |
| Target Diameter & Thickness | φ50 mm × 0.1 mm |
| Control Mode | Manual and Programmable Auto Mode |
| Chamber Dimensions | φ160 mm × 120 mm (D × H) |
| Sample Stage Diameter | 50 mm (compatible with 70 mm optional) |
| Sputtering Gases | Ar, N₂, O₂, and other process gases |
| Maximum DC Voltage | −1600 V |
| Max Sputtering Current | 100 mA |
| Base Pressure | ≤4 × 10⁻² mbar |
| Pumping Speed | 2 L/s (VRD-8 rotary vane pump) |
| Power Input | 220 V AC, 50 Hz (110 V option available) |
| Deposition Rate | ~40 nm/min (Au, under optimized Ar plasma conditions) |